A motion guide apparatus is provided which can make a carriage compact without reducing a rated load and an allowable load. The motion guide apparatus includes: a track member (1) and a carriage (2) that moves along the track member (1). A circulation path (7) of the carriage (2) includes a loaded path (C1), a return path (C2) parallel to the loaded path (C1), and a substantially U-shaped turn path (C3) connected to the loaded path (C1) and the return path (C2). At least a part of the turn path (C3) bends in side view in a direction where the loaded path (C1) and the return path (C2) coincide.

A guide device includes a track member and a moving member engaged with the track member with a plurality of rolling elements interposed therebetween. A lubricating path is formed in the moving member for supplying lubricant to a circulation path for the rolling elements. The lubricating path has a common path including an inlet portion that serves as a supply port for the lubricant, a first path through which grease flows, and a second path through which lubricating oil flows. A cross-sectional area of the second path is smaller than a cross-sectional area of the first path, and in the common path, a second communication portion of the second path is located closer to the inlet portion than a first communication portion of the first path. Further, the guide device includes a plug member for blocking the inlet portion of the common path, the plug member being removable and able to be moved within the common path.

A motion guide apparatus is provided which can make a carriage compact without reducing a rated load and an allowable load. The motion guide apparatus includes: a track member (1) and a carriage (2) that moves along the track member (1). A circulation path (7) of the carriage (2) includes a loaded path (C1), a return path (C2) parallel to the loaded path (C1), and a substantially U-shaped turn path (C3) connected to the loaded path (C1) and the return path (C2). At least a part of the turn path (C3) bends in side view in a direction where the loaded path (C1) and the return path (C2) coincide.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.