Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.

A check valve assembly for a supply pipe. The check valve assembly includes a hinge pin, a first flapper, and a second flapper. The first flapper is pivotally coupled to the second flapper with the hinge pin. The check valve assembly also includes a stopper located between the first flapper and the second flapper. The stopper is configured to limit movement of the first flapper and the second flapper. The check valve assembly further includes a plate assembly located downstream of the stopper. The plate assembly is configured to break vortices formed in a fluid flow across the first flapper and the second flapper.

A flow conditioning assembly comprising an integral elbow flow conditioner and a downstream flow conditioner. The elbow flow conditioner includes a pipe elbow with one or more flow conditioning elements. Each flow conditioning element includes one or more turning guides. Each turning guide is generally circular and radially spaced from one another and an inner surface of the elbow. Spaced vanes maintain the radial spacing of the turning guides. The vanes divide the radial space between the turning guides and pipe elbow into a plurality of flow channels that turn in generally the same direction as the inner surface of the pipe elbow. The downstream flow conditioner comprises a flow conditioning structure within a pipe element. The flow conditioning structure includes one or more flow guides of generally circular form radially spaced from one another and the pipe element. Spaced support vanes maintain the radial spacing of the flow guides.

Methods, systems, and devices for dissipating fluid velocity are described. An example apparatus for dissipating fluid velocity may include an elongated pipe configured to allow fluid to flow therethrough, the elongated pipe having a first end and a second end. The apparatus may include an inlet portion at the first end of the elongated pipe, an outlet portion at the second end of the elongated pipe, and a dissipation chamber between the inlet portion and the outlet portion. The dissipation chamber may be configured to reduce a velocity of a stream of the fluid along a direction from the inlet portion to the outlet portion, where a cross-sectional area of the dissipation chamber perpendicular to the direction from the inlet portion to the outlet portion is greater than a cross-sectional area of the inlet portion perpendicular to the direction from the inlet portion to the outlet portion.

A damping device, in particular for damping or preventing pressure impacts, like pulsations, in hydraulic supply circuits has a damping housing (1) surrounding a damping chamber with a fluid inlet (13) and a fluid outlet (15). A damping tube (21; 51) is located in the flow path between the damping inlet and outlet and has a branch opening (29; 73, 75, 77, 79, 81) passing through the tube wall and leading to a Helmholtz volume (27; 53, 55, 57, 59, 61) inside of the damping housing (1) forming a Helmholtz resonator in a region positioned inside of the length of the damping tube. A fluid filter (35) is arranged inside of the damping housing (1) in the flow path between the fluid inlet (13) and fluid outlet (15).

An integrated pressure and temperature reducing device, comprising a secondary steam pipe and a temperature and pressure reducing mechanism arranged within the secondary steam pipe; the temperature and pressure reducing mechanism comprises an upper valve cover and a spool; the spool is provided with a plurality of pressure reducing holes, and a valve stem is inserted at one end of the spool; an end of the valve stem which is close to the spool is provided with a water supply passage, an outer peripheral surface of the valve stem is provided with a plurality of water inlet holes which are in communication with the water supply passage; the other end of the spool is inserted with a temperature reducing water pipe, and an end of the temperature reducing water pipe which is close to the valve stem is provided with a water outlet passage.

A deresonated fluid system may include a pressurizable fluid line having distal, opposite line ends with the fluid line extending between the line ends. A source may be configured to apply variations in pressure of fluid in the fluid line having a frequency appropriate for producing a standing wave in the fluid line between the line ends. A fluid coupler having opposite first and second coupler ends may be attached to the fluid line in a medial portion of the fluid line between the line ends. A flow acceleration ramp may be formed about an inside of the first coupler end. An artificial acoustic shoulder may be formed about an inside of the second coupler end. The artificial acoustic shoulder may define a substantially central orifice in fluid communication with the flow acceleration ramp.

Disclosed is a vibration-reducing and noise-absorbing pipeline assembly with metamaterial characteristics. The assembly comprises a connecting component, a dispersion pipeline, and a flow pipeline, wherein the inner diameter of the dispersion pipeline gradually changes from small to large, and the dispersion pipeline comprises a small port and a large port. The dispersion pipeline further comprises a hose, which communicates with the interior of the flow pipeline. Fluid flows in the pipeline assembly from the connecting component to the dispersion pipeline, via a deflection portion and a guide portion, wherein with reference to a flow direction of the fluid, the deflection portion is located upstream of the guide portion, and the deflection portion is configured for changing the flow direction of the fluid, thus minimizing vibration of the pipeline assembly and damping resonance frequencies.

A connector assembly includes a main body having a fluid conduit extending therethrough. The connector assembly further includes a flow reducer insert positioned in the fluid conduit, and the flow reducer insert includes a plurality of channels defining flow paths through the conduit. The connector assembly further includes a collimator coupled to the main body, and the collimator includes a plurality of holes configured to provide a substantially columnated flow path.

A deresonated fluid system may include a pressurizable fluid line having distal, opposite line ends with the fluid line extending between the line ends. A source may be configured to apply variations in pressure of fluid in the fluid line having a frequency appropriate for producing a standing wave in the fluid line between the line ends. A fluid coupler having opposite first and second coupler ends may be attached to the fluid line in a medial portion of the fluid line between the line ends. A flow acceleration ramp may be formed about an inside of the first coupler end. An artificial acoustic shoulder may be formed about an inside of the second coupler end. The artificial acoustic shoulder may define a substantially central orifice in fluid communication with the flow acceleration ramp.