A substrate processing apparatus includes: a chamber; and a processing gas supply unit connected to the chamber via a processing gas supply flow path and configured to supply a processing gas. The processing gas supply unit includes a raw material cartridge that includes a raw material tank that accommodates a porous member containing a metal-organic framework adsorbed with gas molecules of a raw material of the processing gas; a main body configured to communicate the raw material tank and the processing gas supply flow path with each other when the raw material cartridge is attached; and a desorption mechanism configured to desorb the gas molecules of the raw material of the processing gas and allow the gas molecules to flow out as the processing gas to the processing gas supply flow path while the raw material cartridge is attached to the main body.

A substrate processing apparatus includes: a chamber; a raw material tank in which a raw material of a processing gas is accommodated; a carrier gas supply unit that supplies a carrier gas to the raw material tank; a mixed gas flow path connected to the raw material tank, and through which a mixed gas of the processing gas obtained from the raw material of the processing gas and the carrier gas flows therethrough; a concentration tank connected to a downstream of the mixed gas flow path, accommodating a porous member including a metal-organic framework; a desorption mechanism that desorbs the processing gas adsorbed to the porous member; and a concentration gas flow path that allows the processing gas desorbed from the porous member to flow to the chamber.

A functional member includes a porous member with a cavity and a trapping agent that traps a chemical substance. The trapping agent is held in the cavity of the porous member.

A functional member includes a porous member with a cavity and a trapping agent that traps a chemical substance. The trapping agent is held in the cavity of the porous member.

The present invention relates to a method for production of terephthalic acid using high polymerization degree polyethylene terephthalate, which includes: (i) introducing high polymerization degree polyethylene terephthalate having an intrinsic viscosity of 0.75 dl/g or more into a continuous reactor, and then heating and pressurizing the same to prepare a fluidal polyethylene terephthalate; (ii) introducing a mixed slurry prepared by mixing an alkaline material containing an alkali-metal, a weak acid salt of the alkali-metal and ethylene glycol together into an internal position of the continuous reactor, through which the fluidal polyethylene terephthalate passes, and implementing neat reaction of the fluidal polyethylene terephthalate with the mixed slurry in the continuous reactor to prepare alkali-metal terephthalate; and (iii) dissolving the prepared alkali-metal terephthalate in water, removing foreign substances through filtration and centrifugation, adding acid to the alkali-metal terephthalate dissolved in water and reacting the same, thereby producing terephthalic acid.

The present invention relates to a method for production of terephthalic acid using high polymerization degree polyethylene terephthalate, which includes: (i) introducing high polymerization degree polyethylene terephthalate having an intrinsic viscosity of 0.75 dl/g or more into a continuous reactor, and then heating and pressurizing the same to prepare a fluidal polyethylene terephthalate; (ii) introducing a mixed slurry prepared by mixing an alkaline material containing an alkali-metal, a weak acid salt of the alkali-metal and ethylene glycol together into an internal position of the continuous reactor, through which the fluidal polyethylene terephthalate passes, and implementing neat reaction of the fluidal polyethylene terephthalate with the mixed slurry in the continuous reactor to prepare alkali-metal terephthalate; and (iii) dissolving the prepared alkali-metal terephthalate in water, removing foreign substances through filtration and centrifugation, adding acid to the alkali-metal terephthalate dissolved in water and reacting the same, thereby producing terephthalic acid.

The invention relates to a process for preparing a semi-aromatic polyamide from diamine and dicarboxylic acid, comprising steps of •(i) dosing a liquid diamine to an agitated powder comprising an aromatic dicarboxylic acid thereby forming a powder comprising a diamine/dicarboxylic acid salt (DD-salt), and •(ii) solid-state polymerizing the DD-salt to obtain the polyamide.

The invention relates to a process for preparing a semi-aromatic polyamide from diamine and dicarboxylic acid, comprising steps of •(i) dosing a liquid diamine to an agitated powder comprising an aromatic dicarboxylic acid thereby forming a powder comprising a diamine/dicarboxylic acid salt (DD-salt), and •(ii) solid-state polymerizing the DD-salt to obtain the polyamide.

Provided in the present invention is a preparation method for a nano organometallic carboxylate which effectively solves the problems of a complex washing process, and cumbersome, dangerous and uneconomical preparation of lye in traditional methods for producing organometallic carboxylates. A new method for preparing high-quality organometallic carboxylates by using a carboxylic acid, caustic soda, a metal oxide or a hydroxide as starting materials, and using ball milling to assist reaction thereof. The present invention not only efficiently utilizes lye, it also obtains high-quality organometallic carboxylates, which overcomes the technical prejudice that the prior art uses calcium chloride, sodium chloride and other salts for poor reaction efficiency. The problem in environmental pollution caused by the washing waste liquid in the existing process is fundamentally solved. At the same time, addition of non-ionic surfactants makes ball milling more efficient and significantly reduces the particle size of the product.

Provided in the present invention is a preparation method for a nano organometallic carboxylate which effectively solves the problems of a complex washing process, and cumbersome, dangerous and uneconomical preparation of lye in traditional methods for producing organometallic carboxylates. A new method for preparing high-quality organometallic carboxylates by using a carboxylic acid, caustic soda, a metal oxide or a hydroxide as starting materials, and using ball milling to assist reaction thereof. The present invention not only efficiently utilizes lye, it also obtains high-quality organometallic carboxylates, which overcomes the technical prejudice that the prior art uses calcium chloride, sodium chloride and other salts for poor reaction efficiency. The problem in environmental pollution caused by the washing waste liquid in the existing process is fundamentally solved. At the same time, addition of non-ionic surfactants makes ball milling more efficient and significantly reduces the particle size of the product.