A resist topcoat composition includes an acrylic polymer including a structural unit containing a hydroxy group and a fluorine; a mixture including a sulfonic acid compound containing at least one fluorine and a carboxylic acid compound containing at least one fluorine in a weight ratio of about 1:0.1 to about 1:50; and a solvent. A method of forming patterns uses the resist topcoat composition to form a topcoat over a patterned substrate.

A resist topcoat composition includes an acrylic polymer including a structural unit containing a hydroxy group and a fluorine; a mixture including a sulfonic acid compound containing at least one fluorine and a carboxylic acid compound containing at least one fluorine in a weight ratio of about 1:0.1 to about 1:50; and a solvent. A method of forming patterns uses the resist topcoat composition to form a topcoat over a patterned substrate.

The present disclosure is directed to provide a vinylsulfonic anhydride which is useful as a synthetic intermediate for synthesis of a fluorinated monomer. It is also directed to efficiently produce the vinylsulfonic anhydride. It is further directed to efficiently produce a fluorinated monomer using the vinylsulfonic anhydride. A vinylsulfonic anhydride of the present disclosure is expressed by the general formula (1). Further, a process for producing a vinylsulfonic anhydride of the present disclosure includes making a vinylsulfonic acid compound represented by the general formula (2) come in contact and be mixed with an anhydridization agent. Further, a process for producing a vinylsulfonyl fluoride of the present disclosure includes a step (b) of making a vinylsulfonic anhydride represented by the general formula (1) come in contact and be mixed with a fluorinating agent to prepare a reaction mixture including a vinylsulfonyl fluoride represented by the general formula (3) and a vinylsulfonic acid compound represented by the general formula (2).

The present disclosure is directed to provide a vinylsulfonic anhydride which is useful as a synthetic intermediate for synthesis of a fluorinated monomer. It is also directed to efficiently produce the vinylsulfonic anhydride. It is further directed to efficiently produce a fluorinated monomer using the vinylsulfonic anhydride. A vinylsulfonic anhydride of the present disclosure is expressed by the general formula (1). Further, a process for producing a vinylsulfonic anhydride of the present disclosure includes making a vinylsulfonic acid compound represented by the general formula (2) come in contact and be mixed with an anhydridization agent. Further, a process for producing a vinylsulfonyl fluoride of the present disclosure includes a step (b) of making a vinylsulfonic anhydride represented by the general formula (1) come in contact and be mixed with a fluorinating agent to prepare a reaction mixture including a vinylsulfonyl fluoride represented by the general formula (3) and a vinylsulfonic acid compound represented by the general formula (2).

To provide a method for producing a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a sulfonate group with low impurity content and in high yield.

A method for producing a fluorinated ether compound, comprising step 1 of sulfonylating a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a hydroxy group in the presence of a fluorinated solvent, a base and a sulfonylating agent to obtain a product containing a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a sulfonate group, and step 2 of contacting the product obtained in step 1 with an adsorbent having a pH of at most 8.0.

To provide a method for producing a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a sulfonate group with low impurity content and in high yield.

A method for producing a fluorinated ether compound, comprising step 1 of sulfonylating a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a hydroxy group in the presence of a fluorinated solvent, a base and a sulfonylating agent to obtain a product containing a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a sulfonate group, and step 2 of contacting the product obtained in step 1 with an adsorbent having a pH of at most 8.0.

The invention relates to a use of a fluorination gas, wherein the elemental fluorine (F.sub.2) is present in a high concentration, for example, in a concentration of elemental fluorine (F.sub.2), especially of equal to much higher than 15% or even 20% by volume (i.e., at least 15% or even 20% by volume), and to a process for the manufacture of a fluorinated benzene by direct fluorination employing a fluorination gas, wherein the elemental fluorine (F.sub.2) is present in a high concentration. The process of the invention is directed to the manufacture of a fluorinated benzene by direct fluorination. Especially the invention is of interest in the preparation of fluorinated benzene, final products and as well intermediates, for usage in agro-, pharma-, electronics-, catalyst, solvent and other functional chemical applications. The fluorination process of the invention may be performed batch-wise or in a continuous manner. If the process of the invention is performed batch-wise, a column (tower) reactor may be used. If the process of the invention is continuous a microreactor may be used. The invention is characterized in that the starting compound is benzene, and the fluorinated compound produced is a fluorinated benzene, preferably monofluorobenzene.

The invention relates to a use of a fluorination gas, wherein the elemental fluorine (F.sub.2) is present in a high concentration, for example, in a concentration of elemental fluorine (F.sub.2), especially of equal to much higher than 15% or even 20% by volume (i.e., at least 15% or even 20% by volume), and to a process for the manufacture of a fluorinated benzene by direct fluorination employing a fluorination gas, wherein the elemental fluorine (F.sub.2) is present in a high concentration. The process of the invention is directed to the manufacture of a fluorinated benzene by direct fluorination. Especially the invention is of interest in the preparation of fluorinated benzene, final products and as well intermediates, for usage in agro-, pharma-, electronics-, catalyst, solvent and other functional chemical applications. The fluorination process of the invention may be performed batch-wise or in a continuous manner. If the process of the invention is performed batch-wise, a column (tower) reactor may be used. If the process of the invention is continuous a microreactor may be used. The invention is characterized in that the starting compound is benzene, and the fluorinated compound produced is a fluorinated benzene, preferably monofluorobenzene.

A method for producing a fluorosulfonyl group-containing compound to obtain a compound represented by the following formula 5 from a compound represented by the following formula 1 as a starting material and a method for producing a fluorosulfonyl group-containing monomer in which the fluorosulfonyl group-containing compound is used: ##STR00001##
wherein R.sup.1 and R.sup.2 are a C.sub.1-3 alkylene group, and R.sup.F1 and R.sup.F2 are a C.sub.1-3 perfluoroalkylene group.

A method for producing a fluorosulfonyl group-containing compound to obtain a compound represented by the following formula 5 from a compound represented by the following formula 1 as a starting material and a method for producing a fluorosulfonyl group-containing monomer in which the fluorosulfonyl group-containing compound is used: ##STR00001##
wherein R.sup.1 and R.sup.2 are a C.sub.1-3 alkylene group, and R.sup.F1 and R.sup.F2 are a C.sub.1-3 perfluoroalkylene group.