A radial piston hydraulic motor comprising a hollow rotating shaft inside the motor, which rotating shaft is arranged to rotate around its axial central axis A for providing torque from the radial piston hydraulic motor, wherein the rotating shaft comprises a piston frame with pistons, which are arranged to move radially, the piston frame comprises a distribution surface, which is a flat surface in parallel plane with the radial movement of the pistons, and a first inner surface extending in axial direction around the axial central axis A, wherein the rotating shaft comprises a half shaft having a second inner surface extending in axial direction around the axial central axis A, wherein piston frame and the half shaft are arranged adjacent to each other so that the first inner surface and the second inner surface form a surface, in axial direction, forming a cavity inside the rotating shaft for receiving a drive shaft.

The hydraulic piston (1) constitutes a hydraulic chamber (5) with a cylinder (4) and has a cylindrical body (6) connectedfrom the side of the chamber (5)by a link-stop valve (3) to a cooling and lubricating gasket valve (2) which is passed right through by a flow calibration opening (27), the valve (2) being able to move in longitudinal translation over a short stroke with respect to the body (6) or to be held at a distance from the body (6) by the valve link-stop (3), a valve return spring (30) tending to move the valve (2) away from the cylindrical body (6).

Hydrostatic radial piston unit comprising a front case part accommodating a drive shaft via shaft bearing means so that the drive shaft can rotate around a central axis relative to the front case part. A rear case part is attached on one side to the front case part and closed on another side in order to define an internal volume. A cylinder block is disposed in the internal volume and attached to the drive shaft in a torque proof manner. Axially disposed timing holes in the cylinder block connect radially oriented working volumes in the cylinder block with a cylinder block front face that is arranged perpendicularly to the central axis and faces away from the front case part. Integrally within the rear case part internal annular flow passages are formed and are connected to an inlet and an outlet of the radial piston unit and running basically in circumferential direction around the central axis. Internal distribution conducts configured to hydraulically connect the internal annular flow passages with the cylinder block timing holes are integrally formed within the rear case part, too.

A hydrostatic radial piston unit of the cam-lobe type of construction including a shaft defining a rotational axis of the hydrostatic radial piston unit. The shaft extends with a front end region from a non-rotary, stationary rear casing to a front casing. Within the front casing a cylinder block is housed and fixed in a torque-proof connection to the front end region of the shaft. In the cylinder block radially reciprocating working pistons are disposed in radially oriented cylinder bores to and from which cylinder bores hydraulic fluid can be conducted by means of a distributor. The distributor is arranged rotationally fixed with respect to the front casing and rotationally free relative to the shaft. A circumferential cam-lobe surface with which the working pistons can interact, is formed integrally with the front casing on its radial inner side.

The hydraulic piston (1) constitutes a hydraulic chamber (5) with a cylinder (4) and has a cylindrical body (6) connectedfrom the side of the chamber (5)by a link-stop valve (3) to a cooling and lubricating gasket valve (2) which is passed right through by a flow calibration opening (27), the valve (2) being able to move in longitudinal translation over a short stroke with respect to the body (6) or to be held at a distance from the body (6) by the valve link-stop (3), a valve return spring (30) tending to move the valve (2) away from the cylindrical body (6).

A motor (10) to be driven by a pressurized fluid includes a manifold (16) with an arcuate surface (20) defining a valve opening (22) surrounded by a sealing surface. A cylinder (26) has an aperture (30) cooperating with the arcuate surface (20). The cylinder (26) is pivotally mounted so as to be pivotable between a neutral state in which the aperture faces the sealing surface, an inlet state in which the aperture (30) is in fluid connection with the valve opening (22), and an exhaust in which the aperture (30) is in fluid connection with a drainage volume. A piston (34), deployed in the cylinder (26), is driven to extend by pressure within the cylinder. The piston is linked to a crank (36) so that rotation of a crankshaft (38) causes a cyclic motion of the piston (34) and cylinder (26) from the inlet state for an extension power stroke of the piston (34), through the neutral state and to the exhaust state for a return motion of the piston (34). The pivot axis of the cylinder, preferably implemented using a pivot axle (32), is located between the crankshaft axis and the arcuate surface (20).

A method for forming a pellicle for an extreme ultraviolet lithography is provided. The method includes forming a pellicle membrane over a filter membrane and transferring the pellicle membrane from the filter membrane to a membrane border. Forming the pellicle membrane includes growing carbon nanotubes (CNTs) from in-situ formed metal catalyst particles in a first reaction zone of a reactor, each of the CNTs including a metal catalyst particle at a growing tip thereof, promoting formation of bundles of nanotubes from the individual CNTs in a second zone of the reactor downstream of the first reaction zone. The bundled CNTs are then collected on the filter membrane.

A hydrostatic radial piston unit of the cam-lobe type of construction including a shaft defining a rotational axis of the hydrostatic radial piston unit. The shaft extends with a front end region from a non-rotary, stationary rear casing to a front casing. Within the front casing a cylinder block is housed and fixed in a torque-proof connection to the front end region of the shaft. In the cylinder block radially reciprocating working pistons are disposed in radially oriented cylinder bores to and from which cylinder bores hydraulic fluid can be conducted by means of a distributor. The distributor is arranged rotationally fixed with respect to the front casing and rotationally free relative to the shaft. A circumferential cam-lobe surface with which the working pistons can interact, is formed integrally with the front casing on its radial inner side.