A fluid supply system for a machine such as an internal combustion engine includes a shutoff valve having an electrical actuator that includes a solenoid subassembly, and a stabilizer for the electrical valve actuator. The stabilizer includes a fitting structured to couple the shutoff valve to adjacent hardware in the fluid supply system, and a strongarm extending between the fitting and the solenoid assembly and clamped to the solenoid subassembly. A vibration-damping reinforced grommet may be clamped between the solenoid subassembly and the clamp.

A gate valve device includes a cleaning component, a first lifting component, and a second lifting component. The cleaning component is arranged on the second lifting component. The first lifting component is configured to control whether an opening on a side of a vacuum chamber close to a swing gate valve is in a closed state. The second lifting component is configured to, in a case that the opening on the side of the vacuum chamber close to the swing gate valve is in the closed state, control the cleaning component to clean the swing gate valve.

A gate valve device includes a cleaning component, a first lifting component, and a second lifting component. The cleaning component is arranged on the second lifting component. The first lifting component is configured to control whether an opening on a side of a vacuum chamber close to a swing gate valve is in a closed state. The second lifting component is configured to, in a case that the opening on the side of the vacuum chamber close to the swing gate valve is in the closed state, control the cleaning component to clean the swing gate valve.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.

A device and system for regulating the flow of a fluid, comprising: a fluid flow controller; wherein the fluid flow controller comprises: a fluid flow control component and an electronic controller; wherein the fluid flow control component is configured to allow at least two different flow rates of a fluid to pass through the fluid flow controller; and wherein the electronic controller controls the fluid flow controller component, such that the fluid flow controller component operatively switches between the at least two different flow rates.

A compressed air conduit can have a cross-sectional area, and a valve, the valve having at least one arm being deployable laterally into the cross-sectional area of the conduit to restrict flow within the conduit.

A compressed air conduit can have a cross-sectional area, and a valve, the valve having at least one arm being deployable laterally into the cross-sectional area of the conduit to restrict flow within the conduit.

The engine shut-off valve system includes a housing, a gate member, a rotating lever, a locking piston assembly, and a closing piston assembly. The system is installed in fluid connection with a flow line so that air flow passes through a passageway in the housing with the gate member in the locked configuration. The air flow through the passageway stops with the gate member in the closed configuration. The gate member has an asymmetry so that the forces of the spring of the closing piston assembly and the spring of the locking piston assembly are cooperative to actuate between the closed configuration and the locked configuration, while wearing on the gate member differently so as to extend the working life of the valve system. The closing piston assembly and the locking piston assembly are separately accessible for maintenance.

An actuation system for a valve is disclosed. The actuation system comprises a housing having an end wall. A first piston and a second piston is slidably positioned within the housing. The second piston is positioned between the first piston and the end wall. A piston rod is coupled to the first piston and slidably extends through the second piston and the end wall. The piston rod is configured to be coupled with the valve. A first spring is arranged between the first piston and the second piston. Further, a second spring is arranged between the second piston and the end wall. The first spring and the second spring are configured to bias the valve to a closed position.