C07C35/40

Reagent for enhancing generation of chemical species
09650357 · 2017-05-16 · ·

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

Reagent for enhancing generation of chemical species
09650357 · 2017-05-16 · ·

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

Reagent and composition of resist
09618844 · 2017-04-11 · ·

Described is a reagent that enhances acid generation of a photoacid generator and a composition containing such reagent.

Reagent and composition of resist
09618844 · 2017-04-11 · ·

Described is a reagent that enhances acid generation of a photoacid generator and a composition containing such reagent.