A displacement magnifying mechanism, polishing device, actuator, electronic component processing apparatus, dispenser, and air valve which can easily control a drive system. The displacement magnifying mechanism includes a base; a piezoelectric element of which an end is attached to a mounting surface of the base, the piezoelectric element extending along a first longitudinal direction; a support member of which an end is attached to the mounting surface side by side with the piezoelectric element, the support member extending along a second longitudinal direction which intersects with the first longitudinal direction; an operating portion attached to each of other ends of the piezoelectric element and the support member to allow the operating portion to be displaced, in response to an expansion/contraction of the piezoelectric element, along a displacement direction; and a compression member attached to the base and the operating portion so as to compress the piezoelectric element.

A linear valve drive for connection to a valve body which has a valve seat is described, wherein said linear valve drive comprises a drive housing, a valve closure element and a piezoelectric actuator which is arranged within said drive housing. Said valve closure element is displaceable in the axial direction between an open position and a closed position by means of said piezoelectric actuator and an interposed actuating device. Said piezoelectric actuator is supported on said actuating device via its side directed towards the valve closure element. Said linear valve drive comprises an adjusting device which is configured such that an idle stroke of said linear valve drive is adjustable. A valve is also described.

A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.

The invention relates to a shut-off valve (1) for a pressurized-gas vessel, comprising a valve closing body (2) which can perform stroke movements and which is preloaded by the spring force of a closing spring (3) against a valve seat (4), such that, when the valve closing body (2) is in a closed position, a connection of a valve inlet (5) to a valve outlet (6) is shut off, and furthermore comprising an actuator arrangement (7) for opening the valve closing body (2). According to the invention, the actuator arrangement (7) interacts with an actuating element (8) which is arranged spaced apart from and coaxial with respect to the valve closing body (2) and which is movable by means of the actuator arrangement (7) in the direction of the valve closing body (2), such that, when the actuating element (8) abuts against the valve closing body (2), an opening impulse can be generated. The invention furthermore relates to a pressurized-gas vessel having a shut-off valve (1) according to the invention.

A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.

A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

A piezoelectric valve includes: a valve main part including a gas pressure chamber receiving compressed gas supplied from outside; a plate inside the valve main part, and an actuator fixed to the plate and inside the valve main part, which is a case with an opening on a front surface. The plate includes a gas discharge path and a valve seat coming into contact with a valve element of the actuator opening and closing the gas discharge path. A lid member that closes the opening of the case has a gas discharge opening communicating with the gas discharge path of the plate; is welded and fixed to a front surface of the plate, where the gas discharge path opens, on an annular welded part surrounding the gas discharge opening; and is welded and fixed to an end surface of the case on an annular welded part on the outer peripheral part.

In order to provide a piezo valve in which it is possible to accurately predict the remaining lifespan of a piezo actuator, there are provided a valve seat, a valve body that is able to move between a fully closed position in contact with the valve seat and a fully open position, a piezo actuator that drives the valve body, a drive circuit that receives an input signal, and outputs to the piezo actuator a corresponding drive voltage, and a leakage current detector that, when the drive circuit outputs a voltage equal to or greater than a maximum rated voltage that drives the valve body to the fully closed/open position, detects leakage current from the piezo actuator. When the leakage current is detected or in a state immediately prior to detection, a fluid is flowing between the valve seat and the valve body.

A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.