A method of manufacturing a semiconductor device includes disposing a gas-storage cylinder storing monochlorosilane within a gas supply unit. The monochlorosilane is supplied from the gas-storage cylinder into a process chamber to form a silicon containing layer therein. The gas-storage cylinder includes manganese.

One embodiment of the method includes: closing both the inlet valve and the outlet valve, connecting a cryogenic liquid source to the cryogenic liquid inlet conduit, and introducing cryogenic liquid into the cryogenic liquid inlet conduit; opening both the inlet valve and outlet valve, thereby introducing cryogenic liquid into the sampler vessel inner volume, the cryogenic liquid has a free surface; closing both the inlet valve and the outlet valve after cryogenic liquid flows from the purge tube; disconnecting the cryogenic liquid source from the cryogenic liquid inlet conduit; opening the inlet valve, thereby allowing cryogenic liquid to flow from the cryogenic liquid inlet conduit; and closing the inlet valve after the free surface in the sampler vessel inner volume drops below the top of the first cryogenic liquid level, and the cryogenic liquid flow stops.

A cryogenic liquid sampler is provided. The sampler includes an inner volume and a useful internal length, a cryogenic liquid inlet conduit in fluid connection with an inlet valve, a weir tube in fluid connection with the inlet valve, wherein the weir tube comprises at least one weir hole, wherein the weir tube extends a predetermined distance into the inner volume, a cryogenic liquid outlet conduit in fluid connection with inner volume and in fluid connection with an outlet valve, and a purge tube in fluid connection with the outlet valve.

Embodiments of vessels include personnel access provisions having welded or otherwise permanent connections that substantially reduce the potential for leakage into or out of the vessels by way of the personnel access provisions.

A gas container having coating on the inner side that is applied directly onto a base material (110) of the gas container. The coating has a plurality of layers of at least one coating material that may be produced by an ALD method.

A vacuum supply gas cylinder includes a cylinder body, a cylinder valve, a pipeline structure, a first check valve, a positive pressure regulating valve and a second check valve. The cylinder body includes an accommodating space and an opening. The cylinder valve closes the opening. The pipeline structure includes a first and second pipeline. The first check valve is one-way and disposed at the first pipeline. The first check valve has an opening pressure for a gas flow direction from the second end to the first end. The positive pressure regulating valve is disposed at the first pipeline and has an output pressure having a direction same as the gas flow direction from the second end to the first end. The second check valve is one-way and disposed at the first pipeline and is in the same direction as the flow direction of the input and stored gas.

The invention relates to a liquefied-fluid storage tank including a storage wall the inner surface of which defines a storage volume for liquefied fluid, the tank including an exchanger for cooling the fluid contained in the tank in particular to condense vapors of said fluid. The invention is characterized in that the cooling exchanger includes a body of metal, in particular aluminum, in which at least one pipe of a coolant circuit is integrated in order to cool said body and in that the body is in contact with and attached to the outer surface of the storage wall.

The present invention is a fluorohydrocarbon compound-filled gas container obtained by filling a gas container with a fluorohydrocarbon compound, the gas container being made of manganese steel, an amount of aluminum adhering to an inner surface of the gas container as measured by XPS analysis being 1 mol % or less, and the fluorohydrocarbon compound being a compound represented by C.sub.4H.sub.9F or C.sub.5H.sub.11F. The present invention provides a fluorohydrocarbon compound-filled gas container that is obtained by filling a gas container with a fluorohydrocarbon compound represented by C.sub.4H.sub.9F or C.sub.5H.sub.11F, and suppresses or reduces a decrease in the purity of the fluorohydrocarbon compound with which the gas container is filled.

A liquefied carbon dioxide producing apparatus that can generate high-purity liquid CO.sub.2 free from moisture and organic matter such as oil includes: a recirculating system that carries out a recirculating treatment on CO.sub.2; and an introduction device that introduces CO.sub.2 from an external source of CO.sub.2 into the recirculating system. The recirculating system includes at least an evaporator that vaporizes CO.sub.2, a condenser that condenses CO.sub.2 from an outlet of the evaporator, and a storage tank that stores liquid CO.sub.2 generated by the condenser. The liquid CO.sub.2 in the storage tank is fed to a point-of-use and to the evaporator. An adsorption device that removes moisture and organic matter (oil) is provided on a line from the external source of CO.sub.2 to the condenser at a position where CO.sub.2 gas flows.