Patent classifications
C23C18/1621
PROTECTION OF SEED LAYERS DURING ELECTRODEPOSITION OF METALS IN SEMICONDUCTOR DEVICE MANUFACTURING
A protective layer is formed over a copper seed layer on a semiconductor substrate prior to electroplating. The protective layer is capable of protecting the copper seed layer from oxidation and from dissolution in an electrolyte during initial phases of electroplating. The protective layer, in some embodiments, prevents the copper seed layer from contacting atmosphere, and from being oxidized by atmospheric oxygen and/or moisture. The protective layer contains a metal that is less noble than copper (e.g., cobalt), where the metal can be in an oxidized form that is readily soluble in a plating liquid. In one embodiment a protective cobalt layer is formed by depositing cobalt metal by chemical vapor deposition over copper seed layer without exposing the copper seed layer to atmosphere, followed by subsequent oxidation of cobalt to cobalt oxide that occurs after the substrate is exposed to atmosphere. The resulting protective layer is dissolved during electroplating.
TOOL FOR PLATING RESIN MOLDED BODY AND METHOD FOR PLATING RESIN MOLDED BODY USING THE SAME
An object of the present invention is to provide a plating tool which avoids plating deposition on the tool itself in plating of a resin molded body, and therefore, also eliminates the need to exchange the plating tool. The object is achieved by a tool for plating a resin molded body, wherein a surface of a plating tool having an insulation coating part is coated with a plasticizer, and a method for plating a resin molded body using the tool.
Bearing arrangement comprising a corrosion protection device
The invention relates to a corrosion protection device for a bearing arrangement used or usable in machine and/or plant parts and a method for using such (a) corrosion protection device(s), wherein the bearing arrangement consists of at least one metallic material, e.g. 25CrMo4, 42CrMo4, 43CrMo4, 34CrNiMo6, C45, C45N, X20Cr13, GG-20, GGG-40, GS15, St 37 or the like and is used for the mutual relative movement of at least two bearing rings, wherein the bearing arrangement comprises a plurality of rolling elements and a plurality of through-bores and/or a plurality of blind bores, as well as a first screw-mounting surface for affixing a first mating structure and a second screw-mounting surface for affixing an opposite mating structure, characterized in that the corrosion protection device is integrated into at least one of the through-bores and/or blind bores or is or can be introduced in or at such bores.