An apparatus for vacuumizing and sealing a package includes a plurality of platens and vacuum chambers, each chamber adapted to mate with a dedicated one of the platens; a conveying system for conveying the platens and chambers along a generally angular path having a single axis of rotation; an automated loading assembly having a linear component and configured to load a package onto each of the platens; an automated unloading assembly having a linear portion and configured to unload a vacuumized, sealed package from each loaded platen onto an outfeed conveyor; and a vacuumizing/sealing system configured to cause relative movement of each chamber/platen pair, along a portion of the angular path, to form therebetween an air-tight enclosure accommodating the package and effect vacuumization and sealing of the package.

The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.

The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.

The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.

An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.

An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.

A flow rate adjustment valve includes: a flow path portion which has one end at which an opening is formed, and in which a fluid flows; a lifting valve which is configured to close the opening by covering an entire region of the opening, open the opening by being separated from the opening in an opening direction of the opening, and change a distance from the opening in the opening direction to change a flow area with respect to the opening; and a servo actuator as a driver which moves the lifting valve in the opening direction based on a predetermined detection value.

A sealing ring made of an elastomer material is fitted on the front side of an essentially rectangular valve plate for sealing a vacuum valve opening. On the rear side, the valve plate has a recess with an undercut boundary wall which forms a sloping surface which, for fastening the valve plate on a carrier, is braced with a sloping surface of the carrier. The valve plate has a lug which protrudes beyond the rear side thereof and has a through-passage bore through which a clamping screw is screwable into a threaded bore of the carrier, for bracing the valve plate sloping surface with the carrier sloping surface. In a side view of the valve plate, seen parallel to the longitudinal sides, the straight-line extension of the longitudinal center axis of the through-passage bore runs past the sloping surface at a distance from the rear side of the valve plate.

A sealing ring made of an elastomer material is fitted on the front side of an essentially rectangular valve plate for sealing a vacuum valve opening. On the rear side, the valve plate has a recess with an undercut boundary wall which forms a sloping surface which, for fastening the valve plate on a carrier, is braced with a sloping surface of the carrier. The valve plate has a lug which protrudes beyond the rear side thereof and has a through-passage bore through which a clamping screw is screwable into a threaded bore of the carrier, for bracing the valve plate sloping surface with the carrier sloping surface. In a side view of the valve plate, seen parallel to the longitudinal sides, the straight-line extension of the longitudinal center axis of the through-passage bore runs past the sloping surface at a distance from the rear side of the valve plate.