A device for transferring fluids between two elements arranged concentrically within one another, wherein there is a sleeve-shaped hollow-cylindrical first component arranged between the two elements having at least one through-hole for the fluid, wherein the first component is made of steel and sits in a first element, wherein the first component is prevented from turning around a symmetry axis of the first component by at least one safety element engaging form-fittingly in the first element, wherein the first element is at least partially made of a material having a greater coefficient of thermal expansion than the steel material, characterized by the fact that between the first component and the first element, a second hollow-cylindrical component is arranged concentric to the first component and that the second component is secured from turning around the symmetry axis by a safety element on the first element and the first component.

A device for transferring fluids between two elements arranged concentrically within one another, wherein there is a sleeve-shaped hollow-cylindrical first component arranged between the two elements having at least one through-hole for the fluid, wherein the first component is made of steel and sits in a first element, wherein the first component is prevented from turning around a symmetry axis of the first component by at least one safety element engaging form-fittingly in the first element, wherein the first element is at least partially made of a material having a greater coefficient of thermal expansion than the steel material, characterized by the fact that between the first component and the first element, a second hollow-cylindrical component is arranged concentric to the first component and that the second component is secured from turning around the symmetry axis by a safety element on the first element and the first component.

A manifold structure for a fluid reclamation apparatus incorporated into a hydraulic system having inner and outer fluid lines and with annular containment space between the inner and outer fluid lines for capturing fluid leaking from the inner fluid line, the manifold structure being connected to least one end the inner and outer fluid lines and contains a chamber for receiving leaked fluid from the annular space and including a manifold inner sleeve to which the inner fluid line is coupled, the inner sleeve being retained within a manifold outer sleeve to which the outer fluid line is coupled and having a lateral bore extending from the chamber and through the outer sleeve for delivering leaked fluid into a reclamation line and back into the hydraulic system, the inner sleeve being rotatably mounted within the outer sleeve by at least one O-ring seated in a groove around the inner sleeve and sealingly abutting the inner surface of the outer sleeve.

Provided is a substrate processing apparatus that includes: a rotary joint including a rotary unit that rotates together with the rotation of the head unit, a fixing unit that is provided around the rotary unit, and a sealing unit that seals a gap between the rotary unit and the fixing unit; and an outlet pipe through which the quenching water is discharged. A first flow passage through which a gas passes and a second flow passage through which the quenching water passes are formed in the rotary joint, and the second flow passage is isolated from the first flow passage by the sealing unit. One end of the outlet pipe communicates with an outlet port of the second flow passage of the rotary joint, and the other end of the outlet pipe is opened to atmosphere at a position lower than the outlet port of the second flow passage.

The disclosure describes a rotary device that includes a housing, a rotating machine component, a rotating member associated with the rotating machine component, a non-rotating member disposed within the housing adjacent the rotating member, and a sensor array disposed in the housing. The sensor array includes a plurality of sensing elements that are integrated with a control device and a wireless communication device. The wireless communication device is configured to communicate with a central control that is remotely located relative to the housing using electromagnetic waves.

The disclosure describes a rotary device that includes a housing, a rotating machine component, a rotating member associated with the rotating machine component, a non-rotating member disposed within the housing adjacent the rotating member, and a sensor array disposed in the housing. The sensor array includes a plurality of sensing elements that are integrated with a control device and a wireless communication device. The wireless communication device is configured to communicate with a central control that is remotely located relative to the housing using electromagnetic waves.

The invention refers to a joint for hydraulic connection, including: an upstream body; a downstream body; and a joining device with screw, extended along a hinging axis, which crosses in succession the upstream body and the downstream body rotatably coupling them with respect to said hinging axis; being further provided an adhesive interposed between thread and counter-thread of the joining device.

Each of mechanical seal devices 7 of a rotary joint 1 includes a first shaft side seal ring 71 and a second shaft side seal ring 72 attached to a shaft body 5, and a first case side seal ring 73 and a second case side seal ring 74 attached to a case body 2. The first shaft side seal ring 71 and the second shaft side seal ring 72 have contact surfaces 71b and 72b axially facing each other and coming into contact with each other, and grooves 421c and 421d for forming a second communication flow passage 42 connecting a second outer flow passage 32 and a second inner flow passage 62 are formed in both the contact surfaces 71b and 72b.

Each of mechanical seal devices 7 of a rotary joint 1 includes a first shaft side seal ring 71 and a second shaft side seal ring 72 attached to a shaft body 5, and a first case side seal ring 73 and a second case side seal ring 74 attached to a case body 2. The first shaft side seal ring 71 and the second shaft side seal ring 72 have contact surfaces 71b and 72b axially facing each other and coming into contact with each other, and grooves 421c and 421d for forming a second communication flow passage 42 connecting a second outer flow passage 32 and a second inner flow passage 62 are formed in both the contact surfaces 71b and 72b.

A rotary union that includes rotating and non-rotating machine components, each having a sealing ring, which can together form a mechanical face seal. A rotor disposed on the rotating machine component includes one or more magnets. A sensor array disposed in the housing includes a plurality of sensing elements that are integrated with a control device, a communication device, and a power storage device. The sensor array further includes a magnetic pickup coil disposed to closely overlap the outer periphery of the rotor. When the rotating machine component rotates, the magnet creates a rotating magnetic field that cooperates with the magnetic pickup coil to produce electrical power to operate the sensor array.