One aspect relates to a process for the preparation of a quartz glass body, including providing a silicon dioxide granulate, wherein the silicon dioxide granulate was made from pyrogenic silicon dioxide powder and the silicon dioxide granulate has a BET surface area in a range from 20 to 40 m.sup.2/g, making a glass melt out of silicon dioxide granulate in an oven and making a quartz glass body out of at least part of the glass melt. The oven has at least a first and a further chamber connected to one another via a passage. The temperature in the first chamber is lower than the temperature in the further chambers. On aspect relates to a quartz glass body which is obtainable by this process. One aspect relates to a light guide, an illuminant and a formed body, which are each obtainable by further processing of the quartz glass body.

One aspect relates to a process for the preparation of a quartz glass body. The process includes providing silicon dioxide particles, making a glass melt out of the silicon dioxide particles in an oven and making a quartz glass body out of at least part of the glass melt. The oven has a gas outlet through which gas is removed from the oven, wherein the dew point of the gas on exiting the oven through the gas outlet is less than 0° C. One aspect further relates to a quartz glass body which is obtainable by this process. One aspect further relates to a light guide, an illuminant and a formed body, which are each obtainable by further processing of the quartz glass body.

A radiation-resistant laser optical fiber preform core rod at least includes one type of activated ion (Yb.sup.3+, Er.sup.3+) and one or more types of co-doped ion (Al.sup.3+, P.sup.5+, Ge.sup.4+, Ce.sup.3+, F.sup.−), and —OD group of 16-118 ppm. Irradiation resistance of core rod glass can be effectively improved by sequentially performing pre-treatments, i.e. deuterium loading, pre-irradiation and thermal annealing on a preform core rod. Electron paramagnetic resonance test shows that, under the same radiation condition, the radiation induced color center concentration in a preform core rod treated by the method above is lower than in an untreated core rod by one or more orders of magnitude. The obtained core rod can be used for preparing a radiation-resistant rare earth-doped silica fiber, and has the advantages of high laser slope efficiency, low background loss, being able to be used stably in a vacuum environment for a long time, for example.

A method for preparing quartz glass with low content of hydroxyl and high purity, includes providing silica powders including hydroxyl groups. The silica powders are dehydroxylated, which includes drying the silica powders at a first temperature, heating the silica powders up to a second temperature and introducing a first oxidizing gas including halogen gas, thereby obtaining first dehydroxylated powders, and heating the first dehydroxylated powders up to a third temperature and introducing a second oxidizing gas including oxygen or ozone, thereby obtaining second dehydroxylated powders. The second dehydroxylated powders are heated up to a fourth temperature to obtain a vitrified body. The vitrified body is cooled to obtain the quartz glass with low content of hydroxyl and high purity. The quartz glass prepared by the above method has low content of hydroxyl and high purity. A quartz glass with low content of hydroxyl and high purity is also provided.

A method for producing titanium-doped synthetic quartz glass includes: (A) providing a liquid SiO.sub.2 feedstock material that comprises more than 60% by weight of the polyalkylsiloxane D4; (B) evaporating the liquid SiO.sub.2 feedstock material to produce a gaseous SiO.sub.2 feedstock vapor; (C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor; (D) converting the SiO.sub.2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively; (E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO.sub.2 soot body; (F) vitrifying the titanium-doped SiO.sub.2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight. The liquid SiO.sub.2 feedstock material comprises at least one additional component made of the polyalkylsiloxane D3 having a weight fraction of mD3 and one additional component made of the polyalkylsiloxane D5 having a weight fraction of mD5 at a weight ratio of mD3/mD5 in a range of 0.01 to 1, and the liquid SiO.sub.2 feedstock material provided is evaporated while maintaining the weight ratio of mD3/mD5 and at least 99% by weight thereof are evaporated to form the gaseous SiO.sub.2 feedstock vapor.

A method of producing bi-modal particles includes the steps of igniting a first precursor gas using a primary burner thereby producing a first plurality of particles of a first size, fluidly transporting the first plurality of particles down a particle tube, igniting a second precursor gas using a secondary burner thereby producing a second plurality of particles of a second size, flowing the second plurality of particles into the first plurality of particles, and capturing the first and second plurality of particles.

An optical glass includes La.sup.3+, Zn.sup.2+, Nb.sup.5+, and Ti.sup.4+ as a cation configuring glass. La.sup.3+, Zn.sup.2+, Nb.sup.5+, and Ti.sup.4+ which satisfy 10 cat %≤La.sup.3+≤20 cat %, 10 cat %≤Zn.sup.2+≤60 cat %, 20 cat %≤Nb.sup.5+≤60 cat %, and 0 cat %≤Ti.sup.4+≤40 cat % expressed by cation %.

A method for producing a blank from titanium-doped, highly silicic-acidic glass having a specified fluorine content for use in EUV lithography is described, in which the thermal expansion coefficient over the operating temperature remains at zero as stably as possible. The course of the thermal expansion coefficient of Ti-doped silica glass depends on a plurality of influencing factors. In addition to the absolute titanium content, the distribution of the titanium is of significant importance, as is the ratio and distribution of additional doping elements, such as fluorine. In the method, fluorine-doped TiO.sub.2—SiO.sub.2 soot particles are generated and processed further via consolidation and vitrifying into the blank, and, by flame hydrolysis of input substances containing silicon and titanium, TiO.sub.2—SiO.sub.2-soot particles are formed, exposed to a reagent containing fluorine in a moving powder bed, and converted to the fluorine-doped TiO.sub.2—SiO.sub.2-soot particles.

A method of producing bi-modal particles includes the steps of igniting a first precursor gas using a primary burner thereby producing a first plurality of particles of a first size, fluidly transporting the first plurality of particles down a particle tube, igniting a second precursor gas using a secondary burner thereby producing a second plurality of particles of a second size, flowing the second plurality of particles into the first plurality of particles, and capturing the first and second plurality of particles.

A process for producing a fluorinated quartz glass is described, including providing an SiO.sub.2 soot body; reacting the SiO.sub.2 soot body with a fluorinating agent having a boiling point of greater than or equal to −10° C. to obtain a fluorinated SiO.sub.2 soot body; and vitrifying the fluorinated SiO.sub.2 soot body.