Patent classifications
C04B35/622
METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS FOR SEMICONDUCTOR CHAMBER APPLICATIONS
Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.
PARTICLE BASED INSERTS FOR CMC
A method for forming a ceramic matrix composite component includes forming a fibrous preform of the component with a plurality of fiber layers and a fill region disposed between one or more of the plurality of fiber layers. Ceramic particles are provided in the fill region, which is densified using chemical vapor infiltration.
Annealed garnet electrolyte separators
Set forth herein are pellets, thin films, and monoliths of lithium-stuffed garnet electrolytes having engineered surfaces. These engineered surfaces have a list of advantageous properties including, but not limited to, low surface area resistance, high Li.sup.+ ion conductivity, low tendency for lithium dendrites to form within or thereupon when the electrolytes are used in an electrochemical cell. Other advantages include voltage stability and long cycle life when used in electrochemical cells as a separator or a membrane between the positive and negative electrodes. Also set forth herein are methods of making these electrolytes including, but not limited to, methods of annealing these electrolytes under controlled atmosphere conditions. Set forth herein, additionally, are methods of using these electrolytes in electrochemical cells and devices. The instant disclosure further includes electrochemical cells which incorporate the lithium-stuffed garnet electrolytes set forth herein.
Coating material, outer periphery-coated silicon carbide-based honeycomb structure, and method for coating outer periphery of silicon carbide-based honeycomb structure
A coating material for a silicon carbide-based honeycomb structure, the coating material including from 20 to 75% by mass of ceramic powder (A), the ceramic powder (A) including from 55 to 95% by mass of silicon carbide and from 5 to 30% by mass of silicon dioxide as chemical components.
INORGANIC FIBER MOLDED BODY, HEATING FURNACE, STRUCTURE, AND METHOD FOR MANUFACTURING INORGANIC FIBER MOLDED BODY
An inorganic fiber molded body includes an alumina fiber, an inorganic porous filler, and a colloidal silica, in which a ratio of crystalline minerals in the alumina fiber is 30% by mass or more and 80% by mass or less, the inorganic porous filler contains CaO.Math.6Al.sub.2O.sub.3 in which a particle diameter D95, which has a cumulative value of 95% in a volume frequency particle size distribution, is 300 μm or less, and in 100% by mass of the inorganic fiber molded body, a content of the alumina fiber is 15% by mass or more and 70% by mass or less, a content of the inorganic porous filler is 20% by mass or more and 79% by mass or less, and a content of the colloidal silica is 2% by mass or more and 8% by mass or less.
POWDER MATERIAL FOR FORMING THREE-DIMENSIONAL OBJECT, MATERIAL SET FOR FORMING THREE-DIMENSIONAL OBJECT, METHOD FOR PRODUCING THREE-DIMENSIONAL OBJECT, THREE-DIMENSIONAL OBJECT PRODUCING APPARATUS, AND THREE-DIMENSIONAL OBJECT
Provided is a powder material for forming a three-dimensional object, the powder material containing granulated particles containing: a resin; and inorganic particles of which primary particles have a volume average particle diameter of 1 micrometer or less, wherein the granulated particles have a volume average particle diameter of 10 micrometers or greater but 70 micrometers or less and a BET specific surface area of 6 m.sup.2/g or greater but 8 m.sup.2/g or less.
POWDER MATERIAL FOR FORMING THREE-DIMENSIONAL OBJECT, MATERIAL SET FOR FORMING THREE-DIMENSIONAL OBJECT, METHOD FOR PRODUCING THREE-DIMENSIONAL OBJECT, THREE-DIMENSIONAL OBJECT PRODUCING APPARATUS, AND THREE-DIMENSIONAL OBJECT
Provided is a powder material for forming a three-dimensional object, the powder material containing granulated particles containing: a resin; and inorganic particles of which primary particles have a volume average particle diameter of 1 micrometer or less, wherein the granulated particles have a volume average particle diameter of 10 micrometers or greater but 70 micrometers or less and a BET specific surface area of 6 m.sup.2/g or greater but 8 m.sup.2/g or less.
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.
Method for Treating and Disposing Wastewater Grit
Disclosed herein are methods for treating wastewater grit to inactivate any pathogens that are present in the grit and for forming a solidified material comprising wastewater grit such as a chemically bonded phosphate ceramic (CBPC). The CBPC may be utilized in methods for repairing depressions in a road surface that include applying the uncured CBPC to the depression in the road surface and allowing the CBPC to cure.
Ion beam sputtering with ion assisted deposition for coatings on chamber components
An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.