Patent classifications
C
C07
C07C
35/00
C07C35/22
C07C35/37
C07C35/40
C07C35/40
Reagent for enhancing generation of chemical species
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.
Reagent for enhancing generation of chemical species
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.
Reagent and composition of resist
Described is a reagent that enhances acid generation of a photoacid generator and a composition containing such reagent.
Reagent and composition of resist
Described is a reagent that enhances acid generation of a photoacid generator and a composition containing such reagent.