Showerheads for semiconductor processing equipment are disclosed that include various features designed to reduce nonuniformity and adjust deposited film profiles.

The present invention relates to a method of manufacturing a coated structural component (10) for a vehicle, comprising the steps of: providing a base component (11), hot forming the base component (11) into a molded component (12), electrochemically deburring the molded component (12), and electrolytically applying a corrosion protection layer (13) to the deburred molded component (12) to produce the structural component (10). The invention further relates to an apparatus for carrying out a method according to the invention for producing a deburred and coated structural component.

The present invention relates to a method of manufacturing a coated structural component (10) for a vehicle, comprising the steps of: providing a base component (11), hot forming the base component (11) into a molded component (12), electrochemically deburring the molded component (12), and electrolytically applying a corrosion protection layer (13) to the deburred molded component (12) to produce the structural component (10). The invention further relates to an apparatus for carrying out a method according to the invention for producing a deburred and coated structural component.

A method of and system for surface finishing an additive manufactured part. A part having a surface roughness with macroasperities is placed in a chamber with an electrolyte and an electrode. A pulse/pulse reverse power supply is connected to the part rendering it anodic and connected to the electrode rendering it cathodic. The power supply is operated to decrease the surface roughness of the part by applying a first series of waveforms including at least two waveforms where a diffusion layer is maintained at a thickness to produce a macroprofile regime relative to the macroasperities, the first series of waveforms having anodic voltages applied for anodic time periods before cathodic voltages applied for cathodic time periods to effect part surface smoothing to a first surface roughness with minimal material removal and applying a final waveform where the diffusion layer represents a microprofile regime, the final waveform having a final anodic voltage applied for a final anodic time period before a final cathodic voltage applied for a final cathodic time period to effect part surface smoothing to a final surface roughness with minimal material removal.

A method of and system for surface finishing an additive manufactured part. A part having a surface roughness with macroasperities is placed in a chamber with an electrolyte and an electrode. A pulse/pulse reverse power supply is connected to the part rendering it anodic and connected to the electrode rendering it cathodic. The power supply is operated to decrease the surface roughness of the part by applying a first series of waveforms including at least two waveforms where a diffusion layer is maintained at a thickness to produce a macroprofile regime relative to the macroasperities, the first series of waveforms having anodic voltages applied for anodic time periods before cathodic voltages applied for cathodic time periods to effect part surface smoothing to a first surface roughness with minimal material removal and applying a final waveform where the diffusion layer represents a microprofile regime, the final waveform having a final anodic voltage applied for a final anodic time period before a final cathodic voltage applied for a final cathodic time period to effect part surface smoothing to a final surface roughness with minimal material removal.

A polishing method for an inner wall of a hollow metal part, including: firstly, placing a coaxial cathode in an inner hole of a metal part when a metal part model is designed, and printing the metal part model and the coaxial cathode together; then, sealing two ends of an inner hole cavity of the metal part by using a light curing part, fixing the coaxial cathode, filling the cavity with a polishing solution, and performing polishing treatment by using an electrochemical polishing method; and finally, reversing an electrode to break the coaxial cathode and take out the broken coaxial cathode to obtain a polished metal part. The polishing of a complex-shaped inner hole of a 3D-printed metal part is realized, the defect that an inner hole of a 3D-printed metal part with a complex-shaped hollow part cannot be polished by using a traditional machining method is overcome, the problem that an inner wall of a metal part polished by using an electrochemical method is non-uniform is solved, the surface quality of the inner hole of the 3D-printed metal part with the complex-shaped hollow part is improved, and the application prospect and postprocessing technology of the 3D-printed metal part are expanded.

A polishing method for an inner wall of a hollow metal part, including: firstly, placing a coaxial cathode in an inner hole of a metal part when a metal part model is designed, and printing the metal part model and the coaxial cathode together; then, sealing two ends of an inner hole cavity of the metal part by using a light curing part, fixing the coaxial cathode, filling the cavity with a polishing solution, and performing polishing treatment by using an electrochemical polishing method; and finally, reversing an electrode to break the coaxial cathode and take out the broken coaxial cathode to obtain a polished metal part. The polishing of a complex-shaped inner hole of a 3D-printed metal part is realized, the defect that an inner hole of a 3D-printed metal part with a complex-shaped hollow part cannot be polished by using a traditional machining method is overcome, the problem that an inner wall of a metal part polished by using an electrochemical method is non-uniform is solved, the surface quality of the inner hole of the 3D-printed metal part with the complex-shaped hollow part is improved, and the application prospect and postprocessing technology of the 3D-printed metal part are expanded.

A polishing method for an inner wall of a hollow metal part, including: firstly, placing a coaxial cathode in an inner hole of a metal part when a metal part model is designed, and printing the metal part model and the coaxial cathode together; then, sealing two ends of an inner hole cavity of the metal part by using a light curing part, fixing the coaxial cathode, filling the cavity with a polishing solution, and performing polishing treatment by using an electrochemical polishing method; and finally, reversing an electrode to break the coaxial cathode and take out the broken coaxial cathode to obtain a polished metal part. The polishing of a complex-shaped inner hole of a 3D-printed metal part is realized, the defect that an inner hole of a 3D-printed metal part with a complex-shaped hollow part cannot be polished by using a traditional machining method is overcome, the problem that an inner wall of a metal part polished by using an electrochemical method is non-uniform is solved, the surface quality of the inner hole of the 3D-printed metal part with the complex-shaped hollow part is improved, and the application prospect and postprocessing technology of the 3D-printed metal part are expanded.

The invention relates to an electrolyte for electropolishing metal surfaces, said electrolyte comprising methanesulphonic acid and additionally at least one phosphonic acid, as well as to an electropolishing method for same.

The invention relates to an electrolyte for electropolishing metal surfaces, said electrolyte comprising methanesulphonic acid and additionally at least one phosphonic acid, as well as to an electropolishing method for same.