The invention relates to a hydraulic proof test assembly comprising at least a valve (1) with parallel seats (102). It comprises: a shut-off member (2) with parallel plates (20, 21), connected by connecting means for regulating their separation, to make them go from a first position in which this separation is sufficient to enable the shut-off member (2) to be introduced into said valve (1) to a second position where said separation is greater, this separation making it possible to apply them firmly against said parallel seats (102); a device (3) for inserting said shut-off member (2) into said valve (1) which comprises at least a “U” shaped tool, configured to be introduced into said valve (1), its parallel arms forming guides, while its base forms a support for retaining said shut-off member (2); a “dummy stem” (4).

In a connection mechanism that connects a valve shaft to air cylinders, shake prevention mechanisms are disposed at facing portions at which outer side surfaces of side frames face inner side surfaces of housings of the air cylinders and/or facing portions at which inner side surfaces and of the side frames face left-hand and right-hand side surfaces of a center frame. The shake prevention mechanisms include a sliding member that is disposed on a sliding surface that is formed on one of two surfaces that face each other and on the other and a spring mechanism that presses the sliding member in a direction in which the sliding member comes into contact with the sliding surface.

In accordance with at least one aspect of this disclosure, a flow control device can include, a first plate having one or more windows defining a flow path therethrough, a second plate configured to abut the first plate, and an actuator operatively connected to one or more of the first plate and/or the second plate. The actuator can be configured to drive the first plate and/or the second plate relative to one another to enlarge or reduce the flow path through the one or more windows in the first plate.

A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

A CVD reactor includes a gas-tight and evacuatable reactor housing and an inner housing arranged therein. The inner housing has means for the infeed of a process gas and means for holding a substrate for treatment in the inner housing by means of the process gases. The inner housing also has a loading opening which can be closed off by a sealing element of a closure element. In its closure position, the closure element bears with an encircling sealing zone against a counterpart sealing zone which encircles the loading opening on the outer side of the inner housing. The sealing element is fastened to a carrier as to be adjustable in terms of inclination and/or pivotally movable about at least one spatial axis (X, Y, Z) and/or so as to be elastically deflectable in the direction of one of the spatial axes (X, Y, Z).

A CVD reactor includes a gas-tight and evacuatable reactor housing and an inner housing arranged therein. The inner housing has means for the infeed of a process gas and means for holding a substrate for treatment in the inner housing by means of the process gases. The inner housing also has a loading opening which can be closed off by a sealing element of a closure element. In its closure position, the closure element bears with an encircling sealing zone against a counterpart sealing zone which encircles the loading opening on the outer side of the inner housing. The sealing element is fastened to a carrier as to be adjustable in terms of inclination and/or pivotally movable about at least one spatial axis (X, Y, Z) and/or so as to be elastically deflectable in the direction of one of the spatial axes (X, Y, Z).

A valve actuating assembly is provided that comprises a cam holder positioned within a valve body of an internal valve, a cam operably coupled to the cam holder and configured to engage a valve stem of the internal valve for moving the internal valve between a first position and a second position, and an actuating shaft extending through at least a portion of the valve body, rotation of the actuating shaft causing rotation of the cam holder and the cam, wherein the actuating shaft is removably coupled to the cam holder such that the actuating shaft can be decoupled from the cam holder and removed from the valve body, the cam holder and the cam being configured to remain positioned within the valve body when the actuating shaft is decoupled from the cam holder and removed from the valve body.

A sealing apparatus includes a moveable seal holder with a cavity and includes a seal assembly disposed at least partially in the cavity. The seal assembly includes a resilient seal member including a fluid-facing end with a fluid-facing end surface, and the seal assembly includes an actuator plate configured to reciprocate between a first and a second position relative to the protective plate. The first actuator plate includes a fluid-facing end surface and a first camming surface. The seal assembly further includes a first protective plate disposed between the seal member and the first actuator plate. The actuator plate is configured to compress the seal member and to move the fluid-facing end surface of the seal member outward from a resting position when the actuator plate is in the second position.

A sealing apparatus includes a moveable seal holder with a cavity and includes a seal assembly disposed at least partially in the cavity. The seal assembly includes a resilient seal member including a fluid-facing end with a fluid-facing end surface, and the seal assembly includes an actuator plate configured to reciprocate between a first and a second position relative to the protective plate. The first actuator plate includes a fluid-facing end surface and a first camming surface. The seal assembly further includes a first protective plate disposed between the seal member and the first actuator plate. The actuator plate is configured to compress the seal member and to move the fluid-facing end surface of the seal member outward from a resting position when the actuator plate is in the second position.