Vacuum machining system (1), comprising a vacuum chamber (10) and a vacuum regulating valve (20). The vacuum valve (20) has a first valve seat (21a), which has a first valve opening (22a) defining a first opening axis (O) and a first sealing surface extending around the first valve opening (O), and a first valve plate (23a) with a first contact surface corresponding to the first sealing surface. The vacuum machining system further comprises a drive unit (30), which is designed in such a way and is coupled to the first valve plate (23a) in such a way that the latter can be moved at least from an open position to a closed position and back again. The first valve seat (21a) is arranged within the vacuum chamber (10) and divides the vacuum chamber (10) into a main process chamber (11) for machining the substrate and into a secondary process chamber (12). The first sealing surface extends orthogonally to the first opening axis (O) and points in the direction of the secondary process chamber (12). The first valve plate (23a) is movably arranged in the secondary process chamber (12).

A check valve for a backflow prevention assembly includes a linkage with a platform having a proximal end and a distal end and a first coupling member supported by the platform for engaging a bias assembly. A stop protrudes from the proximal end of the platform to engage a frame of the check valve for limiting travel of the platform. A branch depends from the proximal end of the platform, the branch having a hinge pin configured to nest in a slot defined by check valve. A second coupling member depends from the distal end of the platform for engaging a valve member.

A valve body unit is configured to be disengaged from a stem by moving the stem and the valve body unit to a valve seat side in a state where a bonnet is separated from the valve seat, thereby pushing a replacement ring such that the replacement ring moves through the bonnet while decreasing in diameter and then drops down onto a ring dropping portion in the free state, then moving the stem, the valve body unit, and the replacement ring to an opposite side to the valve seat side such that a first surface comes into contact with a second surface and the ring dropping portion comes into contact with the replacement ring, and in this state, moving only the stem to the opposite side to the valve seat side such that the connection formed by a connecting mechanism between the stem connection portion and the stem is released.

A poppet valve device is proposed, comprising a valve stem, a poppet, having a sealing surface and being formed separately from the valve stem, wherein the poppet is actuatable via the valve stem, and wherein, following an imaginary line parallel to a longitudinal direction of the valve stem along the closing direction of the poppet, the sealing surface is passed before a front end of the valve stem is passed.

A dual gate valve includes two valve plates that open and close two openings of a valve box, a support bar that supports the two valve plates, a valve rod connected to the support bar, and an operation unit that performs an open and close operation of the two valve plates via the valve rod. The support bar and the valve plate linearly and elongatedly extend in a lateral direction perpendicular to a central axis of the valve rod. The valve rod is connected to a central portion in the long direction of the support bar, and one and the other of the two valve plates are tiltably attached to one end and the other end in the long direction of the support bar via elastic members, respectively.

The invention comprises a flapper check valve assembly in which a flapper coated with an elastomeric seal is pivotably attached to a swing arm, and further in which the swing arm is pivotably attached to a retainer ring permitting two degrees of freedom of motion. The retainer ring is mounted in a check valve body. A novel mounting of the flapper to the swing arm ensures the flapper seals the pipeline against backflow.

A dual gate valve includes two valve plates that open and close two openings of a valve box, a support bar that supports the two valve plates, a valve rod connected to the support bar, and an operation unit that performs an open and close operation of the two valve plates via the valve rod. The support bar and the valve plate linearly and elongatedly extend in a lateral direction perpendicular to a central axis of the valve rod. The valve rod is connected to a central portion in the long direction of the support bar, and one and the other of the two valve plates are tiltably attached to one end and the other end in the long direction of the support bar via elastic members, respectively.

A valve device includes a flow path formation member provided with at least one flow path hole through which a fluid passes, and a drive part that outputs a rotational force. The valve device includes a shaft, and a rotor having a sliding surface that slides while facing an opening surface of the flow path formation member where the flow path hole is opened, and the rotor is configured to increase or decrease an opening degree of the flow path hole with rotation of the shaft. The valve device includes an energization member that energizes the rotor toward the flow path formation member. The valve device includes a coupling structure configured to tiltably couple the shaft to the rotor such that a contact state between the sliding surface and the opening surface is held regardless of a posture or a position of the shaft.

The invention comprises a flapper check valve assembly in which a flapper coated with an elastomeric seal is pivotably attached to a swing arm, and further in which the swing arm is pivotably attached to a retainer ring permitting two degrees of freedom of motion. The retainer ring is mounted in a check valve body. A novel mounting of the flapper to the swing arm ensures the flapper seals the pipeline against backflow.

A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.