Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.

Novel cylinder passivation procedures to increase the room temperature stability of gaseous tin deuteride (SnD.sub.4) are described. Incorporation of specific organic-containing materials, which when applied onto surfaces of a vessel and/or conduit extending therefrom, can increase the shelf life stability of thermodynamically unstable gases stored within such pretreated vessels.

A first control device executes, if it is determined that a second control device has become unable to output an operation instruction, continued operation processing for operating an inactive gas supply portion based on the operation instruction that was last output by the second control device. The first control device further executes, if it is determined during execution of continued operation processing that a stop condition is satisfied, operation stop processing for stopping the inactive gas supply portion by suspending the continued operation processing.

A gas storage and dispensing vessel, including a vessel container definishing a gas storage interior volume, and a valve head regulator assembly secured to the vessel container, the valve head regulator assembly including a single gas pressure regulator disposed in the interior volume of the vessel container, and a valve head including a pneumatic flow control valve, wherein the single regulator is configured with a set point pressure of at least 0.5 MPa, and wherein the interior volume of the vessel container is at least 5 L.

Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.

A safety vacuum supply gas cylinder includes a cylinder body, a pipeline structure, first and second check valves (respectively having first and second check valve opening pressures P.sub.c1, P.sub.c2, wherein P.sub.c1 is greater than an atmospheric pressure P.sub.0). The cylinder body has an opening and an internal space configured to store a gas, wherein the gas forms an internal pressure P.sub.2 smaller than P.sub.0. The pipeline structure, communicated with the opening, has first and second pipelines where the first and second check valves are respectively arranged. An external filling gas enters the cylinder body when a pressure of the external filling gas is greater than P.sub.c1 and P.sub.2. The gas flows out when P.sub.2 is greater than P.sub.c2 and an external environmental pressure.

A precursor supply cabinet for accommodating one or more precursor containers having cabinet walls defining an inner cabinet space. The precursor supply cabinet includes a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space, one or more ventilation inlet connections, two or more separate gas tight precursor supply chambers for accommodating precursor containers. The gas tight precursor supply chambers are arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the separate gas tight precursor supply chambers is ventilated.

Disclosed is system for automatically replacing a high-pressure gas tank, including: a high-pressure gas tank lift installed in a cabinet which is able to be elevated and including a die to load a high-pressure gas tank thereon; a high-pressure gas tank clamp clamping the high-pressure gas tank loaded on the die of the high-pressure gas tank lift to align the position of the high-pressure gas tank; a high-pressure gas tank connection unit removing an end cap from the high-pressure gas tank elevated by the high-pressure gas tank lift to automatically connect a connector holder to a gas injection nozzle and control the flow of gas; and control unit installed in the cabinet to control operation of the high-pressure gas tank connection unit, the high-pressure gas tank lift, and the high-pressure gas tank clamp.

A method for supplying helium to at least one end user is disclosed by feeding helium from at least one container of helium to an end user through at least one supply system, wherein a mass flow meter and a pressure transmitter, in electronic communication with a programmable logic controller measures an amount of helium being supplied to the at least one user, provides the amount to the programmable logic controller which provides a signal to the at least one end user of an amount of helium that remains in the at least one container and the temperature therein.

A gas cylinder transfer apparatus and a gas cylinder logistics system including the same are disclosed. The gas cylinder transfer apparatus includes a transfer vehicle for transferring a gas cylinder and a transfer robot disposed on the transfer vehicle. The transfer robot includes a robot hand for supporting a lower surface portion of the gas cylinder and a hand drive unit for moving the robot hand in horizontal and vertical directions.