A self-adjusting static pressured plane guide rail consists of a base, slider provided on the base and an upper pressing plate corresponding to the shoulders on both sides of the slider; wherein: each upper pressing plate's outer edge contacts the base to form a fulcrum and the upper pressing plate's inner edge acts as the force portion and a upper pressing block is set between force portion and the slider's shoulder and a metal wire is set between the upper pressing block's top surface and the force portion's bottom surface of upper pressing plate along the slider's sliding direction; the upper pressing plate is provided with pre-tightening bolt to connect the base in a fixed way. When vibration frequency changes during operation, the oil film gap changes accordingly due to pre-tightening bolt's elasticity of the mutual function and the metal wire's elasticity to always maintain oil film layer's rigidity function.

A magnetic gravity compensator comprises a stator (1), a rotor (2), a base (4) and an adjustment mechanism (6). The stator (1) is disposed on the base (4), and the rotor (2) is levitated with respect to the stator (1). The stator (1) comprises a central cylindrical magnet (11) that is fixed to the base (4) by the adjustment mechanism (6) and consists of at least two arc magnets (111). The adjustment mechanism (6) has a first end fixed to the base (4) and a second end securely connected to the at least two arc magnets (111). The adjustment mechanism (6) is configured to drive the at least two arc magnets (111) to synchronously move radially with respect to a central axis of the central cylindrical magnet (11) so as to change a magnetic circuit between the central cylindrical magnet (11) and the rotor (2), and thereby adjust a magnetic levitation force between the stator (1) and the rotor (2).

An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section.

Provided for the purposes of further improved precision of a high-precision machine tool (100) are at least one linear drive- and guide-bearing (1) having at least one linear motor (27), which has at least one magnet (15) arranged on one of the machine components (5) and at least one coil (25) arranged on the other machine component (10) and operatively connected to the at least one magnet (15), wherein the at least one magnet (15) and the at least one coil (25) are configured to exert an opposing attractive force and to perform an at least temporarily relative movement in relation to one another; at least one hydrostatic fluid bearing (30-1, 30-3) arranged on one of the two machine components (10) and operatively connected to the other machine component (5), wherein the hydrostatic fluid bearing (30-1, 30-3) exerts a repulsive force opposite to the attractive force; and a first bearing gap (H1), formed between the two machine components (5, 10), the height of which is greater than 0 μm and less than or equal to 10 μm.

According to one example, a hydrostatic bearing includes a carriage, and a guide rail that, when combined with the carriage, provides for linear motion of the carriage with respect to the guide rail. The hydrostatic bearing is configured to transfer forces between the carriage and the guide rail without mechanical contact between the carriage and the guide rail by supplying pressurized, incompressible fluid to bearing pockets in the carriage. Each of the bearing pockets is enclosed by a bearing land of a bearing pad, and the bearing pad comprises the general shape of a parallelogram, a trapezoid, an arrow, or any other shape where the edges are generally not orthogonal to the direction of motion.

A stage apparatus includes a surface plate as well as a guide shaft fixedly secured to the surface plate, a drive member moving along the guide shaft, and a hydrostatic fluid bearing that forms fluid films in the gap portion between the guide shaft and the drive member. The apparatus further includes: a positional deviation detection section—for detecting a relative positional deviation which occurs between the guide shaft and the drive member and which affects the thickness dimensions of the fluid films; and a state decision section for making a decision on the condition of the apparatus itself based on the positional deviation detected by the detection section and outputting information responsive to the decision.

There is provided an electron beam inspection system which can enhance the safety of the whole system if servo valves are deactivated in the event of a power failure or an emergency stop. The electron beam inspection system has a beam source, a stage mechanism, and a pump. The stage mechanism has a guide shaft, a slider, a first servo valve, a second servo valve, a first exhaust pipe, a second exhaust pipe, and an exhaust valve. The slider is movably supported to the guide shaft via a hydrostatic bearing and has a first pressure subchamber and a second pressure subchamber. The exhaust valve is mounted in the first exhaust pipe. When the servo valves are in operation, the exhaust valve is opened. When supply of electric power to the servo valves is ceased, the exhaust valve is closed.

An elevator system has an elevator shaft, an elevator car and a drive device for displacing the elevator car within the elevator shaft. The drive device is a linear motor that has a stationary part secured to a shaft wall of the elevator shaft and a movable part secured to the elevator car. The drive device has an air bearing between the stationary part and the movable part that keeps the stationary part spaced apart from the movable part via an air gap therebetween.

A support structure includes: a support frame as a shaft support member for supporting two shafts; a bush provided on each of the two shafts in a slidable manner; a cover support member connected to the multiple bushes and configured to support the cover; a first connection member for connecting one end of each of the two shafts to the support frame in a manner that the relative position between the shaft and the support frame will not change; and a second connection member for connecting the other end of each of the two shafts to the support frame in a manner that the relative position between the shaft and the support frame can change.

A bearing assembly for a linear electromagnetic machine includes a sleeve having a surface configured to provide a bearing between the surface and a translator, a front plate coupled to the sleeve, a support block, and a plurality of flexures coupled to the support block. Each flexure is coupled between the support block and one of the front plate or a stator. For example, a load path extends from a stator to the support block via a first set of flexures of the plurality of flexures, from the support block to the front plate via a second set of flexures of the plurality of flexures, and from the front plate to the sleeve. In the example of four flexures, two flexures are affixed to the support block and front plate, while two other flexures are affixed to the support block and the stator.