A system includes a gas delivery disk coupled to a second shaft, wherein the second shaft and the gas delivery disk are disposed about an axis. The gas delivery disk includes an inner axial opening configured to facilitate a first axial flow through a first passage within the second shaft, a duct configured to supply a bearing flow in a radial direction toward the axis, and a bearing face disposed within the first passage and radially interior to the inner axial opening. The bearing face is configured to receive the bearing flow, and the bearing face is configured to form a gas bearing between the bearing face and a first shaft disposed about the axis.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

An inner-support and gas-flotation static balancing device for a rotating ring-shaped part and a method of using the same are provided. A bottom end of an end cover is rotatably connected to a top end of a support base. One end, which is away from a working gas cavity, of the gas-flotation chamber is connected to a disc seat through a supporting column. The levelness of the gas-flotation chamber may be adjusted through the supporting column. Two axial positioning mechanisms are respectively mounted on two sides of the gas-flotation chamber in an axis direction. Gas supplied by external air supply may enter the working gas cavity, the cylindrical gas inlet channels, and the gas inlet holes through the gas supply hole, so as to form an gas film with certain bearing capacity between the working surface and the inner surface of the rotating ring-shaped part

There is provided an electron beam inspection system which can enhance the safety of the whole system if servo valves are deactivated in the event of a power failure or an emergency stop. The electron beam inspection system has a beam source, a stage mechanism, and a pump. The stage mechanism has a guide shaft, a slider, a first servo valve, a second servo valve, a first exhaust pipe, a second exhaust pipe, and an exhaust valve. The slider is movably supported to the guide shaft via a hydrostatic bearing and has a first pressure subchamber and a second pressure subchamber. The exhaust valve is mounted in the first exhaust pipe. When the servo valves are in operation, the exhaust valve is opened. When supply of electric power to the servo valves is ceased, the exhaust valve is closed.

A damper bearing includes: a bearing portion that supports a rotary shaft; and a tubular portion that is located around an outer circumference of the bearing portion, and has an outer surface attachable to a structural member. The bearing portion can be a hydrostatic bearing that supports the rotary shaft with a predetermined bearing clearance therebetween. The tubular portion includes a plurality of planar slits arranged circumferentially at predetermined intervals in the tubular portion. Each slit extends radially from an open end at the outer surface, and extends circumferentially in an arc to a predetermined point in a region between the outer and inner surfaces. The tubular portion includes a bearing fluid supply hole that is formed in a region where none of the planar slits is situated, and extends from the outer surface of the tubular portion to the bearing portion without passing through any of the planar slits.

The amount of consumption of gas is reduced when the gas is expanded to be cooled by using a plurality of expansion turbines. A high-pressure expansion turbine includes: a gas supply passage through which bearing gas is supplied to a bearing portion; and a gas discharge passage through which the bearing gas which has been supplied from the gas supply passage to the bearing portion is discharged from the bearing portion. A low-pressure expansion turbine includes: a gas supply passage through which the bearing gas is supplied to a bearing portion; and a gas discharge passage through which the bearing gas which has been supplied from the gas supply passage to the bearing portion is discharged from the bearing portion. The bearing gas discharged from the gas discharge passage of the high-pressure expansion turbine is supplied to the gas supply passage of the low-pressure expansion turbine.

A bearing assembly for a linear electromagnetic machine includes a sleeve having a surface configured to provide a bearing between the surface and a translator, a front plate coupled to the sleeve, a support block, and a plurality of flexures coupled to the support block. Each flexure is coupled between the support block and one of the front plate or a stator. For example, a load path extends from a stator to the support block via a first set of flexures of the plurality of flexures, from the support block to the front plate via a second set of flexures of the plurality of flexures, and from the front plate to the sleeve. In the example of four flexures, two flexures are affixed to the support block and front plate, while two other flexures are affixed to the support block and the stator.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

A processing apparatus includes a processing unit. The processing unit includes a spindle, a spindle housing having an air bearing for rotatably supporting the spindle by using air, and a tool mounted on the front end of the spindle. The spindle housing has an air supply passage for supplying air to the air bearing, an air supply port connected to the air supply passage, an air discharge passage, and an air discharge port. The air supply port is connected through an air supply line to an air source. The air supply line is provided with a pressure gauge and a flowmeter. A first allowable value is previously set for the pressure to be detected by the pressure gauge, and a second allowable value is previously set for the flow rate to be detected by the flowmeter.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.