A processing machine includes: a static pressure bearing configured to support a drive shaft; a fluid feeder configured to output a fluid to be supplied to the static pressure bearing, in accordance with rotation of a servomotor; a sensor configured to detect a physical quantity of the fluid output from the fluid feeder; and a control unit configured to control the rotation speed of the servomotor according to the physical quantity of the fluid.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

A lubricant supported electric motor includes a stator presenting an stator raceway, and a rotor movable relative to the stator and presenting a rotor raceway disposed in spaced relationship with the stator raceway to define a gap therebetween. A lubricant is disposed in the gap for supporting the rotor relative to the stator. The stator defines at least one hydrostatic support chamber disposed in radially recessed relationship relative to the stator raceway and in fluid communication with the gap. The stator also defines a passageway disposed in fluid communication with the at least one hydrostatic support chamber for providing lubricant to the at least one hydrostatic support chamber and the gap. A flow restriction mechanism is disposed in fluid communication with the passageway for controlling and balancing a supply and pressure of the lubricant in the hydrostatic support chamber.

A compressed fluid supply system comprises: a pressure adjustment unit for adjusting the pressure of a compressed fluid supplied from a fluid supply source to support members supporting a movable member so that the movable member can be driven through the use of the compressed fluid; a drive force acquisition unit for acquiring a drive force of a motor for driving the movable member; and a pressure control unit for adjusting the pressure of the compressed fluid supplied to the support members by controlling the pressure adjustment unit on the basis of the drive force of the motor.

A pressurized fluid supply system capable of favorably resuming the supply of a pressurized fluid to a support member when the supply of the pressurized fluid from a fluid supply source returns to a normal state, includes: a fluid supply path for supplying the pressurized fluid from the fluid supply source to the support member that supports a member using the pressurized fluid; a solenoid valve provided on the fluid supply path; a pressure sensor that is provided on the fluid supply path between the fluid supply source and the solenoid valve and detects the pressure of the pressurized fluid; a flow rate sensor that is provided on the fluid supply path between the solenoid valve and the support member and detects the flow rate of the pressurized fluid; and a control unit that controls opening/closing of the solenoid valve.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes at least one side shoulder which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

According to one aspect of the present disclosure, a bearing (100) for supporting a shaft (200) rotating around an axis A is provided. The bearing (100) comprises: a bearing housing (120); and a plurality of tilting pads (130), wherein each tilting pad is connected to the housing (120) via a flexible web support (135) and comprises a bearing surface (136) directed toward a shaft receiving space (125) configured for supporting a shaft. The bearing surface (136) of at least one tilting pad (130) of the plurality of tilting pads is provided with a plurality of lubricant feed openings (140). According to a further aspect, a method of operating a bearing (100) as well as a method of manufacturing a bearing (100) are provided.