A compressor including a gear system configured to be driven by a drive unit, a plurality of compression stages coupled to the gear system, wherein the plurality of compression stages includes at least one centrifugal compression stage and at least one positive displacement compression stage, is provided. Furthermore, an associated method is also provided.

The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a claw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

A vacuum pump comprises: a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage. The first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a turbo-molecular pump portion. The second pump stage includes a Holweck pump portion suitable for a great exhaust volume.

A vacuum pump with dynamic control of cooling fan speed and motor flux is provided to reduce transmitted noise and waste heat and provide a quieter, more efficient pump.

A vacuum pump comprises: a pump; a pump stator; a base having an exhaust-side space into which the gas discharged by the pump rotor and the pump stator flows and an exhaust port in communication with the exhaust-side space; and a groove pumping element that is provided in a ring shape around a rotational axis of the pump rotor on a downstream end face of the pump rotor or on an inner bottom of the base opposite to the downstream end face and discharges gas from an inner peripheral side of the pump rotor to the exhaust-side space, the groove pumping element being circumferentially provided with alternating grooves defining a concave portion and convex portions, and the groove pumping element being located outside an exhaust path through which gas flows into the exhaust-side space and is thereafter discharged to the exhaust port.

A vacuum pump includes a housing with an inlet port, a rotor part in the housing, the rotor part including a recess part facing the inlet port, and a plurality of rotating blades, a rotating shaft overlapping the recess part, and a capping part overlapping the rotating shaft and covering the recess part.

A sniffer leak detector includes a mass spectrometer for analyzing hydrogen or helium, a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and a sniffer probe which includes a plurality of intake lines and is connected with said inlet of said turbomolecular pump, wherein a vacuum pump includes at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle, wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.

A vacuum exhaust system and method of evacuating a plurality of chambers is disclosed. The vacuum exhaust system is within a clean room and comprises: a plurality of branch process gas channels each configured to connect to a corresponding chamber and a shared process channel formed from a confluence of the branch channels and configured to provide a shared fluid communication path for process gas from each of the chambers to flow from the clean room to a process channel outside of the clean room. There is also a plurality of branch pumpdown channels each configured to connect to a corresponding chamber and a shared pumpdown channel formed from a confluence of the branch pumpdown channels and configured to provide a fluid communication path for fluid to flow from the clean room to a pumpdown channel outside of the clean room during pumpdown of at least one of the vacuum chambers.

There is provided a resin molded rotor, comprising: a rotor configured to hold a magnet; a main shaft provided with the rotor mounted thereto and configured to transmit power to outside; and a resin mold configured to integrally cover the rotor and part of the main shaft on respective sides in an axial direction of the rotor, wherein an O-ring is placed between the resin mold and the main shaft to seal between the resin mold and the main shaft.

To provide a vacuum pump that is capable of efficiently cooling gas and requires less maintenance. The vacuum pump includes: a main body casing having an inlet portion and an outlet portion for gas; a turbomolecular pump mechanism portion in which a stator blade and a rotor blade are formed; a thread groove pump mechanism portion provided at a downstream side of the turbomolecular pump mechanism portion; a cooling trap portion that cools the gas led out from the turbomolecular pump mechanism portion and causes the gas to flow out to a side of the thread groove pump mechanism portion; and a partition wall that guides the gas led out from the turbomolecular pump mechanism portion to the cooling trap portion.