Disclosed are: damage-resistant ECMCs that need to work and remain elastic between minus 120° C. and positive 300° C.; ECMCs that need to be able to contain a flame of 1900° C. for more than 90 minutes; and composite structures, especially highly stressed structures. One of the characteristic problems of ceramic matrices is their fragility. Indeed, when a fracture starts, it propagates easily in the matrix. Disclosed are elastic ceramic matrix composites (ECMCs), for which: the ceramic matrix is split into solid “ceramic microdomains” (CMDs); the CMDs are connected to one another by a dense network of “elastic microelements” (EMEs); and the bonds between the EMEs and the CMDs are strong chemical bonds, preferably covalent.

Disclosed are: damage-resistant ECMCs that need to work and remain elastic between minus 120° C. and positive 300° C.; ECMCs that need to be able to contain a flame of 1900° C. for more than 90 minutes; and composite structures, especially highly stressed structures. One of the characteristic problems of ceramic matrices is their fragility. Indeed, when a fracture starts, it propagates easily in the matrix. Disclosed are elastic ceramic matrix composites (ECMCs), for which: the ceramic matrix is split into solid “ceramic microdomains” (CMDs); the CMDs are connected to one another by a dense network of “elastic microelements” (EMEs); and the bonds between the EMEs and the CMDs are strong chemical bonds, preferably covalent.

Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.

A high strength ceramic body for use in a regenerative burner media bed, comprising a generally spherical refractory portion and a plurality of irregular aggregate portions distributed randomly throughout the generally spherical portion. The aggregate portions are selected from the group comprising tabular alumina, white fused alumina, mullite, chamotte, and combinations thereof. The generally spherical portion has a porosity of less than 1 percent and is more than 99.5 weight percent alumina.

Methods and apparatus are disclosed for producing seeds that are transformed into hollow spheres. A seed includes a core and a coating. Upon heating, the coating becomes viscous and expands responsive to an internal gas pressure created by the core. Example applications for the seeds and/or cores are disclosed, including bricks and other construction materials having the hollow spheres incorporated therein.

A process for producing a process for producing a LnM.sub.2Cu.sub.3O.sub.x high-temperature superconductive powder, the process comprising: i) providing an aqueous solution of Ln, M and Cu and at least one mineral acid; ii) adding at least one sequestrating agent and, optionally, at least one dispersant to the solution to form a precipitate; iii) recovering the precipitate from the solution; and iv) heating the precipitate in a flow of oxygen to form the LnM.sub.2Cu.sub.3O.sub.x powder, wherein Ln is a rare earth element, preferably Y, Ce, Dy, Er, Gd, La, Nd, Pr, Sm, Sc, Yb, or a mixture of two or more thereof, and wherein M is selected from Ca, Sr, and Ba.

Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

Systems and methods for making ceramic powders are provided. The method for forming a ceramic powder includes: preparing a precursor mixture, wherein the preparing comprises adding at least one additive to a plurality of reagents, wherein the at least one additive includes at least one of: an oxide, a salt, a pure metal, or an alloy of elements ranging from atomic numbers 21 through 30, 39 through 51, and 57 through 77 and combinations thereof; and carbothermically reacting the precursor mixture to form a ceramic powder, wherein, due to the preparing step, the precursor mixture comprises a sufficient amount of the at least one additive to form the ceramic powder, wherein the ceramic powder comprises: (a) a morphology selected from the group consisting of irregular, equiaxed, plate-like, and combinations thereof; and (b) a particle size distribution selected from the group consisting of fine, intermediate, coarse, and combinations thereof.

Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.

A porous ceramic structure intended to form the reinforcement of a ceramic matrix composite component, the structure having a connected porosity delimited by an internal surface which includes a plurality of first points, each first point being associated with a second point aligned with this first point along a normal to the internal surface taken at the first point, the structure being divisible into a plurality of unit volumes of a size less than or equal to 5 mm3 in each of which: a characteristic pore length, corresponding to the maximum of the distance separating each first point from its associated second point, is less than or equal to 0.5 mm; and a porosity ratio is greater than or equal to 50%.