A system for ion pumping including an anode, a cathode, and a magnet. The magnet comprises a Halbach magnet array.

Provided is a vacuum component capable of evacuation by a getting effect, which has a large maximum number of captured molecules and a long working life. It is provided, in an area around its central axis, with a hollow cylindrical electrode 20 having an electrode surface 20A that is sufficiently smaller than an inner surface 10A of the vacuum container 10, along the central axis. In the vacuum container 10, it is possible to realize any one of states among a first state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a positive potential, a second state of setting the electrode surface 20A at a ground potential without introducing Ar, and a third state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a negative potential. Evacuation by the vacuum component 1 is performed in the second state. Further, evacuation by the vacuum component 1 is performed also by realizing a state of performing a heating process at 400° C. or below without using the electrode.

Provided is a vacuum component capable of evacuation by a getting effect, which has a large maximum number of captured molecules and a long working life. It is provided, in an area around its central axis, with a hollow cylindrical electrode 20 having an electrode surface 20A that is sufficiently smaller than an inner surface 10A of the vacuum container 10, along the central axis. In the vacuum container 10, it is possible to realize any one of states among a first state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a positive potential, a second state of setting the electrode surface 20A at a ground potential without introducing Ar, and a third state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a negative potential. Evacuation by the vacuum component 1 is performed in the second state. Further, evacuation by the vacuum component 1 is performed also by realizing a state of performing a heating process at 400° C. or below without using the electrode.

Provided is a vacuum component capable of evacuation by a getting effect, which has a large maximum number of captured molecules and a long working life. It is provided, in an area around its central axis, with a hollow cylindrical electrode 20 having an electrode surface 20A that is sufficiently smaller than an inner surface 10A of the vacuum container 10, along the central axis. In the vacuum container 10, it is possible to realize any one of states among a first state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a positive potential, a second state of setting the electrode surface 20A at a ground potential without introducing Ar, and a third state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a negative potential. Evacuation by the vacuum component 1 is performed in the second state. Further, evacuation by the vacuum component 1 is performed also by realizing a state of performing a heating process at 400° C. or below without using the electrode.

The invention relates to a hydrogen compressor with metal hydride comprising: a pressure chamber, comprising an inner space, defined by a first inner surface; a shell with a thickness E, the shell comprising a first outer surface facing the first inner surface, the shell comprising an insulating material with first thermal conductivity; and a hydrogen storage element, contained in the shell, comprising a storage material suitable for storing or releasing hydrogen as a function of a temperature that is imposed on same, and having a second thermal conductivity higher than the first thermal conductivity.

The invention relates to a hydrogen compressor with metal hydride comprising: a pressure chamber, comprising an inner space, defined by a first inner surface; a shell with a thickness E, the shell comprising a first outer surface facing the first inner surface, the shell comprising an insulating material with first thermal conductivity; and a hydrogen storage element, contained in the shell, comprising a storage material suitable for storing or releasing hydrogen as a function of a temperature that is imposed on same, and having a second thermal conductivity higher than the first thermal conductivity.

A turbomolecular pump, vacuum pumping system and method of evacuating a vacuum chamber is disclosed. The turbomolecular pump comprises: a rotor comprising a plurality of rotor blade rows, a stator comprising a plurality of stator blade rows and an outer casing, the rotor being rotatably mounted within the stator; wherein at least a portion of a surface of at least one of the rotor and the stator comprise a non-evaporable getter material.

A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.

A vacuum cell is described. The vacuum cell includes an inner chamber, a buffer channel, and a buffer ion pump. The buffer channel is fluidically isolated from the inner chamber and fluidically isolated from an ambient external to the vacuum cell. The buffer ion pump is fluidically coupled to the buffer channel and fluidically isolated from the ambient and the inner chamber.

Provided is a method of designing a low-pressure chamber that provides a preset air pressure corresponding to a predetermined altitude. The method may include the steps of: calculating a predetermined error range of the preset air pressure, and calculating an amount and types of materials of a getter to be inserted into the low-pressure chamber based on the error range and a total volume of the low-pressure chamber.