Provided is a tube pump system which includes: a pair of roller units which are rotated around an axis line from a closing position to a releasing position; a pair of drive units which are configured to respectively rotate the pair of roller units; a control unit which is configured to control each of the pair of drive units; and a pressure sensor which is configured to detect a pressure of a liquid in a pipe connected to the other end of the tube, wherein the control unit controls a first rotation angle when the first roller unit passes through the closing position and a second rotation angle when the second roller unit passes through the releasing position such that fluctuation of the pressure of the liquid when the pair of roller units are rotated through at least one revolution falls within a predetermined value.

A machine monitoring system automatically determines an optimal trigger angle for monitoring the rod drop of a reciprocating compressor, and sets the trigger angle configuration value accordingly. A key pulse is monitored using a key phase sensor, the amplitude of the rod drop transducer voltage versus time (or rotation angle) is analyzed, and a position of the minimal change in slope of the rod drop transducer voltage signal relative to the key mark is determined. The optimal trigger angle is determined based on this temporal position, the current speed and the configured piston angle. The optimal trigger angle is provided to the machine monitoring system for configuration. The system thereby relieves the service engineer from having to test several trigger angles with manually-operated test instruments to determine the optimal trigger angle.

A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

A tube pump system is provided, which includes a pair of roller units which are rotated around the axis line from a contact position to a separate position in a state where the pair of roller units compress the tube, a pair of drive units which rotate the pair of roller units respectively, and a control unit which controls each of the pair of drive units, wherein the control unit controls each of the pair of drive units such that, when one of the pair of roller units passes the separate position, an angular velocity of the other of the pair of roller units toward the separate position is gradually decreased.

Provided is a tube pump system which includes: a pair of roller units which are rotated around an axis line from a closing position to a releasing position; a pair of drive units which are configured to respectively rotate the pair of roller units; a control unit which is configured to control each of the pair of drive units; and a pressure sensor which is configured to detect a pressure of a liquid in a pipe connected to the other end of the tube, wherein the control unit controls a first rotation angle when the first roller unit passes through the closing position and a second rotation angle when the second roller unit passes through the releasing position such that fluctuation of the pressure of the liquid when the pair of roller units are rotated through at least one revolution falls within a predetermined value.

A tube pump system is provided, which includes a pair of roller units which are rotated around the axis line from a contact position to a separate position in a state where the pair of roller units compress the tube, a pair of drive units which rotate the pair of roller units respectively, and a control unit which controls each of the pair of drive units, wherein the control unit controls each of the pair of drive units such that, when one of the pair of roller units passes the separate position, an angular velocity of the other of the pair of roller units toward the separate position is gradually decreased.

A machine monitoring system automatically determines an optimal trigger angle for monitoring the rod drop of a reciprocating compressor, and sets the trigger angle configuration value accordingly. A key pulse is monitored using a key phase sensor, the amplitude of the rod drop transducer voltage versus time (or rotation angle) is analyzed, and a position of the minimal change in slope of the rod drop transducer voltage signal relative to the key mark is determined. The optimal trigger angle is determined based on this temporal position, the current speed and the configured piston angle. The optimal trigger angle is provided to the machine monitoring system for configuration. The system thereby relieves the service engineer from having to test several trigger angles with manually-operated test instruments to determine the optimal trigger angle.