In a connection mechanism that connects a valve shaft to air cylinders, shake prevention mechanisms are disposed at facing portions at which outer side surfaces of side frames face inner side surfaces of housings of the air cylinders and/or facing portions at which inner side surfaces and of the side frames face left-hand and right-hand side surfaces of a center frame. The shake prevention mechanisms include a sliding member that is disposed on a sliding surface that is formed on one of two surfaces that face each other and on the other and a spring mechanism that presses the sliding member in a direction in which the sliding member comes into contact with the sliding surface.

An embodiment includes a gate valve comprising: a valve body including a cavity coupled to a channel having proximal and distal portions; a gate to seal and unseal the channel; proximal and distal seats adjacent the gate; wherein (a) the proximal seat traverses towards the gate and stops at a first position when the gate is closing and the proximal channel portion is more highly pressurized than the cavity, and (b) the distal seat slides away from the gate and stops at a second position when the gate is closing and the cavity is more heavily pressurized than the distal channel portion. Other embodiments are described herein.

An embodiment includes a gate valve comprising: a valve body including a cavity coupled to a channel having proximal and distal portions; a gate to seal and unseal the channel; proximal and distal seats adjacent the gate; wherein (a) the proximal seat traverses towards the gate and stops at a first position when the gate is closing and the proximal channel portion is more highly pressurized than the cavity, and (b) the distal seat slides away from the gate and stops at a second position when the gate is closing and the cavity is more heavily pressurized than the distal channel portion. Other embodiments are described herein.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.

A slide valve having a valve disc that is slidably movable between a fully-retracted fully-open position and a fully-extended fully-closed tight shutoff position by an actuating stem. The actuating stem is flexibly coupled to the valve disc. The valve disc is selectively modulated between the fully-extended fully-closed tight shutoff position and a partially-retracted non-tight shutoff position to prevent sticking of the valve disc in the fully-extended fully-closed tight shutoff position.

Turbo or super charged intake tract diverter valve system, upstream of a throttle valve, includes a closure means (10) for a diversion aperture (4.1) in the intake tract (3) to vent pressurised gases within to a bypass path or atmosphere; the closure means having a transfer aperture (12) facilitating a net force due to a pressure differential on its opposite sides of the closure means (10) so as to close or keep closed the diversion aperture (4.1). When gas pressure on opposite sides of the closure means is equal, and when an upstream side (10.1) of the closure means (10) has a pressure greater than a downstream side (5.1), then it will open the diversion aperture (4.1). An actuation means opens a control aperture (6) to create the necessary pressure differential on the closure means (10) to thereby cause same to open the diversion aperture (4.1).

A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.

A slide valve having a valve disc that is slidably movable between a fully-retracted fully-open position and a fully-extended fully-closed tight shutoff position by an actuating stem. The actuating stem is flexibly coupled to the valve disc. The valve disc is selectively modulated between the fully-extended fully-closed tight shutoff position and a partially-retracted non-tight shutoff position to prevent sticking of the valve disc in the fully-extended fully-closed tight shutoff position.

A valve plate has a plate portion with an elastomeric seal on a front face and an elongated connecting portion spaced apart from a rear face by a slot for fastening the valve plate to a valve rod. The extension of the connecting portion in the width direction is defined by opposing first and second side edges of the connecting portion when viewed in a plan view of the rear face of the plate portion. A connecting structure is configured in the connecting portion in a central region of the longitudinal extension of the first side edge of the connecting portion for connecting the connecting portion to an end portion of the valve rod. The connecting portion is reinforced in a region of its extension in the width direction adjoining the second side edge, relative to a region of its extension in the width direction adjoining the first side edge.

To avoid formation of surface sag formed when an internal flow path of a valve element is processed and to ensure a maximum flow rate in a fluid control valve where a seating surface of the valve element is formed of a resin layer, in a fluid control valve that includes a valve seat, and a valve element including resin layers provided in concave grooves formed on a facing surface facing the valve seat, the valve element further includes internal flow paths whose inflow ports are opened in a back surface facing away from the facing surface and whose outflow ports are opened in portions around the concave grooves on the facing surface, and counterbored portions are formed on sides of the inflow ports of the internal flow paths.