An air motor is provided for converting electrical energy into kinetic energy, and using the kinetic energy to generate a specified air pressure and a specified airflow rate. The air motor comprises plural air motor units, each of which includes a main body and a piezoelectric actuator. The piezoelectric actuator is disposed within the main body. When the piezoelectric actuator is enabled, the air within the main body is controlled and driven to flow. The air motor can be used to replace various types of motors, compressors or engines.

A method of producing a flow of a fluid through a passage (24) defined in a rigid frame (22) comprises selectively actuating a flexible membrane (38) disposed across a midpoint of the passage (24) with an actuating system in a manner which produces a wave-like motion in the membrane (38) thereby causing a peristaltic movement of the fluid through the passage (24).

A method of producing a flow of a fluid through a passage (24) defined in a rigid frame (22) comprises selectively actuating a flexible membrane (38) disposed across a midpoint of the passage (24) with an actuating system in a manner which produces a wave-like motion in the membrane (38) thereby causing a peristaltic movement of the fluid through the passage (24).

A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.

A fluid control device (111) includes a valve section (12) and a blower section (13). The valve section (12) allows fluid to flow in one direction. The valve section (12) has the shape of a cylindrical container with a valve chamber (40) provided therein. The valve section (12) includes a top plate (21), a side-wall plate (22), a bottom plate (23), and a film (24). A plurality of ejection holes (41) and a plurality of auxiliary holes (49) arranged in a predetermined pattern are formed in a central region of the top plate (21). A plurality of communication holes (43) arranged in a predetermined pattern are formed in a central region of the bottom plate (23). A plurality of film holes (42) arranged in a predetermined pattern are formed in a central region of the film (24).

An apparatus for creating a flow of gas comprises a frame having a passage defined therethrough. The passage extends a length along a central longitudinal axis from an inlet to an outlet and has a first side and a second side. A flexible pumping membrane is disposed within the passage. The membrane has a first edge coupled to the first side of the passage at a midline thereof and a second edge, disposed opposite the first edge, coupled to the second side of the passage at a midline thereof. The membrane segregates the frame into an upper portion and a lower portion. The apparatus also includes an actuating system which is structured to selectively move portions of the membrane toward either the upper portion or the lower portion of the frame in a manner which causes a wave-like movement in the pumping membrane and creates the flow of gas.

An apparatus for creating a flow of gas comprises a frame having a passage defined therethrough. The passage extends a length along a central longitudinal axis from an inlet to an outlet and has a first side and a second side. A flexible pumping membrane is disposed within the passage. The membrane has a first edge coupled to the first side of the passage at a midline thereof and a second edge, disposed opposite the first edge, coupled to the second side of the passage at a midline thereof. The membrane segregates the frame into an upper portion and a lower portion. The apparatus also includes an actuating system which is structured to selectively move portions of the membrane toward either the upper portion or the lower portion of the frame in a manner which causes a wave-like movement in the pumping membrane and creates the flow of gas.

The invention relates to a microfluidic device comprising at least one element (1) of magnetic shape memory (MSM) material for handling of a fluid flow, the MSM element (1) being controlled by a magnetic field. The device comprises elastic material (2) between the handled fluid and the MSM element (1), and that the magnetic field is arranged to form a local shrinkage to the MSM element (1) which together with the elastic material (2) form a shrinkage cavity (3) in a location where the magnetic field is applied to the MSM element. Preferably, the microfluidic device is connected to a lab-on-a-chip, and it can act as one of the followings: a pump, vacuum pump, compressor, refrigerator, valve, manifold, dozer, mixer.

The invention relates to a microfluidic device comprising at least one element (1) of magnetic shape memory (MSM) material for handling of a fluid flow, the MSM element (1) being controlled by a magnetic field. The device comprises elastic material (2) between the handled fluid and the MSM element (1), and that the magnetic field is arranged to form a local shrinkage to the MSM element (1) which together with the elastic material (2) form a shrinkage cavity (3) in a location where the magnetic field is applied to the MSM element. Preferably, the microfluidic device is connected to a lab-on-a-chip, and it can act as one of the followings: a pump, vacuum pump, compressor, refrigerator, valve, manifold, dozer, mixer.

The micropump including a pump chamber which can be fluidly filled or emptied both by means of a passage opening and an inlet, the pump chamber being covered with a disk-shaped actuator so that the volume of the pump chamber can be changed by deflecting the actuator, the passage opening being arranged in a side of the pumping chamber opposite the actuator, and the inlet has a smaller or similar flow resistance compared to the through opening. An entrance to the passage opening can be closed by means of the deflected actuator, so that a valve is formed in the basic state, or closed by means of the undeflected actuator, so that a valve is formed in the basic state. The micropump can have a second pump chamber with an actuator and inlet, the passage opening of which is connected to that of the first pump chamber.