The method for producing a filled container of the present invention includes: providing a metal storage container, at least an inner surface of which is formed of a manganese steel and in which the inner surface has a surface roughness R.sub.max of 10 μm or less; performing fluorination by bringing the inner surface of the storage container into contact with a gas containing at least one first fluorine-containing gas selected from the group consisting of ClF.sub.3, IF.sub.7, BrF.sub.5, F.sub.2, and WF.sub.6 at 50° C. or lower; purging the inside of the storage container with an inert gas; and filling the inside of the storage container with at least one second fluorine-containing gas selected from the group consisting of ClF.sub.3, IF.sub.7, BrF.sub.5, F.sub.2, and WF.sub.6.

A vacuum supply gas cylinder includes a cylinder body, a cylinder valve, a pipeline structure, a first check valve, a positive pressure regulating valve and a second check valve. The cylinder body includes an accommodating space and an opening. The cylinder valve closes the opening. The pipeline structure includes a first and second pipeline. The first check valve is one-way and disposed at the first pipeline. The first check valve has an opening pressure for a gas flow direction from the second end to the first end. The positive pressure regulating valve is disposed at the first pipeline and has an output pressure having a direction same as the gas flow direction from the second end to the first end. The second check valve is one-way and disposed at the first pipeline and is in the same direction as the flow direction of the input and stored gas.

A method of manufacturing a semiconductor device includes disposing a gas-storage cylinder storing monochlorosilane within a gas supply unit. The monochlorosilane is supplied from the gas-storage cylinder into a process chamber to form a silicon containing layer therein. The gas-storage cylinder includes manganese.

The invention relates to a liquefied-fluid storage tank including a storage wall the inner surface of which defines a storage volume for liquefied fluid, the tank including an exchanger for cooling the fluid contained in the tank in particular to condense vapors of said fluid. The invention is characterized in that the cooling exchanger includes a body of metal, in particular aluminum, in which at least one pipe of a coolant circuit is integrated in order to cool said body and in that the body is in contact with and attached to the outer surface of the storage wall.

There is provide a gas supply method including: preparing a gas container filled with an easy-to-liquefy gas; and supplying the easy-to-liquefy gas from the gas container to a processing container in which a substrate process is performed using the easy-to-liquefy gas, via a gas supply path, wherein a pressure and a temperature of the easy-to-liquefy gas are controlled such that in the gas supply path, the pressure of the easy-to-liquefy gas decreases in a step-by-step manner and the temperature of the easy-to-liquefy gas increases from the gas container toward the processing container.

A gas container having coating on the inner side that is applied directly onto a base material (110) of the gas container. The coating has a plurality of layers of at least one coating material that may be produced by an ALD method.

The method for producing a filled container of the present invention includes: providing a metal storage container, at least an inner surface of which is formed of a manganese steel and in which the inner surface has a surface roughness R.sub.max of 10 m or less; performing fluorination by bringing the inner surface of the storage container into contact with a gas containing at least one first fluorine-containing gas selected from the group consisting of ClF.sub.3, IF.sub.7, BrF.sub.5, F.sub.2, and WF.sub.6 at 50 C. or lower; purging the inside of the storage container with an inert gas; and filling the inside of the storage container with at least one second fluorine-containing gas selected from the group consisting of ClF.sub.3, IF.sub.7, BrF.sub.5, F.sub.2, and WF.sub.6.

A pneumatic valve controller is provided for use with a refillable gas tank that has an inlet and an outlet with a spring-loaded valve disposed in the outlet. The spring-loaded valve is biased to define a flow path between an interior of the gas tank and the outlet. The controller's housing includes a cylinder with a gas filling port in fluid communication with a first axial end of the cylinder. The cylinder's second axial end is open and aligned with the spring-loaded valve. A piston is disposed in the cylinder. A check valve has an input and an output with the input in fluid communication with the gas filling port and the output in fluid communication with the inlet of the gas tank.

A cryogenic liquid sampler is provided. The sampler includes an inner volume and a useful internal length, a cryogenic liquid inlet conduit in fluid connection with an inlet valve, a weir tube in fluid connection with the inlet valve, wherein the weir tube comprises at least one weir hole, wherein the weir tube extends a predetermined distance into the inner volume, a cryogenic liquid outlet conduit in fluid connection with inner volume and in fluid connection with an outlet valve, and a purge tube in fluid connection with the outlet valve.

One embodiment of the method includes: closing both the inlet valve and the outlet valve, connecting a cryogenic liquid source to the cryogenic liquid inlet conduit, and introducing cryogenic liquid into the cryogenic liquid inlet conduit; opening both the inlet valve and outlet valve, thereby introducing cryogenic liquid into the sampler vessel inner volume, the cryogenic liquid has a free surface; closing both the inlet valve and the outlet valve after cryogenic liquid flows from the purge tube; disconnecting the cryogenic liquid source from the cryogenic liquid inlet conduit; opening the inlet valve, thereby allowing cryogenic liquid to flow from the cryogenic liquid inlet conduit; and closing the inlet valve after the free surface in the sampler vessel inner volume drops below the top of the first cryogenic liquid level, and the cryogenic liquid flow stops.