F16K7/14

PREVENTING AN OVER PRESSURE CONDITION WITH A MECHANICAL SHUTDOWN VALVE

A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

PREVENTING AN OVER PRESSURE CONDITION WITH A MECHANICAL SHUTDOWN VALVE

A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

FLUID CONTROL VALVE WITH SENSOR
20180003317 · 2018-01-04 · ·

A fluid control valve includes a valve main body and a vibration sensor. The valve main body has an actuator section and a valve section. The sensor detects vibration generated in the valve main body. The vibration is generated by a water hammer phenomenon. The water hammer phenomenon generates impact when the valve element comes into contact with the valve seat and no fluid leaks between a valve element and a valve seat. The fluid control valve further includes a controller to execute an abnormality determining program and determines the valve main body to be normal when the sensor detects the vibration with an amplitude exceeding the predetermined threshold, while determines the valve main body to be abnormal when the sensor does not detect the vibration with an amplitude exceeding the predetermined threshold.

DIAPHRAGM VALVE, FLOW CONTROL DEVICE, FLUID CONTROL DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
20230003306 · 2023-01-05 · ·

A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.

FLUID-DYNAMIC DEVICE WITH INTEGRATED SENSOR ELEMENT

A fluid-dynamic device with integrated sensor element includes a first chamber suitable for the containment and/or the passage of a fluid, provided with an inlet opening operatively connectable to a fluid-dynamic circuit and configured to allow a fluid to enter the first chamber, and with a separate outlet opening, operatively connectable to a fluid-dynamic circuit and configured to expel said fluid from the first chamber. The first chamber includes at least one portion elastically deformable due to the action of the fluid contained therein and/or passing through the first chamber, to which a sensor element is associated which is sensitive to the deformation of the elastically deformable portion of the first chamber.

FLUID-DYNAMIC DEVICE WITH INTEGRATED SENSOR ELEMENT

A fluid-dynamic device with integrated sensor element includes a first chamber suitable for the containment and/or the passage of a fluid, provided with an inlet opening operatively connectable to a fluid-dynamic circuit and configured to allow a fluid to enter the first chamber, and with a separate outlet opening, operatively connectable to a fluid-dynamic circuit and configured to expel said fluid from the first chamber. The first chamber includes at least one portion elastically deformable due to the action of the fluid contained therein and/or passing through the first chamber, to which a sensor element is associated which is sensitive to the deformation of the elastically deformable portion of the first chamber.

Foil transducer and valve
11508899 · 2022-11-22 · ·

A foil transducer for a valve, including at least one firmly arranged holding part, at least one displaceable force transmission part, an electroactive foil composite structure and at least two electrodes. The electroactive foil composite structure has an actuating direction in which the electroactive foil composite structure is extended on actuation. The actuating direction lies in a plane spanned by the electroactive foil composite structure.

Foil transducer and valve
11508899 · 2022-11-22 · ·

A foil transducer for a valve, including at least one firmly arranged holding part, at least one displaceable force transmission part, an electroactive foil composite structure and at least two electrodes. The electroactive foil composite structure has an actuating direction in which the electroactive foil composite structure is extended on actuation. The actuating direction lies in a plane spanned by the electroactive foil composite structure.

Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

MEMBRANE VALVE
20230030052 · 2023-02-02 ·

A membrane valve, with a valve housing, in which a housing interior is formed, in which housing interior a flexible control membrane is arranged. A drive plunger lies opposite a valve seat and the drive plunger has a shank body with a peripheral outer lateral surface. The outer lateral surface of the shank body of the drive plunger at least in the region of a guide section has a polygonally contoured prismatic shaping with a succession of outer side edges and outer side surfaces, wherein the edges and surfaces extend in the plunger longitudinal direction and the succession alternates in the circumferential direction of the drive plunger.