C04B2235/3222

HEAT-RESISTANT MEMBER
20230051919 · 2023-02-16 ·

A heat-resistant member (1) according to the present disclosure contains alumina as a main component, and magnesium aluminate and boron. The content percentage of the magnesium aluminate at the surface is higher than the content percentage of the magnesium aluminate in a surface layer section located directly below the surface.

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS FOR SEMICONDUCTOR CHAMBER APPLICATIONS

Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.

INORGANIC FIBER MOLDED BODY, HEATING FURNACE, STRUCTURE, AND METHOD FOR MANUFACTURING INORGANIC FIBER MOLDED BODY

An inorganic fiber molded body includes an alumina fiber, an inorganic porous filler, and a colloidal silica, in which a ratio of crystalline minerals in the alumina fiber is 30% by mass or more and 80% by mass or less, the inorganic porous filler contains CaO.Math.6Al.sub.2O.sub.3 in which a particle diameter D95, which has a cumulative value of 95% in a volume frequency particle size distribution, is 300 μm or less, and in 100% by mass of the inorganic fiber molded body, a content of the alumina fiber is 15% by mass or more and 70% by mass or less, a content of the inorganic porous filler is 20% by mass or more and 79% by mass or less, and a content of the colloidal silica is 2% by mass or more and 8% by mass or less.

Lithium stuffed garnet setter plates for solid electrolyte fabrication

Setter plates are fabricated from Li-stuffed garnet materials having the same, or substantially similar, compositions as a garnet Li-stuffed solid electrolyte. The Li-stuffed garnet setter plates, set forth herein, reduce the evaporation of Li during a sintering treatment step and/or reduce the loss of Li caused by diffusion out of the sintering electrolyte. Li-stuffed garnet setter plates, set forth herein, maintain compositional control over the solid electrolyte during sintering when, upon heating, lithium is prone to diffuse out of the solid electrolyte.

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

Ion beam sputtering with ion assisted deposition for coatings on chamber components

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.

Wavelength converter and method for producing thereof, and light emitting device using the wavelength converter

A wavelength converter 100 includes: a first phosphor 1 composed of an inorganic phosphor activated by Ce.sup.3+; and a second phosphor 2 composed of an inorganic phosphor activated by Ce.sup.3+ and different from the first phosphor. At least one of the first phosphor and the second phosphor is particulate. The first phosphor and the second phosphor are bonded to each other by at least one of a chemical reaction in a contact portion between the compound that constitutes the first phosphor and a compound that constitutes the second phosphor and of adhesion between the compound that constitutes the first phosphor and the compound that constitutes the second phosphor.

CERAMIC ARTICLES MADE FROM CERAMIC BEADS WITH OPEN POROSITY

A ceramic article and method of manufacturing. The ceramic article comprises a porous ceramic material having a microstructure comprising an interconnected network of porous spheroidal ceramic beads. The microstructure has a total open porosity defined as the sum of an open intrabead porosity of the beads and an interbead porosity defined by interstices between the beads in the interconnected network. The microstructure has a bimodal pore size distribution having an intrabead peak corresponding to the open intrabead porosity and an interbead peak corresponding to the interbead porosity. An intrabead median pore size of the intrabead porosity is less than an interbead median pore size of the interbead porosity.

Optical wavelength conversion member and light-emitting device

One aspect of the disclosure provides an optical wavelength conversion member including a polycrystalline ceramic sintered body containing, as main components, Al.sub.2O.sub.3 crystal grains and crystal grains represented by formula (Y,A).sub.3B.sub.5O.sub.12:Ce. In the optical wavelength conversion member, a (Y,A).sub.3B.sub.5O.sub.12:Ce crystal grain has a region wherein the A concentration of a peripheral portion of the (Y,A).sub.3B.sub.5O.sub.12:Ce crystal grain is higher than that of an interior portion of the (Y,A).sub.3B.sub.5O.sub.12:Ce crystal grain. Thus, the optical wavelength conversion member exhibits high fluorescence intensity (i.e., high emission intensity) and high heat resistance (i.e., low likelihood of temperature quenching). The optical wavelength conversion member has a structure wherein the element A concentration of a peripheral portion of a (Y,A).sub.3B.sub.5O.sub.12:Ce crystal grain differs from that in an interior portion of the crystal grain. This structure can achieve a ceramic fluorescent body exhibiting superior fluorescent characteristics and superior thermal characteristics with varied colors of emitted light.

Magnesium aluminate spinel reinforced magnesium oxide-based foam ceramic filter synthesized in situ from magnesium oxide whisker, and preparation method therefor

The present invention provides A magnesium oxide whisker in-situ formed MA spinel-reinforced magnesium oxide-based ceramic foam filter and a method for preparing the same. The method comprising: 1) preparing a ceramic slurry having a solid content of 60%-70% by dosing 15%-25% by mass of a nanometer alumina sol, 0.8%-1.5% by mass of a rheological agent, and the balance magnesium oxide ceramic powder comprising magnesium oxide whiskers, and then adding deionized water and ball milling to mix until uniform, and then vacuum degassing the mixture; 2) soaking a polyurethane foam template into the ceramic slurry, squeezing by a roller press the polyurethane foam template to remove redundant slurry therein to make a biscuit, and drying the biscuit by heating it to 80° C.-1200° C.; 3) putting the dried biscuit into a sintering furnace, elevating the temperature to 1400° C.-1600° C. and performing a high temperature sintering, cooling to the room temperature with the furnace to obtain the magnesium oxide-based ceramic foam filter.