A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes axially arranged cryopanels including a top cryopanel disposed closest to the cryopump intake port, and a top cryopanel accommodation cryopanel which is thermally coupled to the high-temperature cooling stage and is disposed in the cryopump intake port to form a top cryopanel accommodation compartment.

An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

Flange for a vacuum apparatus comprises a housing to be connected to the vacuum apparatus defining an opening wherein the opening has rectangular narrow shape. The flange further comprises a metal seal arranged around the opening to create a vacuum tight seal.

A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, and a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes a plurality of cryopanels and a plurality of heat transfer bodies axially arranged in columnar shape, and in which the plurality of cryopanels and the plurality of heat transfer bodies are axially stacked.

Disclosed is a vacuum roaster including a chamber, a door cap formed on one side of the chamber so as to be opened or closed, a vacuum cap formed on an opposite side of the chamber, a basket spaced apart from an inner circumferential surface of the chamber, and including a basket door that is opened or closed for introduction and discharge of an object to be processed, a vacuum adjustment device for adjusting a vacuum state inside the chamber, a drive motor connected to the basket via a shaft for rotating the basket, and a heater provided inside the chamber so as to be spaced apart from the basket.

Disclosed is a vacuum apparatus that is not complicated in construction, does not require two receptacle bodies, and is improved in vacuum efficiency. The vacuum apparatus includes a cylinder member provided with a guide shaft disposed in the central area of the inner space thereof, and a piston module including a separating and opening/closing unit and a hollow rod unit with a guide bore in the inside thereof extending downward from the central area of the separating and opening/closing unit. The piston module is fitted in the inside of the cylinder member to separate the inner space of the cylinder member into an upper first space and a lower second space, and provided with a first O-ring to open/close the first space and the second space in relation to each other while being moved vertically according to a moving direction in relation to the cylinder member.

Disclosed is a vacuum apparatus that is not complicated in construction, does not require two receptacle bodies, and is improved in vacuum efficiency. The vacuum apparatus includes a cylinder member provided with a guide shaft disposed in the central area of the inner space thereof, and a piston module including a separating and opening/closing unit and a hollow rod unit with a guide bore in the inside thereof extending downward from the central area of the separating and opening/closing unit. The piston module is fitted in the inside of the cylinder member to separate the inner space of the cylinder member into an upper first space and a lower second space, and provided with a first O-ring to open/close the first space and the second space in relation to each other while being moved vertically according to a moving direction in relation to the cylinder member.

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.