Provided is a glass fiber having a low spinning temperature and a low liquidus temperature, and besides, having a large difference between the liquidus temperature and the spinning temperature, and a method of manufacturing the same. The glass fiber of the present invention includes as a glass composition, in terms of mass % on an oxide basis, 50% to 65% of SiO.sub.2, 0% to 3% of Al.sub.2O.sub.3, 0% to 1% of MgO, 0% to less than 0.7% of CaO, 0% to 1% of Li.sub.2O, 10% to 20% of Na.sub.2O, 0% to 2% of K.sub.2O, 6% to 10% of TiO.sub.2, and 15% to 20% of ZrO.sub.2, and has a value for (Na.sub.2O+K.sub.2O)/(MgO+CaO) of 6.0 or more.

Provided is a glass fiber having a low spinning temperature and a low liquidus temperature, and besides, having a large difference between the liquidus temperature and the spinning temperature, and a method of manufacturing the same. The glass fiber of the present invention includes as a glass composition, in terms of mass % on an oxide basis, 50% to 65% of SiO.sub.2, 0% to 3% of Al.sub.2O.sub.3, 0% to 1% of MgO, 0% to less than 0.7% of CaO, 0% to 1% of Li.sub.2O, 10% to 20% of Na.sub.2O, 0% to 2% of K.sub.2O, 6% to 10% of TiO.sub.2, and 15% to 20% of ZrO.sub.2, and has a value for (Na.sub.2O+K.sub.2O)/(MgO+CaO) of 6.0 or more.

The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO.sub.2, 5-15 mol % of Al.sub.2O.sub.3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF.sub.2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index K.sub.H is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.

The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO.sub.2, 5-15 mol % of Al.sub.2O.sub.3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF.sub.2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index K.sub.H is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.

A glass substrate has a compaction of 0.1 to 100 ppm. An absolute value |Δα.sub.50/100| of a difference between an average coefficient of thermal expansion α.sub.50/100 of the glass substrate and an average coefficient of thermal expansion of single-crystal silicon at 50° C. to 100° C., an absolute value |Δα.sub.100/200| of a difference between an average coefficient of thermal expansion α.sub.100/200 of the glass substrate and an average coefficient of thermal expansion of the single-crystal silicon at 100° C. to 200° C., and an absolute value |Δα.sub.200/300| of a difference between an average coefficient of thermal expansion α.sub.200/300 of the glass substrate and an average coefficient of thermal expansion of the single-crystal silicon at 200° C. to 300° C. are 0.16 ppm/° C. or less.

A glass substrate has a compaction of 0.1 to 100 ppm. An absolute value |Δα.sub.50/100| of a difference between an average coefficient of thermal expansion α.sub.50/100 of the glass substrate and an average coefficient of thermal expansion of single-crystal silicon at 50° C. to 100° C., an absolute value |Δα.sub.100/200| of a difference between an average coefficient of thermal expansion α.sub.100/200 of the glass substrate and an average coefficient of thermal expansion of the single-crystal silicon at 100° C. to 200° C., and an absolute value |Δα.sub.200/300| of a difference between an average coefficient of thermal expansion α.sub.200/300 of the glass substrate and an average coefficient of thermal expansion of the single-crystal silicon at 200° C. to 300° C. are 0.16 ppm/° C. or less.

The present invention is based, at least in part, on the identification of a pharmaceutical container formed, at least in part, of a glass composition which exhibits a reduced propensity to delaminate, i.e., a reduced propensity to shed glass particulates. As a result, the presently claimed containers are particularly suited for storage of pharmaceutical compositions and, specifically, a pharmaceutical solution comprising a pharmaceutically active ingredient, for example, RITUXAN (rituximab), AVASTIN (Bevacizumab), LUCENTIS (Ranibizumab) or HERCEPTIN (trastuzumab).

The present invention is based, at least in part, on the identification of a pharmaceutical container formed, at least in part, of a glass composition which exhibits a reduced propensity to delaminate, i.e., a reduced propensity to shed glass particulates. As a result, the presently claimed containers are particularly suited for storage of pharmaceutical compositions and, specifically, a pharmaceutical solution comprising a pharmaceutically active ingredient, for example, RITUXAN (rituximab), AVASTIN (Bevacizumab), LUCENTIS (Ranibizumab) or HERCEPTIN (trastuzumab).

The present invention is based, at least in part, on the identification of a pharmaceutical container formed, at least in part, of a glass composition which exhibits a reduced propensity to delaminate, i.e., a reduced propensity to shed glass particulates. As a result, the presently claimed containers are particularly suited for storage of pharmaceutical compositions and, specifically, a pharmaceutical solution comprising a pharmaceutically active ingredient, for example, HUMALOG (insulin lispro), HUMALOG MIX 75-25 (insulin lispro), HUMALOG MIX 50-50 (insulin lispro), HUMILIN 70-30 (insulin), HUMILIN N (insulin), HUMULIN R (insulin) or GEMZAR (gemcitabine).

The present invention is based, at least in part, on the identification of a pharmaceutical container formed, at least in part, of a glass composition which exhibits a reduced propensity to delaminate, i.e., a reduced propensity to shed glass particulates. As a result, the presently claimed containers are particularly suited for storage of pharmaceutical compositions and, specifically, a pharmaceutical solution comprising a pharmaceutically active ingredient, for example, HUMALOG (insulin lispro), HUMALOG MIX 75-25 (insulin lispro), HUMALOG MIX 50-50 (insulin lispro), HUMILIN 70-30 (insulin), HUMILIN N (insulin), HUMULIN R (insulin) or GEMZAR (gemcitabine).