Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a first gate, a second gate, a gate connector coupled to the first gate and to the second gate, and actuator coupled to the gate connector. The actuator is configured to seal the first gate against a first slot or open the first slot via vertical motion. The actuator is also configured to seal the second gate against a second slot or open the second slot via a combination of vertical motion and horizontal motion.

A sealing ring made of an elastomer material is fitted on the front side of an essentially rectangular valve plate for sealing a vacuum valve opening. On the rear side, the valve plate has a recess with an undercut boundary wall which forms a sloping surface which, for fastening the valve plate on a carrier, is braced with a sloping surface of the carrier. The valve plate has a lug which protrudes beyond the rear side thereof and has a through-passage bore through which a clamping screw is screwable into a threaded bore of the carrier, for bracing the valve plate sloping surface with the carrier sloping surface. In a side view of the valve plate, seen parallel to the longitudinal sides, the straight-line extension of the longitudinal center axis of the through-passage bore runs past the sloping surface at a distance from the rear side of the valve plate.

An irrigation valve comprises a housing including a chamber, a fluid inlet comprising a fluid inlet passage configured to fluidly communicate with a first conduit, wherein the fluid inlet is configured to communicate fluid from the first conduit to the chamber, a fluid outlet comprising a fluid outlet passage configured to fluidly communicate with a second conduit, wherein the fluid outlet is configured to communicate fluid from the chamber to the second conduit, a rigid substrate and a stretchable, compressible and/or flexible membrane on a surface of the rigid substrate, wherein the rigid substrate is configured to be positioned so that the membrane is located between the fluid inlet and the fluid outlet when the valve is in a closed position, and wherein a fluid pressure within the chamber causes the membrane to seal a first orifice of the fluid outlet passage when the valve is in the closed position.

A valve member driving device capable of bidirectional movement includes: a main body with two gas chambers, a first gas-inlet opening, a first gas-inlet channel, a second gas-inlet opening, and a second gas-inlet channel; a first piston rod with a first flow passage; a second piston rod with a second flow passage; a first guide rod extending into the first flow passage at one end and having a gas socket and a gas hole in communication with the gas socket; a second guide rod extending into the second flow passage at one end and having a gas-guiding flow passage; a valve cylinder fixedly provided on the first piston rod and having a valve-cylinder gas chamber, an advance channel, a withdrawal channel, and a valve-cylinder piston rod; and a valve member fixedly provided on the valve-cylinder piston rod.

A valve (1) having at least one closure member (2) for closing a valve opening (3) and at least one valve rod (4), at least one first connecting section (5) being provided in or on the valve rod (4), at least one second connecting section (6) being provided in or on the closure member (2), and the closure member being fastenable or fastened to the valve rod by the connection of the first connecting section to the second connecting section. The first connecting section (5) and/or the second connecting section (6) has/have at least one pressure chamber (8) for a fluid, this chamber being delimited by at least one elastically deformable boundary wall (7) and the boundary wall can be elastically deformed by the fluid provided in the pressure chamber (8) in order to form a clamped connection of the first connecting section (5) to the second connecting section (6).

A first opening and closing mechanism, which includes a first cam groove and a first cam roller and which causes a valve assembly to reciprocate between an intermediate position and a first closed position, and a second opening and closing mechanism, which includes a second cam groove and a second cam roller and which causes the valve assembly to reciprocate between the intermediate position and a second closed position, are provided so as to be operable separately, the first and second opening and closing mechanisms being disposed adjacent to each other in a thickness direction D of a gate valve.

A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.

A valve comprises: a housing defining a chamber; a fluid outlet defined by a fluid outlet wall; and a first fluid outlet orifice and a second fluid outlet orifice comprising a rigid seat. The valve comprises a movable gate, that is flexible and/or compressible and impermeable. The moveable gate is more flexible than the rigid seat, has a planar surface, and is configured to slidably move in a first axis. The movable gate is configured to be positioned so that it is located between a fluid inlet orifice and the second fluid outlet orifice when the valve is in a closed position, wherein fluid pressure within the chamber causes the movable gate to seal the second fluid outlet orifice via the rigid seat, and not the fluid inlet orifice. The valve may employ gate shapes that generate and/or exploit Bernoulli effect forces when fluid passes though the valve.

A check valve bleed assembly eliminates the requirement for a person to enter the red zone when bleeding the grease out of a gate or other valve. A gas or other fluid is provided to the check valve bleed assembly. The gas or other fluid acts upon the surface driving a pin into the associated check valve with sufficient force to overcome the resistance of the object sitting on a seat and moves the object off of the seat. The force is maintained as long as is necessary. Usually, the check valve is held open until the gate transitions into the gate's associated gate recess thereby displacing the grease within the gate recess through the check valve, into the check valve bleed assembly, and finally to a waste collection tube. In some embodiments a gate valve greasing access port is included in the check valve bleed assembly such that grease may be injected into the check valve bleed assembly.

The invention relates to a hydraulic proof test assembly comprising at least a valve (1) with parallel seats (102). It comprises:

a shut-off member (2) with parallel plates (20, 21), connected by connecting means for regulating their separation, to make them go from a first position in which this separation is sufficient to enable the shut-off member (2) to be introduced into said valve (1) to a second position where said separation is greater, this separation making it possible to apply them firmly against said parallel seats (102);

a device (3) for inserting said shut-off member (2) into said valve (1) which comprises at least a “U” shaped tool, configured to be introduced into said valve (1), its parallel arms forming guides, while its base forms a support for retaining said shut-off member (2);

a “dummy stem” (4).