A resist composition comprising a base polymer and a quencher containing a sulfonium salt having an iodized benzene ring offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.

The present disclosure provides a preparation method for m-diamide compounds. The method includes the following steps: 2-fluoro-3-nitrobenzoyl chloride and 4-(perfluoropropane-2-yl)-2-(trifluoromethyl)aniline are subjected to a condensation reaction, followed by a reduction reaction and an alkylation reaction to give 2-fluoro-3-(alkylamino)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which reacts with an acyl chloride compound to give 2-fluoro-3-(alkylbenzamido)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which is finally brominated to obtain the m-diamide compound. The reactions are almost quantitative with few by-products. Cryogenic and high-temperature reactions are not used. The introduction of bromine atoms at specific sites can be achieved in the final step. The preparation method has high yield and is more suitable for industrial production.

The present disclosure provides a preparation method for m-diamide compounds. The method includes the following steps: 2-fluoro-3-nitrobenzoyl chloride and 4-(perfluoropropane-2-yl)-2-(trifluoromethyl)aniline are subjected to a condensation reaction, followed by a reduction reaction and an alkylation reaction to give 2-fluoro-3-(alkylamino)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which reacts with an acyl chloride compound to give 2-fluoro-3-(alkylbenzamido)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which is finally brominated to obtain the m-diamide compound. The reactions are almost quantitative with few by-products. Cryogenic and high-temperature reactions are not used. The introduction of bromine atoms at specific sites can be achieved in the final step. The preparation method has high yield and is more suitable for industrial production.

A resist composition comprising a quencher containing a sulfonium salt having the formula (A).

##STR00001##

A resist composition comprising a quencher containing a sulfonium salt having the formula (A).

##STR00001##

The present disclosure provides a preparation method for m-diamide compounds. The method includes the following steps: 2-fluoro-3-nitrobenzoyl chloride and 4-(perfluoropropane-2-yl)-2-(trifluoromethyl)aniline are subjected to a condensation reaction, followed by a reduction reaction and an alkylation reaction to give 2-fluoro-3-(alkylamino)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which reacts with an acyl chloride compound to give 2-fluoro-3-(alkylbenzamido)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which is finally brominated to obtain the m-diamide compound. The reactions are almost quantitative with few by-products. Cryogenic and high-temperature reactions are not used. The introduction of bromine atoms at specific sites can be achieved in the final step. The preparation method has high yield and is more suitable for industrial production.

The present disclosure provides a preparation method for m-diamide compounds. The method includes the following steps: 2-fluoro-3-nitrobenzoyl chloride and 4-(perfluoropropane-2-yl)-2-(trifluoromethyl)aniline are subjected to a condensation reaction, followed by a reduction reaction and an alkylation reaction to give 2-fluoro-3-(alkylamino)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which reacts with an acyl chloride compound to give 2-fluoro-3-(alkylbenzamido)-N-(4-(perfluoropropane-2-yl)-2-(trifluoromethyl)phenyl)benzamide, which is finally brominated to obtain the m-diamide compound. The reactions are almost quantitative with few by-products. Cryogenic and high-temperature reactions are not used. The introduction of bromine atoms at specific sites can be achieved in the final step. The preparation method has high yield and is more suitable for industrial production.

The invention discloses a method for preparation of 5-fluoro-2-methyl-3-nitrobenzoic acid and its methyl ester by conversion of 5-fluoro-2-methylbenzoic acid with fuming nitric acid and oleum and subsequent conversion with methanol.

The invention discloses a method for preparation of 5-fluoro-2-methyl-3-nitrobenzoic acid and its methyl ester by conversion of 5-fluoro-2-methylbenzoic acid with fuming nitric acid and oleum and subsequent conversion with methanol.

The invention discloses a method for preparation of 5-fluoro-2-methyl-3-nitrobenzoic acid and its methyl ester by conversion of 5-fluoro-2-methylbenzoic acid with fuming nitric acid and oleum and subsequent conversion with methanol.