An enclosure system may be formed of a lightweight panel with a thin non-porous membrane that enables the extraction and leak detection of hazardous gases from housing equipment such as vacuum pumps, valves, abatement equipment and the like. Additionally, the enclosure system includes a one or multiple layers of wire mesh which prevent projectiles with a high kinetic energy from escaping from the housing equipment thereby minimising the risk of an explosion causing parts or panels to be ejected from the enclosure system.

Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.

A portable battery-powered vacuum pump includes a housing having an intake vent, an outlet, and a fan assembly including a fan. The vacuum pump includes a magnet having a holding strength great enough to resist terrestrial gravitational force acting on the vacuum pump, a battery, and a power and control circuit that selectively applies power from the battery to rotate the fan, such that gas is drawn into the intake vent and expelled from the outlet.

A dust extractor (1) includes a motor (30) and a blower fan (40), which is disposed downward of the motor and is connected to the motor. The dust extractor further includes a flexible (pliable) support member (50; 500), which has a lower-end portion (52) connected to the motor and suspends the motor.

A vacuum pump includes; a rotor, a stator, a motor, a heating section heating the pump base portion, a base temperature detection section detecting a temperature of the pump base portion, a rotor temperature detection section detecting a temperature equivalent as a physical amount equivalent to a temperature of the rotor, and a heating control section to control heating of the pump base portion by the heating section such that a detection value of the rotor temperature detection section falls within a predetermined target value range. A monitoring device comprises: an estimation section configured to estimate, based on multiple temperatures detected over time by the base temperature detection section, maintenance timing at which the temperature of the pump base portion reaches equal to or lower than a predetermined temperature; and an output section configured to output maintenance information based on the estimated maintenance timing.

A vacuum assembly for a refrigerator includes upper and lower sealing bodies, which are buckled to define a sealed cavity. A vacuum pump is provided in the cavity. A plurality of sheet members are arranged between the vacuum pump and a sealing box. A plurality of abutting parts are provided on the upper sealing body and abutting against tops of the sheet members. A step is provided at an end of the abutting part coming into contact with the sheet member. A top surface of the step abuts against the sheet member, and a side surface of the step abuts against the sheet member. A plurality of ribs are provided on the lower sealing body and spaced apart from the side walls to define limiting grooves. A plurality of guide grooves are provided on the lower sealing body and extend in a vertical direction to guide the sheet members.

The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.

A fan motor comprises a motor mount, a motor part accommodated in an inner space of the motor mount, and an impeller disposed above the motor mount. The motor mount defines: an air discharge opening configured to discharge air discharged from the impeller to an outer space of the motor mount; a cooling flow path outlet disposed at the upper side of the motor mount at a position between the impeller and the air discharge opening; and a first cooling flow path inlet disposed at a position below the air discharge opening and the cooling flow path outlet. The fan motor further includes a guide that is configured to direct, to an upward direction, at least a portion of air that is discharged through the air discharge opening and introduced to the inner space through the first cooling flow path inlet.

A vacuum pump comprises: a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage. The first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a turbo-molecular pump portion. The second pump stage includes a Holweck pump portion suitable for a great exhaust volume.

A vacuum pump with dynamic control of cooling fan speed and motor flux is provided to reduce transmitted noise and waste heat and provide a quieter, more efficient pump.