A drive unit for a gate valve controls a flow rate of fluid passing through an opening in a valve seat by forward and backward moving a valve plate against the opening in the valve seat. This drive unit includes a shaft connected to the valve plate, a linear motor for driving the shaft and drive control means to control the drive of the linear motor. The linear motor has a plurality of coils for generating a magnetic field by electric current and a permanent magnet assembly to react to the magnetic field generated by the plurality of coils. The plurality of coils forms a stator while the permanent magnet assembly is connected to the shaft and displaced together with the shaft to form a mover to forward and backward move the valve plate. Each of the plurality of coils is connected to its own control circuit and the drive control means individually controls the current flowing through each of the plurality of coils via the control circuit. The drive control means may be provided with a linear encoder to detect the current position of the permanent magnet assembly.

In a connection mechanism that connects a valve shaft to air cylinders, shake prevention mechanisms are disposed at facing portions at which outer side surfaces of side frames face inner side surfaces of housings of the air cylinders and/or facing portions at which inner side surfaces and of the side frames face left-hand and right-hand side surfaces of a center frame. The shake prevention mechanisms include a sliding member that is disposed on a sliding surface that is formed on one of two surfaces that face each other and on the other and a spring mechanism that presses the sliding member in a direction in which the sliding member comes into contact with the sliding surface.

A mass spectrometer is disclosed comprising a rotatable isolation valve 1 having a curved, spherical, cylindrical or concave portion. At least a portion of an ion guide 2 is positioned so as to extend within a swept volume of the isolation valve 1 enabling the ion guide 2 to be positioned close to a second downstream ion guide 3 and for ions to be transmitted from the first 2 ion guide to the second ion guide 3 with high ion transmission efficiency.

A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.

A CVD reactor includes a gas-tight and evacuatable reactor housing and an inner housing arranged therein. The inner housing has means for the infeed of a process gas and means for holding a substrate for treatment in the inner housing by means of the process gases. The inner housing also has a loading opening which can be closed off by a sealing element of a closure element. In its closure position, the closure element bears with an encircling sealing zone against a counterpart sealing zone which encircles the loading opening on the outer side of the inner housing. The sealing element is fastened to a carrier as to be adjustable in terms of inclination and/or pivotally movable about at least one spatial axis (X, Y, Z) and/or so as to be elastically deflectable in the direction of one of the spatial axes (X, Y, Z).

Vacuum machining system (1), comprising a vacuum chamber (10) and a vacuum regulating valve (20). The vacuum valve (20) has a first valve seat (21a), which has a first valve opening (22a) defining a first opening axis (O) and a first sealing surface extending around the first valve opening (O), and a first valve plate (23a) with a first contact surface corresponding to the first sealing surface. The vacuum machining system further comprises a drive unit (30), which is designed in such a way and is coupled to the first valve plate (23a) in such a way that the latter can be moved at least from an open position to a closed position and back again. The first valve seat (21a) is arranged within the vacuum chamber (10) and divides the vacuum chamber (10) into a main process chamber (11) for machining the substrate and into a secondary process chamber (12). The first sealing surface extends orthogonally to the first opening axis (O) and points in the direction of the secondary process chamber (12). The first valve plate (23a) is movably arranged in the secondary process chamber (12).

Vacuum machining system (1), comprising a vacuum chamber (10) and a vacuum regulating valve (20). The vacuum valve (20) has a first valve seat (21a), which has a first valve opening (22a) defining a first opening axis (O) and a first sealing surface extending around the first valve opening (O), and a first valve plate (23a) with a first contact surface corresponding to the first sealing surface. The vacuum machining system further comprises a drive unit (30), which is designed in such a way and is coupled to the first valve plate (23a) in such a way that the latter can be moved at least from an open position to a closed position and back again. The first valve seat (21a) is arranged within the vacuum chamber (10) and divides the vacuum chamber (10) into a main process chamber (11) for machining the substrate and into a secondary process chamber (12). The first sealing surface extends orthogonally to the first opening axis (O) and points in the direction of the secondary process chamber (12). The first valve plate (23a) is movably arranged in the secondary process chamber (12).

Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.

Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.

An apparatus for vacuumizing and sealing a package includes a plurality of platens and vacuum chambers, each chamber adapted to mate with a dedicated one of the platens; a conveying system for conveying the platens and chambers along a generally angular path having a single axis of rotation; an automated loading assembly having a linear component and configured to load a package onto each of the platens; an automated unloading assembly having a linear portion and configured to unload a vacuumized, sealed package from each loaded platen onto an outfeed conveyor; and a vacuumizing/sealing system configured to cause relative movement of each chamber/platen pair, along a portion of the angular path, to form therebetween an air-tight enclosure accommodating the package and effect vacuumization and sealing of the package.