A manufacturing method of micro fluid actuator includes: providing a substrate; depositing a first protection layer on a first surface of the substrate; depositing an actuation region on the first protection layer; applying lithography dry etching to a portion of the first protection layer to produce at least one first protection layer flow channel; applying wet etching to a portion of a main structure of the substrate to produce a chamber body and a first polycrystalline silicon flow channel region, while a region of an oxidation layer middle section of the main structure is not etched; applying reactive-ion etching to a portion of a second surface of the substrate to produce at least one substrate silicon flow channel; and applying dry etching to a portion of a silicon dioxide layer to produce at least one silicon dioxide flow channel.

The disclosed microfluidic valves may include a valve body having at least one cavity therein, a gate transmission element separating the cavity into an input gate terminal and an output gate terminal, a gate port configured to convey drive fluid into the input gate terminal, and a fluid channel. The gate transmission element may include a flexible membrane and a plunger coupled to the flexible membrane. The gate transmission element may be configured to move within the cavity to inhibit a subject fluid flow from an inlet port to an outlet port of the fluid channel upon pressurization of the input gate terminal, and to allow subject fluid flow from the inlet port to the outlet port upon depressurization of the input gate terminal. Various other related systems and methods are also disclosed.

Systems and methods for conducting designated reactions utilizing a base instrument and a removable cartridge. The removable cartridge includes a fluidic network that receives and fluidically directs a biological sample to conduct the designated reactions. The removable cartridge also includes a flow-control valve that is operably coupled to the fluidic network and is movable relative to the fluidic network to control flow of the biological sample therethrough. The removable cartridge is configured to separably engage a base instrument. The base instrument includes a valve actuator that engages the flow-control valve of the removable cartridge. A detection assembly held by at least one of the removable cartridge or the base instrument may be used to detect the designated reactions.

The present disclosure relates to an apparatus, system and method for a microchannel valve. The valve is configured to control or switch the flow of gasses or liquids. The valve includes a first substrate with a microchannel interrupted by a rotational element having a matching microchannel. The rotational element is attached to a second substrate in contact with the first. Actuation of the valve is achieved by rotating the second substrate relative to the first. The valve may be configured for capillary input and output, and/or for high pressure operation by means of capillary retention features. The valve may be disposed within a subassembly for maintaining contact, axial alignment, and relative rotational alignment between the first and second substrates. The present disclosure also provides a method for fabricating the valve. The present disclosure also provides ways to eliminate gaps between the two substrates.

A low-voltage microfluidic valve device and system for regulating the flow of fluid. One low-voltage microfluidic valve device for regulating the low of fluid includes a nano-textured dendritic metallic filament configured to grow and retract in response to a voltage. The low-voltage microfluidic valve device also includes a microfluidic channel configured to allow fluid flow, wherein the fluid flow is selectively interrupted by the growth of the nano-textured dendritic metallic filament. The low-voltage microfluidic valve device also includes a membrane positioned proximate to the fluid and configured to alter shape in response to the growth of the nano-textured dendritic metallic filament.

A micro channel structure includes a substrate, a supporting layer, a valve layer, a second insulation layer, a vibration layer and a bonding-pad layer. A flow channel is formed on the substrate. A conductive part and a movable part are formed on the supporting layer and the valve layer, respectively. A first chamber is formed at the interior of a base part and communicates to the hollow aperture. A supporting part is formed on the second insulation layer. A second chamber is formed at the interior of the supporting layer and communicates to the first chamber through the hollow aperture. A suspension part is formed on the vibration layer. By providing driving power sources having different phases to the bonding-pad layer, the suspension part moves upwardly and downwardly, and a relative displacement is generated between the movable part and the conductive part, to achieve fluid transportation.

Systems and methods for conducting designated reactions utilizing a base instrument and a removable cartridge. The removable cartridge includes a fluidic network that receives and fluidically directs a biological sample to conduct the designated reactions. The removable cartridge also includes a flow-control valve that is operably coupled to the fluidic network and is movable relative to the fluidic network to control flow of the biological sample therethrough. The removable cartridge is configured to separably engage a base instrument. The base instrument includes a valve actuator that engages the flow-control valve of the removable cartridge. A detection assembly held by at least one of the removable cartridge or the base instrument may be used to detect the designated reactions.

An electronic device including a substrate, a thin film transistor, a micro pump, and a micro fluid platform is provided. The thin film transistor is disposed on the substrate. The micro pump is disposed on the substrate and electrically connected to the thin film transistor. The micro fluid platform is disposed on the substrate and coupled to the micro pump. The micro pump is configured to travel a to-be-test sample to the micro fluid platform.

A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.

The invention generally provides a sieve valve including: a substrate defining a channel; a flexible membrane adapted and configured for deployment at an intersection with the channel; and one or more protrusions extending into the channel from the substrate or the flexible membrane. The one or more protrusions define a plurality of recesses extending beyond the intersection between the channel and the flexible membrane; A microfluidic circuit including one or more sieve valves. In particular embodiments, the circuit comprises one or more input/output valves. The one or one or more input/output valves can include one or more input valves and one or more output valves. The microfluidic circuit can further include a mixing circuit. At least one of the sieve valves can be positioned between the one or more input/output valves and the mixing circuit. The invention further provides methods of using the device for the analysis of samples comprising cells.