A substrate processing apparatus includes: a chamber; and a processing gas supply unit connected to the chamber via a processing gas supply flow path and configured to supply a processing gas. The processing gas supply unit includes a raw material cartridge that includes a raw material tank that accommodates a porous member containing a metal-organic framework adsorbed with gas molecules of a raw material of the processing gas; a main body configured to communicate the raw material tank and the processing gas supply flow path with each other when the raw material cartridge is attached; and a desorption mechanism configured to desorb the gas molecules of the raw material of the processing gas and allow the gas molecules to flow out as the processing gas to the processing gas supply flow path while the raw material cartridge is attached to the main body.

A substrate processing apparatus includes: a chamber; a raw material tank in which a raw material of a processing gas is accommodated; a carrier gas supply unit that supplies a carrier gas to the raw material tank; a mixed gas flow path connected to the raw material tank, and through which a mixed gas of the processing gas obtained from the raw material of the processing gas and the carrier gas flows therethrough; a concentration tank connected to a downstream of the mixed gas flow path, accommodating a porous member including a metal-organic framework; a desorption mechanism that desorbs the processing gas adsorbed to the porous member; and a concentration gas flow path that allows the processing gas desorbed from the porous member to flow to the chamber.

The titanium (IV) and iron (III) MOF solid MUV-17 (TiFe.sub.2), has general formula (1): [Ti.sup.IVFe.sup.III.sub.2(O)(L).sub.2(X).sub.3]S, where X is each equal or different selected from: O.sup.2−, OH.sup.−, H.sub.2O, F.sup.−, Cl.sup.−, Br.sup.−, I.sup.−, NO.sub.3.sup.−, ClO.sub.4.sup.−, BF.sub.4.sup.−, SCN.sup.−, OH.sup.−, CH.sub.3COO.sup.−, C.sub.5H.sub.7O.sub.2.sup.−, SO.sub.4.sup.2− and CO.sub.3.sup.2−, L is a tricarboxylic ligand and S is at least one molecule of a polar solvent selected from the group consisting of N,N′-dimethylformamide,N,N′-diethylformamide,N,N′-dimethylacetamide, N-methyl-2-pyrrolidone, methanol, ethanol, isopropanol, n-propanol, water and mixtures thereof. The titanium (IV) and iron (III) MOF solid has long-term catalytic activity for the degradation of toxic compounds. The method for obtaining them comprises dissolving the components under anaerobic conditions. The invention also relates to the use of the titanium (IV) and iron (III) MOF solid as an additive with detoxifying properties of toxic compounds.

The titanium (IV) and iron (III) MOF solid MUV-17 (TiFe.sub.2), has general formula (1): [Ti.sup.IVFe.sup.III.sub.2(O)(L).sub.2(X).sub.3]S, where X is each equal or different selected from: O.sup.2−, OH.sup.−, H.sub.2O, F.sup.−, Cl.sup.−, Br.sup.−, I.sup.−, NO.sub.3.sup.−, ClO.sub.4.sup.−, BF.sub.4.sup.−, SCN.sup.−, OH.sup.−, CH.sub.3COO.sup.−, C.sub.5H.sub.7O.sub.2.sup.−, SO.sub.4.sup.2− and CO.sub.3.sup.2−, L is a tricarboxylic ligand and S is at least one molecule of a polar solvent selected from the group consisting of N,N′-dimethylformamide,N,N′-diethylformamide,N,N′-dimethylacetamide, N-methyl-2-pyrrolidone, methanol, ethanol, isopropanol, n-propanol, water and mixtures thereof. The titanium (IV) and iron (III) MOF solid has long-term catalytic activity for the degradation of toxic compounds. The method for obtaining them comprises dissolving the components under anaerobic conditions. The invention also relates to the use of the titanium (IV) and iron (III) MOF solid as an additive with detoxifying properties of toxic compounds.

The disclosure is directed to cocrystals of fasoracetam, including R-fasoracetam, and various coformers. Crystalline materials comprising fasoracetam, including R-fasoracetam, are also provided. The disclosure further includes pharmaceutical compositions and methods of treatment of the cocrystals and crystalline materials of the disclosure.

Metal Organic Framework (MOF) materials and methods of making MOF materials. The methods include grinding of mixtures of metal hydroxide(s) and ligand(s). The MOF materials may have at least two different ligands. The MOF materials may have open metal sites. The MOF materials can be used in gas storage applications.

Metal Organic Framework (MOF) materials and methods of making MOF materials. The methods include grinding of mixtures of metal hydroxide(s) and ligand(s). The MOF materials may have at least two different ligands. The MOF materials may have open metal sites. The MOF materials can be used in gas storage applications.

A method of water uptake is provided. The method includes contacting a hydrogen-bonded organic framework (HOF) with water to form a mixture where the HOF comprises hydrogen bonded units of trimesic acid and guanazole. The HOF has a sheet structure, where the sheets form an intercrossed macroporous network with pores on a surface. The HOF absorbs at least a portion of the water in the mixture.

A method of water uptake is provided. The method includes contacting a hydrogen-bonded organic framework (HOF) with water to form a mixture where the HOF comprises hydrogen bonded units of trimesic acid and guanazole. The HOF has a sheet structure, where the sheets form an intercrossed macroporous network with pores on a surface. The HOF absorbs at least a portion of the water in the mixture.

The disclosure is directed to cocrystals of fasoracetam, including R-fasoracetam, and various coformers. Crystalline materials comprising fasoracetam, including R-fasoracetam, are also provided. The disclosure further includes pharmaceutical compositions and methods of treatment of the cocrystals and crystalline materials of the disclosure.