A radial piston hydraulic motor comprising a hollow rotating shaft inside the motor, which rotating shaft is arranged to rotate around its axial central axis A for providing torque from the radial piston hydraulic motor, wherein the rotating shaft comprises a piston frame with pistons, which are arranged to move radially, the piston frame comprises a distribution surface, which is a flat surface in parallel plane with the radial movement of the pistons, and a first inner surface extending in axial direction around the axial central axis A, wherein the rotating shaft comprises a half shaft having a second inner surface extending in axial direction around the axial central axis A, wherein piston frame and the half shaft are arranged adjacent to each other so that the first inner surface and the second inner surface form a surface, in axial direction, forming a cavity inside the rotating shaft for receiving a drive shaft.

A hydrostatic radial piston machine includes a radial cylinder block with cylinder bores which extend from an outer circumferential surface of the radial cylinder block into an interior of the radial cylinder block; a number of pistons which corresponds to the number of cylinder bores; a cam ring, and ends of the pistons which face away from the radial cylinder piston block are supported movably on an inner circumferential surface of the radial cylinder block during a rotation of the radial cylinder block; two control plate elements which extend respectively with a face oriented towards the radial cylinder block towards a central plane of the radial cylinder block, which central plane is perpendicular to the rotation axis. Each control plate element includes a bearing portion in which radially acting forces are transferable to a respective mating surface in the housing or housing cover mounted in the housing.

A valve assembly for regulating the flow of working fluid between a working chamber of a fluid working machine and a working fluid gallery comprises: a valve comprising a valve member and one or more cooperating valve seats; an actuator actuatable to apply a force to urge the valve member away from or towards the one or more valve seats; and a coupling between the actuator and the valve member. The coupling comprises a connector located at least partially within a tube. A connector void provided between at least a portion of the connector and the tube is in fluid communication with a working fluid gallery outlet.

A valve assembly for regulating the flow of working fluid between a working chamber of a fluid working machine and a working fluid gallery comprises: a valve comprising a valve member and one or more cooperating valve seats; an actuator actuatable to apply a force to urge the valve member away from or towards the one or more valve seats; and a coupling between the actuator and the valve member. The coupling comprises a connector located at least partially within a tube. A connector void provided between at least a portion of the connector and the tube is in fluid communication with a working fluid gallery outlet.

Hydrostatic radial piston unit comprising a front case part accommodating a drive shaft via shaft bearing means so that the drive shaft can rotate around a central axis relative to the front case part. A rear case part is attached on one side to the front case part and closed on another side in order to define an internal volume. A cylinder block is disposed in the internal volume and attached to the drive shaft in a torque proof manner. Axially disposed timing holes in the cylinder block connect radially oriented working volumes in the cylinder block with a cylinder block front face that is arranged perpendicularly to the central axis and faces away from the front case part. Integrally within the rear case part internal annular flow passages are formed and are connected to an inlet and an outlet of the radial piston unit and running basically in circumferential direction around the central axis. Internal distribution conducts configured to hydraulically connect the internal annular flow passages with the cylinder block timing holes are integrally formed within the rear case part, too.

A hydrostatic radial piston unit of the cam-lobe type of construction including a shaft defining a rotational axis of the hydrostatic radial piston unit. The shaft extends with a front end region from a non-rotary, stationary rear casing to a front casing. Within the front casing a cylinder block is housed and fixed in a torque-proof connection to the front end region of the shaft. In the cylinder block radially reciprocating working pistons are disposed in radially oriented cylinder bores to and from which cylinder bores hydraulic fluid can be conducted by means of a distributor. The distributor is arranged rotationally fixed with respect to the front casing and rotationally free relative to the shaft. A circumferential cam-lobe surface with which the working pistons can interact, is formed integrally with the front casing on its radial inner side.

A motor (10) to be driven by a pressurized fluid includes a manifold (16) with an arcuate surface (20) defining a valve opening (22) surrounded by a sealing surface. A cylinder (26) has an aperture (30) cooperating with the arcuate surface (20). The cylinder (26) is pivotally mounted so as to be pivotable between a neutral state in which the aperture faces the sealing surface, an inlet state in which the aperture (30) is in fluid connection with the valve opening (22), and an exhaust in which the aperture (30) is in fluid connection with a drainage volume. A piston (34), deployed in the cylinder (26), is driven to extend by pressure within the cylinder. The piston is linked to a crank (36) so that rotation of a crankshaft (38) causes a cyclic motion of the piston (34) and cylinder (26) from the inlet state for an extension power stroke of the piston (34), through the neutral state and to the exhaust state for a return motion of the piston (34). The pivot axis of the cylinder, preferably implemented using a pivot axle (32), is located between the crankshaft axis and the arcuate surface (20).

A hydraulic machine includes radial cylinders including, oscillating radial cylinders arranged in a crown or star of cylinder-piston units, the pistons of the groups are made slidable on a crankshaft or with a cam, or on interposed members concentric to it, and realizing the reciprocating motion in the oscillating cylinders. The oscillating cylinders are placed in contact with a surface of distribution concentric or corresponding to the surface of oscillation of the respective cylinder on which a distributor body is placed separate from the machine body and housed in a seat in the body, or part fixed to the body, of the hydraulic machine, and each distributor body is mobile in its seat under the action of the pressure of liquid in connection on the back surface of the distributor body against the surface of distribution of the oscillating radial cylinder subject to the distribution.

A method for forming a pellicle for an extreme ultraviolet lithography is provided. The method includes forming a pellicle membrane over a filter membrane and transferring the pellicle membrane from the filter membrane to a membrane border. Forming the pellicle membrane includes growing carbon nanotubes (CNTs) from in-situ formed metal catalyst particles in a first reaction zone of a reactor, each of the CNTs including a metal catalyst particle at a growing tip thereof, promoting formation of bundles of nanotubes from the individual CNTs in a second zone of the reactor downstream of the first reaction zone. The bundled CNTs are then collected on the filter membrane.

Provided is a design method for a self-compensation structure of a cam-lobe hydraulic motor plate distribution system, which comprises that follow steps: firstly, establishing a force balance equation, a pressure distribution equation and a flow balance equation for each balance chamber, setting a boundary condition, and setting an expected nominal clearance; selecting a fit clearance for simultaneous solutions, and obtaining a set of solutions of areas; taking a maximum value in this set of solutions as the median, and setting a set of area values in the optimization design; further solving changing curves of the nominal clearance and the total leakage of the distribution system with the rotation angle of the cylinder block, and calculating the average value of various curves after the operation is smooth, and designing the self-compensation structure based on selection of the optimal combination of the fit clearance and area.