Provided is a flow rate regulating device including a valve body section having a flat valve body surface; a main body section including a valve chamber, an inflow channel, an outflow channel, and a communication channel; a valve seat section having a flat valve seat surface provided around an inflow opening; a regulation mechanism that moves the valve body section along an axis to regulate a distance between the valve body surface and the valve seat surface; and a control unit that controls the regulation mechanism so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, wherein a channel cross-sectional area of the communication channel is smaller than each of a channel cross-sectional area of the inflow channel and a channel cross-sectional area of the outflow channel.

A fluid shut-off device has a valve body delimiting an inlet duct and an outlet duct and having an intermediate portion delimiting an intermediate chamber that provides fluid connection between the inlet and outlet ducts. The inlet duct has an inlet duct connection edge. The intermediate chamber has a sealing surface and accommodates a diaphragm having a diaphragm sealing portion that in a closing position of the inlet duct, cooperates, by a diaphragm support surface, with the sealing surface to occlude the inlet duct. The diaphragm has a diaphragm bending portion permanently connecting the diaphragm sealing portion to the valve body to exclusively operate under bending. The diaphragm sealing portion delimits a diaphragm seat. A control element has a control stem with predetermined transverse control stem dimension and integrally received in the diaphragm seat, which transmits movement to the diaphragm sealing portion at least between the closing position and an opening position of the inlet duct.

The present inventive concept relates to a block valve for a substrate processing device, and a substrate processing device, the block valve comprising: a valve part having a contracting and expanding opening and closing part; a drive part which drives the opening and closing part; and a block body which comprises an accommodating part in which the opening and closing part is accommodated, wherein the block body comprises a gas inflow port connected to the accommodating part and a gas outflow port connected to the accommodating part, and the opening and closing part opens and closes the gas inflow port or the gas outflow port, within the accommodating part.

The present inventive concept relates to a block valve for a substrate processing device, and a substrate processing device, the block valve comprising: a valve part having a contracting and expanding opening and closing part; a drive part which drives the opening and closing part; and a block body which comprises an accommodating part in which the opening and closing part is accommodated, wherein the block body comprises a gas inflow port connected to the accommodating part and a gas outflow port connected to the accommodating part, and the opening and closing part opens and closes the gas inflow port or the gas outflow port, within the accommodating part.

A valve for controlling a molten liquid includes an expansion port in liquid communication with an internal volume of the valve that is filled with the molten liquid. An expansion valve can be opened during unfreezing of the valve, to allow melting process substance to expand out of the internal volume into an expansion line as it is melted. During initialization of the valve, an inert gas source, pressure regulator, and ultrasonic transition level sensor can be used to establish a liquid/gas interface at a desired height within the expansion line. The valve can include a multi-zone heater, wherein a first of the zones is adjacent the expansion port, so that during unfreezing, after the first zone has been melted, the remaining zones can be sequentially activated in an order that ensures that each zone is activated only after an adjacent zone has been melted.

Vacuum machining system (1), comprising a vacuum chamber (10) and a vacuum regulating valve (20). The vacuum valve (20) has a first valve seat (21a), which has a first valve opening (22a) defining a first opening axis (O) and a first sealing surface extending around the first valve opening (O), and a first valve plate (23a) with a first contact surface corresponding to the first sealing surface. The vacuum machining system further comprises a drive unit (30), which is designed in such a way and is coupled to the first valve plate (23a) in such a way that the latter can be moved at least from an open position to a closed position and back again. The first valve seat (21a) is arranged within the vacuum chamber (10) and divides the vacuum chamber (10) into a main process chamber (11) for machining the substrate and into a secondary process chamber (12). The first sealing surface extends orthogonally to the first opening axis (O) and points in the direction of the secondary process chamber (12). The first valve plate (23a) is movably arranged in the secondary process chamber (12).

An expansion valve includes: a main body portion having a valve chamber and a valve seat; a valve body configured for moving forward and backward relative to the valve seat; a case fixed to the main body portion; an excitation portion; a rotor that is driven to rotate by the excitation portion; and a forward and backward moving mechanism that converts a rotational movement of the rotor into a linear movement to move the valve body forward and backward. The valve chamber has a bellows housed therein externally mounted on the valve body and configured for expanding and contracting in association with the forward and backward movement of the valve body, and a space between the bellows and the valve body is held in a vacuum state.

An expansion valve includes: a main body portion having a valve chamber and a valve seat; a valve body configured for moving forward and backward relative to the valve seat; a case fixed to the main body portion; an excitation portion; a rotor that is driven to rotate by the excitation portion; and a forward and backward moving mechanism that converts a rotational movement of the rotor into a linear movement to move the valve body forward and backward. The valve chamber has a bellows housed therein externally mounted on the valve body and configured for expanding and contracting in association with the forward and backward movement of the valve body, and a space between the bellows and the valve body is held in a vacuum state.

A valve (1) for fluids, preferably for gases, comprises an inlet passage (2); an outlet passage (3); a shutter (4) interposed between the inlet passage (2) and the outlet passage (3) and movable between an open position and a closed position; actuating means (26,27). The valve (1) also comprises actuating means (26,27) operatively active on the shutter (4), which comprises an electromagnet (26) and a ferromagnetic element (27) that is movable as a function of the field generated by the electromagnet (26) for displacing the shutter (4) along the movement direction (L). In particular, the actuating means comprises a tubular body (5) made of non-magnetic material in which the ferromagnetic body (27) is inserted.

A valve configured to control a flow of a process fluid includes a pair of packing seals separated by a seal gap space along a linear valve stem of the valve, and a pressurization port that can be used to apply a pressurizing fluid, such as nitrogen gas, to the seal gap at a gap pressure that is higher than the process fluid pressure, thereby ensuring that any leakage past the packing seals will be of pressurizing fluid into the process fluid and/or into the environment, and that no process fluid will escape into the environment. The pressure or flow rate of the pressurizing fluid can be monitored to detect and quantify any pressurization fluid leakage past either of the packing seals, so that a maintenance action can be applied to the valve, such as re-tightening or replacing at least one of the packing seals, or replacing the valve.