A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

A system and method for processing and detecting nucleic acids from a set of biological samples, comprising: a molecular diagnostic module configured to receive nucleic acids bound to magnetic beads, isolate nucleic acids, and analyze nucleic acids, comprising a cartridge receiving module, a heating/cooling subsystem and a magnet configured to facilitate isolation of nucleic acids, a valve actuation subsystem including an actuation substrate, and a set of pins interacting with the actuation substrate, and a spring plate configured to bias at least one pin in a configurations, the valve actuation subsystem configured to control fluid flow through a microfluidic cartridge for processing nucleic acids, and an optical subsystem for analysis of nucleic acids; and a fluid handling system configured to deliver samples and reagents to components of the system to facilitate molecular diagnostic protocols.

The invention relates to a substrate for testing samples, in particular cells or molecules, wherein the substrate comprises a fluid system comprising a sample chamber configured in the substrate for storing and testing samples and at least one liquid reservoir in fluid communication with the sample chamber, and wherein the substrate comprises a passive blocking element capable of assuming a closed position and an open position, wherein in the closed position a fluid exchange between the sample chamber and the liquid reservoir is blocked.

A flow channel assembly (200) of a fluid micro-injection device has a fluid seat (210), a nozzle mounting plate (240), a nozzle (220), a nozzle platen (250) and a fluid supply joint (230). The nozzle (220) is connected to the fluid seat (210) by the nozzle mounting plate (240). The nozzle platen (250) is connected with the nozzle mounting plate (240) to secure the nozzle (220). The fluid supply joint (230) and the fluid seat (210) are connected to control the fluid flowing to the nozzle (220).

Microvalve assemblies are disclosed that in some examples include a body including first and second ports and a body plate. The microvalve assemblies further include an actuator assembly including one or more exterior plates coupled to a stack. One of the one or more exterior plates contacts the body plate to form a seat and thereby restrict fluid flow from the first port to the second port, when the stack is not energized. Additionally, the actuator assembly is configured to, when the stack is energized, periodically generate a gap between the one of the one or more exterior plates and the body plate via near-field-acoustic-levitation (NFAL) to allow fluid flow through the first and second ports. Advantageously, the microvalves of this technology are relatively small and consume minimal power, thereby overcoming size and power limitations of existing valves, including pneumatic valve technologies.

The disclosed device may include a first layer of fluidic transducers and a second layer of fluidic transducers. Each transducer in the first layer may include a first electrode coupled to a first substrate of the first layer, a second electrode coupled to a second substrate of the first layer, and a fluid channel between the first and second electrodes of the first layer. Each transducer in the second layer may include a first electrode coupled to a first substrate of the second layer, a second electrode coupled to a second substrate of the second layer, and a fluid channel between the first and second electrodes of the second layer. The second layer of fluidic transducers may be positioned on the first layer of fluidic transducers. Various other methods, systems, and computer-readable media are also disclosed.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.

A valve includes a first plate, a second plate, a spacer disposed between the first plate and the second plate, and a flap movably disposed between the first plate and the second plate. The first plate includes a plurality of first apertures extending through said first plate and the second plate includes a plurality of second apertures extending through said second plate. The second apertures are substantially offset from the first apertures. The spacer forms a cavity between the first plate and the second plate and is in fluid communication with the first apertures and the second apertures. The flap has apertures substantially offset from the first apertures and substantially aligned with the second apertures, and the flap is operable to be motivated between said first and second plates in response to a change in direction of the differential pressure of the fluid across the valve.

A microfluidic check valve includes an inlet bore, an internal chamber, an outlet bore, and a disk freely movable in the chamber between an open position and a closed position. At the open position, the disk permits fluid to flow from the inlet bore, through the chamber, and to the outlet bore. At the closed position, the disk prevents fluid from flowing in the reverse direction from the chamber into the inlet bore. The check valve may be positioned in-line with a fluid conduit, and/or incorporated with various fluidic devices such as, for example, capillary tubes, fittings, and chromatography columns. The check valve is capable of withstanding high fluid pressures, while featuring a small swept volume, such as a nano-scale volume. The check valve may be utilized, for example, to prevent fluid back flow and isolate pressure pulses in fluid flow systems.

The present disclosure relates to method, system for microfluidic control. One or more embodiments of the disclosure relate to pneumatically actuated “lifting gate” microvalves and pumps. In some embodiments, a microfluidic control module is provided, which comprises a plurality of pneumatic channels and a plurality of lifting gate valves configured to be detachably affixed to a substrate. The plurality of lifting gate valves are aligned with at least one fluidic channel on the substrate when affixed to the substrate. Each of the valves comprises: a pneumatic layer, a fluidic layer, and a pneumatic displacement chamber between the pneumatic layer and the fluidic layer. The fluidic layer has a first side facing the pneumatic layer and a second side facing away from the pneumatic layer, wherein the second side has a protruding gate configured to obstruct a flow of the fluidic channel when the fluidic layer is at a resting state.