A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y.sub.2O.sub.3—ZrO.sub.2 powder consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y.sub.2O.sub.3—ZrO.sub.2, the sintered ceramic body consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2.

Provided is a ferrite composition composed of: a main component including 23.0 to 47.0 mole % of Fe compound in terms of Fe.sub.2O.sub.3, 3.0 to 16.0 mole % of Cu compound in terms of CuO, 4.0 to 39.0 mole % of Zn compound in terms of ZnO, 1.5 to 13.0 mole % of Si compound in terms of SiO.sub.2, and a residue of Ni compound; and a subcomponent including, with respect to 100 parts by weight of the main component, 0.1 to 8.0 parts by weight of Co compound in terms of Co.sub.3O.sub.4 and 0.25 to 5.00 parts by weight of Bi compound in terms of Bi.sub.2O.sub.3.

An object of the present invention is to provide a ferrite material that is excellent in temperature characteristic and DC superimposition characteristic. The present invention relates to NiZnCu-based ferrite particles comprising 70 to 95% by weight of an NiZnCu ferrite having a specific composition, 1 to 20% by weight of nickel oxide, 0 to 20% by weight of zinc oxide and 1 to 10% by weight of copper oxide, and a ferrite sintered ceramics obtained by sintering the ferrite particles.

A ferrite sintered body includes a crystal grain of a NiZn ferrite and a grain boundary thereof, in which Ti is unevenly distributed in an outer region of the crystal grain, the outer region extending from an interface of the crystal grain to a length of 20% of a major axis of the crystal grain.

A ferrite composition comprises a main component and a sub component. The main component is comprised of 40.0 to 49.8 mol % iron oxide in terms of Fe.sub.2O.sub.3, 5.0 to 14.0 mol % copper oxide in terms of CuO, 0 to 32.0 mol % zinc oxide in terms of ZnO, and a remaining part of nickel oxide. The sub component includes 0.5 to 4.0 wt % tin oxide in terms of SnO.sub.2, 0.10 to 1.00 wt % bismuth oxide in terms of Bi.sub.2O.sub.3, and 0.21 to 3.00 wt % cobalt oxide in terms of Co.sub.3O.sub.4, with respect to the main component.