A vaporizer apparatus includes a pump housing, a main housing containing an evacuation chamber, and an operation unit attached to the main housing. The operation unit selectively seals the evacuation chamber off from communication with an air inlet. One or more pumps in the pump housing is/are operable to generate a vacuum in the evacuation chamber. A mouthpiece is attached to the main housing, and may be selectively placed in communication with the evacuation chamber. When oil is placed in the evacuation chamber and the operation unit is operated, the evacuation chamber is temporarily sealed off from the inlet, creating a vacuum sealed chamber connected with the pump(s). Then, the pump(s) is/are activated to reduce pressure in the evacuation chamber, and the oil is vaporized at an ambient temperature without requiring a heater. When the operation unit is released, the evacuation chamber is emptied via the mouthpiece.

A vaporizer apparatus includes a pump housing, a main housing containing an evacuation chamber, and an operation unit attached to the main housing. The operation unit selectively seals the evacuation chamber off from communication with an air inlet. One or more pumps in the pump housing is/are operable to generate a vacuum in the evacuation chamber. A mouthpiece is attached to the main housing, and may be selectively placed in communication with the evacuation chamber. When oil is placed in the evacuation chamber and the operation unit is operated, the evacuation chamber is temporarily sealed off from the inlet, creating a vacuum sealed chamber connected with the pump(s). Then, the pump(s) is/are activated to reduce pressure in the evacuation chamber, and the oil is vaporized at an ambient temperature without requiring a heater. When the operation unit is released, the evacuation chamber is emptied via the mouthpiece.

A vaporizer apparatus includes a pump housing, a main housing containing an evacuation chamber, and an operation unit attached to the main housing. The operation unit selectively seals the evacuation chamber off from communication with an air inlet. One or more pumps in the pump housing is/are operable to generate a vacuum in the evacuation chamber. A mouthpiece is attached to the main housing, and may be selectively placed in communication with the evacuation chamber. When oil is placed in the evacuation chamber and the operation unit is operated, the evacuation chamber is temporarily sealed off from the inlet, creating a vacuum sealed chamber connected with the pump(s). Then, the pump(s) is/are activated to reduce pressure in the evacuation chamber, and the oil is vaporized at an ambient temperature without requiring a heater. When the operation unit is released, the evacuation chamber is emptied via the mouthpiece.

A vaporizer apparatus includes a pump housing, a main housing containing an evacuation chamber, and an operation unit attached to the main housing. The operation unit selectively seals the evacuation chamber off from communication with an air inlet. One or more pumps in the pump housing is/are operable to generate a vacuum in the evacuation chamber. A mouthpiece is attached to the main housing, and may be selectively placed in communication with the evacuation chamber. When oil is placed in the evacuation chamber and the operation unit is operated, the evacuation chamber is temporarily sealed off from the inlet, creating a vacuum sealed chamber connected with the pump(s). Then, the pump(s) is/are activated to reduce pressure in the evacuation chamber, and the oil is vaporized at an ambient temperature without requiring a heater. When the operation unit is released, the evacuation chamber is emptied via the mouthpiece.

A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.

A microfabricated gas flow structure includes an array of vertical gas flow channels in a side-by-side parallel flow arrangement. Adjacent gas flow channels are separated by a thin wall having a thickness which can be an order of magnitude or more less than the channel width, offering exceptionally high area efficiency for the array. Channel walls can be formed from a dielectric material to provide the walls with sufficient integrity at nanoscale thicknesses and to provide thermal insulative properties in the lateral direction, thereby controlling power losses when the gas flow structure is employed as a Knudsen pump. The gas flow structure can be microfabricated as a monolithic structure from an SOI wafer, with the gas flow channels formed in the device layer and the heat sink formed from the handle layer.

Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.

Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.