Patent classifications
C04B35/56
Dense composite material, method for producing the same, joined body, and member for semiconductor manufacturing device
According to the present invention, a dense composite material includes titanium silicide in an amount of 43 to 63 mass %; silicon carbide in an amount less than the mass percentage of the titanium silicide; and titanium carbide in an amount less than the mass percentage of the titanium silicide. In the dense composite material, a maximum value of interparticle distances of the silicon carbide is 40 μm or less, a standard deviation of the interparticle distances is 10 or less, and an open porosity of the dense composite material is 1% or less.
HIGH TEMPERATURE COMPOSITE MATERIALS WITH EROSION RESISTANT SEAL COAT
Disclosed is a coated composite comprising a seal coat disposed on a composite material wherein the seal coat comprises protective particles and a matrix.
HIGH TEMPERATURE COMPOSITE MATERIALS WITH EROSION RESISTANT SEAL COAT
Disclosed is a coated composite comprising a seal coat disposed on a composite material wherein the seal coat comprises protective particles and a matrix.
HETEROGENEOUS COMPOSITE BODIES WITH ISOLATED CERMET REGIONS FORMED BY HIGH TEMPERATURE, RAPID CONSOLIDATION
A heterogeneous composite consisting of near-nano ceramic clusters dispersed within a ductile matrix. The composite is formed through the high temperature compaction of a starting powder consisting of a core of ceramic nanoparticles held together with metallic binder. This core is clad with a ductile metal such that when the final powder is consolidated, the ductile metal forms a tough, near-zero contiguity matrix. The material is consolidated using any means that will maintain its heterogeneous structure.
Member for plasma processing apparatus and plasma processing apparatus with the same
Provided is a member for a plasma processing apparatus consisting of a tungsten carbide phase. The member includes at least one type of atom selected from the group consisting of a Fe atom, a Co atom, and a Ni atom, in which the total content of the atoms is in a range of 30 to 3300 atomic ppm.
Polysilocarb materials, methods and uses
Polysilocarb formulations, cured and pyrolized materials, was well as articles and use for this material. In particular pyrolized polysilocarb ceramic materials and articles contain these materials where, the ceramic has from about 30 weight % to about 60 weight % silicon, from about 5 weight % to about 40 weight % oxygen, and from about 3 weight % to about 35 weight % carbon, and wherein 20 weight % to 80 weight % of the carbon is silicon-bound-carbon and 80 weight % to about 20 weight % of the carbon is free carbon.
Polysilocarb materials, methods and uses
Polysilocarb formulations, cured and pyrolized materials, was well as articles and use for this material. In particular pyrolized polysilocarb ceramic materials and articles contain these materials where, the ceramic has from about 30 weight % to about 60 weight % silicon, from about 5 weight % to about 40 weight % oxygen, and from about 3 weight % to about 35 weight % carbon, and wherein 20 weight % to 80 weight % of the carbon is silicon-bound-carbon and 80 weight % to about 20 weight % of the carbon is free carbon.
Nanocomposite silicon oxygen carbon materials and uses
Nanocomposite silicon and carbon compositions. These compositions can be made from polymer derived ceramics, and in particular, polysilocarb precursors. The nanocomposite can have non-voids or be nano-void free and can form larger macro-structures and macro-composite structures. The nanocomposite can contain free carbon domains in an amorphous SiOC matrix.
Nanocomposite silicon oxygen carbon materials and uses
Nanocomposite silicon and carbon compositions. These compositions can be made from polymer derived ceramics, and in particular, polysilocarb precursors. The nanocomposite can have non-voids or be nano-void free and can form larger macro-structures and macro-composite structures. The nanocomposite can contain free carbon domains in an amorphous SiOC matrix.
Method for producing non-oxide ceramic powders
The invention relates to a method for producing a non-oxide ceramic powder comprising a nitride, a carbide, a boride or at least one MAX phase with the general composition Mn+1AXn, where M=at least one element from the group of transition elements (Sc, Ti, V, Cr, Zr, Nb, Mo, Hf and Ta), A=at least one A group element from the group (Si, Al, Ga, Ge, As, Cd, In, Sn, Tl and Pb), X=carbon (C) and/or nitrogen (N) and/or boron (B), and n=1, 2 or 3. According to the invention, corresponding quantities of elementary starting materials or other precursors are mixed with at least one metal halide salt (NZ), compressed (pellet), and heated for synthesis with a metal halide salt (NZ). The compressed pellet is first enveloped with another metal halide salt, compressed again, arranged in a salt bath and heated therewith until the melting temperature of the salt is exceeded. Optionally, melted silicate can be added, which prevents the salt from evaporating at high temperatures. Advantageously, the method can be carried out in the presence of air.