Methods and apparatus for depositing material on a continuous substrate are provided herein. In some embodiments, an apparatus for processing a continuous substrate includes: a first chamber having a first volume; a second chamber having a second volume fluidly coupled to the first volume; and a plurality of process chambers, each having a process volume defining a processing path between the first chamber and the second chamber, wherein the process volume of each process chamber is fluidly coupled to each other, to the first volume, and to the second volume, and wherein the first chamber, the second chamber, and the plurality of process chambers are configured to process a continuous substrate that extends from the first chamber, through the plurality of process chambers, and to the second chamber.

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

An aerospace component may comprise a fiber reinforced composite material. The fiber reinforced composite material includes a plurality of fiber layers and a carbon matrix surrounding the plurality of fiber layers. A plurality of ceramic particles is dispersed in the carbon matrix. A first fiber layer of the plurality of fiber layers may include a carbon fiber, and a second fiber layer of the plurality of fiber layers may include a non-carbon fiber. A hardness of the non-carbon fiber is greater than a hardness of carbon fiber.

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.

A method for manufacturing ceramic matrix composites (CMC) and CMCs made by the method are disclosed. The method can be a manual process or an automated process, such as using a robotic system, that is used for controlled delivery of ceramic particles in a CMC fabric. The method includes identifying voids present between adjacent tows of the CMC fabric and dispensing ceramic particles into the voids. Applying the ceramic particles in the center of the voids reduces the size and volume fraction of the voids/defects, improving the homogeneity of surface texture of the preform, homogeneity of microstructure, and part model shape conformity. The method for manufacturing CMCs creates CMCs having a homogenous distribution of small pores after matrix formation that improves the interlaminar mechanical and thermal properties of the CMCs.

Provided is a member for optical glass manufacturing apparatus. The member is used for optical glass manufacturing apparatus and exposed to a gas containing a halogen element in a high temperature environment of 1100° C. or higher. The member includes dense ceramics containing silicon nitride as a main component, and a porosity of a surface layer of the member is smaller than a porosity of the inside of the member.

A method of preparing a woven ceramic fabric for use in a ceramic matrix composite includes transforming a woven fabric sheet having a first tow architecture into a separated woven fabric sheet having a second tow architecture, the first tow architecture including a plurality of warp tows and a plurality of weft tows, and the second tow architecture including a plurality of warp subtows and/or a plurality of weft subtows. Transforming the woven fabric sheet includes separating at least some of the plurality of warp tows and/or the plurality of weft tows into a greater number of corresponding warp subtows and/or weft subtows, respectively, such that second tow architecture includes more warp subtows and/or weft subtows than the first tow architecture comprises warp tows and weft tows, and wherein each of the warp subtows and/or weft subtows includes fewer filaments than corresponding warp tow and/or weft tow. Each of the plurality of warp subtows and/or weft subtows is spaced apart from the closest adjacent warp subtow and/or weft subtow, respectively, a distance of 25 to 230 microns.

The present invention relates to a method for preparing a SiC—Si.sub.3N.sub.4 composite material and a SiC—Si.sub.3N.sub.4 composite material prepared according to same and comprises the steps of: preparing a mold; and forming a SiC—Si.sub.3N.sub.4 composite material by introducing, to the mold, a source gas comprising Si, N and C, at 1100 to 1600° C. More particularly, the present invention provides the SiC—Si.sub.3N.sub.4 composite material of high purity that is applicable to a semiconductor process, and increases the thermal shock strength of a SiC material by causing Si.sub.3N.sub.4, which is a material with a high thermal shock strength, to grow together via a CVD method.

A phosphor plate including: a complex containing an α-sialon phosphor and a sintered body containing spinel represented by a general formula M.sub.2xAl.sub.4-4xO.sub.6-4x (where M represents at least one of Mg, Mn, and Zn, and 0.2<x<0.6). In addition, there is provided a light emitting device including: a group III nitride semiconductor light emitting element; and the phosphor plate provided on one surface of the group III nitride semiconductor light emitting element. Further, there is provided a method for manufacturing the phosphor plate.

A method of forming a ceramic matrix composite component includes forming a fiber preform, the fiber preform including a plurality of ceramic fiber plies, a non-reduced fiber region having an areal weight, and a reduced fiber region characterized by a reduced areal weight less than the areal weight of the non-reduced fiber region by at least 5 percent. The method further includes selectively applying ceramic particles to the reduced fiber region in such manner as to avoid applying the ceramic particles to the non-reduced fiber region, and subsequently densifying the preform.