Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.

A thermal interface between a removable cryogenic refrigerator (4) and an article (10) to be cooled by the cryogenic refrigerator. The thermal interface consists of a recondensing chamber filled with a gas (12), the recondensing chamber being in thermal contact with a cooling surface (9) of the refrigerator and the article (10) to be cooled.

A service device for a multi-component insulating gas for use during maintenance of electrical switchgear systems comprising a compressor with a downstream condenser, a storage container, the service device is connected to a system space, and the compressor compresses the insulating gas during removal from the system space, all components of the insulating gas remain in the compressor in a gaseous state, the condenser is controlled by a controller so a condensation of the insulating gas occurs first in the storage container, a storage heating device is provided for the storage container, during filling of the system space the storage heating device heats the insulating gas to a temperature above the critical temperature of the insulating gas, wherein, a line heating device is provided which at least partially heats the pipeline between the storage container and the system space and/or heats elements in the pipeline.

Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.

A system for managing liquid supply is provided. The system includes an air pressure adjustor, a first liquid container, a second liquid container, a first tube, a second tube, an inlet sensor, and an outlet sensor. The first liquid container includes a liquid. The second liquid container includes an inlet and an outlet. The first tube is configured to be connected between the first liquid container and the inlet. The second tube is configured to be connected between the outlet and the air pressure adjustor. The inlet sensor is disposed on the first tube and for detecting the liquid flowing into the inlet. The outlet sensor is disposed on the second tube and for detecting the liquid flowing out from the outlet.

A method for generating an insulating vacuum in a container is provided. The method includes evacuating air from a space between double walls of the container for a first predetermined time period. The method also includes after the first predetermined time period, if a vacuum level within the space has not reached a first predetermined vacuum level, purging the space by supplying a gas into the space and subsequently evacuating the air from the space for a period of time equal to the first predetermined time period. The method also includes repeating the evacuating and purging until the vacuum level within the space reaches the first predetermined vacuum level. The method also includes when the vacuum level within the space reaches the first predetermined vacuum level, evacuating the air from the space for a second predetermined time period.

An LPG reclaim system for withdrawing and reclaiming liquefied petroleum gas (LPG) from an unspent LPG cylinder. The reclaim system has a reclaim station for reclaiming unspent LPG from LPG bottle containers, a compressor for applying a vacuum on the reclaim station and pressurizing LPG vapor from the reclaimed LPG fluid, and a receiving tanlc for receiving a stream of pressurized liquid LPG. The reclaim system has a pair of shell-and-tube heat exchangers include cold-side tubes and a hot side shell. The reclaimed LPG fluid is passed through the cold-side tubes, while the pressurizing LPG vapor is passed through the hot-side shell of the heat exchanger. The heat applied to the cold-side reclaimed LPG fluid promotes evaporation of the LPG fluid to LPG vapor for pressurizing, and the cooling applied to the hot-side pressurized LPG vapor promotes condensation of the LPG vapor to LPG liquid for the refill containers.

The present invention is a system and method of storing various quantities of cryogenic material with lower cost than systems found in prior art. Novel feature of the system is the ability to use minimum amounts of different types of energy to maintain various quantities of cryogenic material. An additional novel feature is the use of common components and materials.

The disclosure discloses an automatic gas cylinder filling device and an operating method thereof, includes a stand, an electronic scale, a PLC control unit, and a vacuum pump installed on an inner bottom plate of the stand. One side of the stand is provided with an 8-bottle gas cylinder rotating and weighing mechanism, a gas cylinder fixing mechanism, a gas cylinder filling fixture, a lifting frame and a bottle valve hand wheel switch mechanism that are arranged in sequence from bottom to top. The electronic scale is located below the 8-bottle gas cylinder rotating and weighing mechanism. The disclosure is used for filling gas cylinders, wherein the weighing, the fixing of the bottle valve and the rotation of the hand wheel are all automatically controlled and operated by the PLC control unit, and there is no need for operator to stay with the facility. The operation can be completed through operating the PLC control unit in the operation room, thereby preventing the filling personnel from being exposed to danger and harmed during the gas filling process. Meanwhile, the gas filling efficiency is greatly improved, the accuracy of the weighing is also ensured, and the proportion of each gas is highly accurate.

The disclosure discloses an automatic gas cylinder filling device and an operating method thereof, includes a stand, an electronic scale, a PLC control unit, and a vacuum pump installed on an inner bottom plate of the stand. One side of the stand is provided with an 8-bottle gas cylinder rotating and weighing mechanism, a gas cylinder fixing mechanism, a gas cylinder filling fixture, a lifting frame and a bottle valve hand wheel switch mechanism that are arranged in sequence from bottom to top. The electronic scale is located below the 8-bottle gas cylinder rotating and weighing mechanism. The disclosure is used for filling gas cylinders, wherein the weighing, the fixing of the bottle valve and the rotation of the hand wheel are all automatically controlled and operated by the PLC control unit, and there is no need for operator to stay with the facility. The operation can be completed through operating the PLC control unit in the operation room, thereby preventing the filling personnel from being exposed to danger and harmed during the gas filling process. Meanwhile, the gas filling efficiency is greatly improved, the accuracy of the weighing is also ensured, and the proportion of each gas is highly accurate.