Patent classifications
F16K1/425
Method and apparatus for high pressure sealing
The present technology generally relates to devices, systems and methods for providing robust sealing between surfaces in a pressurized system, such as a chromatography system. In particular, the devices, systems and methods relate to compliant and resilient parts that can be reused and/or reinstalled while providing a pressure tight sealing surface even within a high pressure environment (e.g., 1000 psi or greater).
Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.
Solenoid valve with hard seal structure
A solenoid valve with a hard seal structure includes a valve body having a fluid passage and an accommodating cavity, and a valve assembly mounted inside the accommodating cavity. The valve assembly includes a fluid inlet seat, a valve core cooperating with the fluid inlet seat, and a driving mechanism for driving reciprocating motion of the valve core. The fluid inlet seat has a guide hole that allows the value core to stretch therein, a middle section of the fluid inlet seat has fluid inlet holes, and a lower section of the fluid inlet seat has a valve core fluid passage and a fluid passage slant located at the valve core fluid passage. The valve core includes a bigger-diameter section, a slant section, a smaller-diameter section and a valve core end slant sequentially arranged from up to down.
SOLENOID VALVE WITH HARD SEAL STRUCTURE
A solenoid valve with a hard seal structure includes a valve body having a fluid passage and an accommodating cavity, and a valve assembly mounted inside the accommodating cavity. The valve assembly includes a fluid inlet seat, a valve core cooperating with the fluid inlet seat, and a driving mechanism for driving reciprocating motion of the valve core. The fluid inlet seat has a guide hole that allows the value core to stretch therein, a middle section of the fluid inlet seat of fluid inlet holes, and a lower section of the fluid inlet seat has a valve core fluid passage and a fluid passage slant located at the valve core fluid passage. The valve core includes a bigger-diameter section, a slant section, a smaller-diameter section and a valve core end slant sequentially arranged from up to down.
CAPACITY CONTROL VALVE
Provided is a capacity control valve that can be produced with good workability and at a low cost. A capacity control valve includes: a valve housing in which a flow passage is formed; and a valve body disposed inside the valve housing and driven by a solenoid. A valve seat member having a tubular shape and including a valve seat on which the valve body is seatable is press-fitted into the valve housing, and at least the valve seat of the valve seat member is harder than the valve housing.
VACUUM VALVE
A vacuum valve improving product performance of a packing ring to extend a replacement period of the packing ring is disclosed. As an opening and closing driving guide groove including a protruding groove section and first and second inclined groove sections is defined in each of both side surfaces of a driving block, and an L-motion roller inserted into and moving along the opening and closing driving guide groove is provided on an L-motion block, when the L-motion roller is disposed at an end of the first inclined groove section, one side surface of a valve blade closes an inlet, and when the L-motion roller is disposed at an end of the second inclined groove section, one side surface of the valve blade closely contacts an inner surface of the housing. The packing ring provided on a closing surface of the valve blade is blocked from contacting air or fluid.
Valve and valve with seat insertion tool and extraction tool
A valve and tool assembly includes a valve seat, a valve seat recess, a seat carrier and a valve seat displacement tool. A valve seat installation tool is also described, as well as a valve seat replacement kit and a method for replacing a valve seat. The valve may be a diaphragm valve, for example.
VALVE ORIFICE INSERT
A valve orifice insert has a stepped-shaped wall including a first tubular section and a second tubular section having a smaller outer dimension than the first tubular section, and a lip structure protruding axially and including a planar valve seat surface. The first tubular section and the second tubular section being are joined by a step structure. At least one circumferential protrusion extends radially outward a predetermined distance from an outer surface of the first tubular section or an outer surface of the second tubular section to form an interference fit with the step-shaped opening when the valve orifice insert is fitted into the step-shaped opening.
Valve orifice insert
A valve orifice insert has a stepped-shaped wall including a first tubular section and a second tubular section having a smaller outer dimension than the first tubular section, and a lip structure protruding axially and including a planar valve seat surface. The first tubular section and the second tubular section being are joined by a step structure. At least one circumferential protrusion extends radially outward a predetermined distance from an outer surface of the first tubular section or an outer surface of the second tubular section to form an interference fit with the step-shaped opening when the valve orifice insert is fitted into the step-shaped opening.
VALVE DEVICE, FLUID CONTROL DEVICE, FLUID CONTROL METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD
A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess 23 of the valve body 2, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.