To achieve properties such as a desirable compression fracture property, desirable compression set, and the like in the elastomer composition and the seal material using same. The elastomer composition of the present disclosure therefore includes an elastomer, phenol resin in powder form, and silica in powder form. The seal material of the present disclosure is obtained by crosslinking and molding the elastomer composition of the present disclosure. The seal material may be used in a semiconductor manufacturing device.

A material for gaskets is disclosed, wherein a metal surface coating layer, a primer layer and a rubber layer are formed, or a metal surface coating layer and a rubber layer are formed on at least a part of one side or both sides of a substrate formed of a metal plate sequentially from the metal plate side, and the metal surface coating layer comprises (A) one or more carbonates selected from the group consisting of Mg carbonate, Co carbonate, Zr carbonate, Mn carbonate, Ni carbonate, and Cu carbonate and (B) one or more selected from the group consisting of silica, alumina, zirconia, and titania.

A material for gaskets is disclosed, wherein a metal surface coating layer, a primer layer and a rubber layer are formed, or a metal surface coating layer and a rubber layer are formed on at least a part of one side or both sides of a substrate formed of a metal plate sequentially from the metal plate side, and the metal surface coating layer comprises (A) one or more carbonates selected from the group consisting of Mg carbonate, Co carbonate, Zr carbonate, Mn carbonate, Ni carbonate, and Cu carbonate and (B) one or more selected from the group consisting of silica, alumina, zirconia, and titania.