The present invention provides a leak-proof fluid dispensing system with a pressure sensor and an adjustable dispensing regulator, comprising: a gas cylinder and a pressure dispensing control valve. The dispensing control valve is formed outside the bottle body opening and has an internal channel that communicates with an inlet port, an outlet port, a bottle port, and the joint portion. The internal of the dispensing body includes an inlet valve, an outlet valve, a pressure dispensing regulator, a filter, and a pressure sensor. The pressure at the outlet end of pressure dispensing regulator is lower than or equal to a preset opening pressure value, the fluid is allowed to flow out. With the implementation of the present invention, it may prevent accidental leakage of fluid in the gas cylinder and dynamically monitor the flow gas capacity in the gas cylinder.

A processing apparatus includes: a processing container configured to accommodate a substrate; a storage tank connected to the processing container via a gas supply pipe; a pressure sensor configured to detect a pressure in the storage tank; a valve provided in the gas supply pipe between the processing container and the storage tank; and a controller configured to control an opening degree of the valve based on the pressure in the storage tank detected by the pressure sensor.

A dense fluid recovery and supply pressure sensing system includes a dense fluid source, recovery tank and working tank, where the recovery tank is in connection with the dense fluid source with an input pipe configured with a pre-pressure valve and pre-pressure compressor, and the bottom of the recovery tank is configured with a weight measuring device measuring the weight of the recovery tank and in electric connection with the pre-pressure compressor, allowing the pre-pressure compressor to control the go and stop of the compression according to a value measured by the weight measuring device; the working tank is in connection with the recovery tank through a delivery pipe configured with a pressure building compressor and configured with a recovery pipe, another end of the recovery pipe is in connection with the input pipe of the recovery tank, and the recovery pipe is configured with a recovery valve.

A dense fluid recovery and supply pressure sensing system includes a dense fluid source, recovery tank and working tank, where the recovery tank is in connection with the dense fluid source with an input pipe configured with a pre-pressure valve and pre-pressure compressor, and the bottom of the recovery tank is configured with a weight measuring device measuring the weight of the recovery tank and in electric connection with the pre-pressure compressor, allowing the pre-pressure compressor to control the go and stop of the compression according to a value measured by the weight measuring device; the working tank is in connection with the recovery tank through a delivery pipe configured with a pressure building compressor and configured with a recovery pipe, another end of the recovery pipe is in connection with the input pipe of the recovery tank, and the recovery pipe is configured with a recovery valve.

A vacuum supply gas cylinder includes a cylinder body, a cylinder valve, a pipeline structure, a first check valve, a positive pressure regulating valve and a second check valve. The cylinder body includes an accommodating space and an opening. The cylinder valve closes the opening. The pipeline structure includes a first and second pipeline. The first check valve is one-way and disposed at the first pipeline. The first check valve has an opening pressure for a gas flow direction from the second end to the first end. The positive pressure regulating valve is disposed at the first pipeline and has an output pressure having a direction same as the gas flow direction from the second end to the first end. The second check valve is one-way and disposed at the first pipeline and is in the same direction as the flow direction of the input and stored gas.

Disclosed is a valve assembly and process for dispensing gas from a storage vessel that comprises a nozzle for discharging the gas. The valve assembly has a passage having a first end is in communication with the nozzle, and a second end in communication with an interior of the storage vessel where the gas is stored. A shut off valve is interposed in the passage for blocking or allowing gas to pass between said first end and the second end of the passage. A check valve may be secured in a bore of the nozzle to prevent accidental gas discharge.

The invention discloses a paired air pressure energy storage device, an inspection method and a balance detection mechanism thereof. The paired air pressure energy storage device includes an inner body and an outer body sleeved outside the inner body. The inner body is filled with a first gas. A cavity formed between the outer body and the inner body is filled with a second gas. There is a gas energy pressure difference between the first gas and the second gas. The gas energy pressure difference is relative pressure gas energy. The invention can store two gases with different pressure intensities, has a simple structure, is convenient for transportation, and is favorable for effective energy storage and long-term storage of gases.

The present invention provides a leak-proof fluid dispensing system with a pressure sensor and an adjustable dispensing regulator, comprising: a gas cylinder and a pressure dispensing control valve. The dispensing control valve is formed outside the bottle body opening and has an internal channel that communicates with an inlet port, an outlet port, a bottle port, and the joint portion. The internal of the dispensing body includes an inlet valve, an outlet valve, a pressure dispensing regulator, a filter, and a pressure sensor. The pressure at the outlet end of pressure dispensing regulator is lower than or equal to a preset opening pressure value, the fluid is allowed to flow out. With the implementation of the present invention, it may prevent accidental leakage of fluid in the gas cylinder and dynamically monitor the flow gas capacity in the gas cylinder.

Disclosed is a paired compress gas energy power system and power method. The paired compress gas energy power system includes: a paired compress gas energy storage device having a high pressure air container and a low pressure air container, the high pressure air container is filled with a high pressure gas, the low pressure air container is filled with a low pressure gas; a paired compress gas energy engine, respectively connected to the low pressure air container and the high pressure air container; and a power device connected to the rotary shaft of the paired compress gas energy engine, the power device is driven by the paired compress gas energy engine. The invention converts the paired compress gas energy into the mechanical torque energy through the paired compress gas energy engine to drive the power device to work, or to drive the generator to generate electric energy.

A processing apparatus includes: a processing container configured to accommodate a substrate; a storage tank connected to the processing container via a gas supply pipe; a pressure sensor configured to detect a pressure in the storage tank; a valve provided in the gas supply pipe between the processing container and the storage tank; and a controller configured to control an opening degree of the valve based on the pressure in the storage tank detected by the pressure sensor.