Described are systems and methods of storing adsorbing diborane on carbon adsorption medium.

An end cap holder may include a base block and a holding block. The base block may be configured to provide an end cap, which may be at a nozzle of the gas cylinder, with a torque for combining/separating the end cap with/from the nozzle. An angle correction groove may be formed at a first surface of the base block oriented toward the end cap. The holding block may be rotatably receivable in the angle correction groove to hold the end cap. The holding block may selectively make point contact with the base block to transmit the torque of the base block to the end cap. Thus, the holding block may accurately hold the end cap tilted to a vertical axis or a horizontal axis.

An apparatus is provided for the storage and dispensing of a sorbable gas. The apparatus includes a storage and dispensing vessel constructed and arranged for containing a solid-phase physical sorbent medium having a sorbable gas adsorbed by said sorbent medium. The dispensing vessel includes a top head having a dispensing valve coupled to the vessel for discharging the sorbable gas therefrom. The dispensing valve is in fluid flow communication with a wick that extends below the upper third of the vessel top head. The wick collects the sorbable gas for discharge of the gas through the dispensing valve.

The method for producing a filled container of the present invention includes: providing a metal storage container, at least an inner surface of which is formed of a manganese steel and in which the inner surface has a surface roughness R.sub.max of 10 μm or less; performing fluorination by bringing the inner surface of the storage container into contact with a gas containing at least one first fluorine-containing gas selected from the group consisting of ClF.sub.3, IF.sub.7, BrF.sub.5, F.sub.2, and WF.sub.6 at 50° C. or lower; purging the inside of the storage container with an inert gas; and filling the inside of the storage container with at least one second fluorine-containing gas selected from the group consisting of ClF.sub.3, IF.sub.7, BrF.sub.5, F.sub.2, and WF.sub.6.

Disclosed is a high-pressure gas cylinder automatic replacement device, including: a holder fixedly provided on a main plate to be positioned at one side of a connector holder of a high-pressure gas cylinder connection unit; a movable member rotatably provided at the holder; a two-stage actuator provided at the holder such that rods thereof are respectively connected to the movable member and a bracket fixed to the main plate; a docking actuator enabling the movable member to move from the holder towards the connector holder side or vice versa; a gasket removal cartridge provided at the movable member to automatically remove used gaskets from the connector holder and to accommodate the same in turn; and a gasket insertion cartridge provided at the movable member positioned at the upper portion of the gasket removal cartridge to insert a new gasket accommodated therein into the connector holder.

A storage vessel to contain reagent material. The storage vessel includes a vessel with a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior including a volume, and an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.

A method for automatically opening or closing a gas barrel valve, includes: loading and aligning a gas barrel in a cabinet; separating an end cap from the gas barrel; screw-coupling a connector holder to a gas spray nozzle, from which the ends cap has been removed; winding a spring around a first shaft by enabling forward rotation of the first shaft while suppressing reverse rotation of the first shaft, which is installed in a valve handle holder so as to idle; opening a valve by enabling reverse rotation of a valve handle of the gas barrel while preventing forward rotation of the valve handle holder; and automatically closing the valve at the time of replacement of the gas barrel or when a gas leak is detected.

An apparatus for depressurizing a pair of accumulators to provide high pressure gas includes a tank in fluid communication with each one of the pair of accumulators for receiving vapor from the pair of accumulators for storage and dispensing the vapor to a remote location other than the pair of accumulators and external atmosphere, a first fluid connection including a first valve assembly interconnecting the tank and a first accumulator of the pair of accumulators, a second fluid connection including a second valve assembly interconnecting the tank and a second accumulator of the pair of accumulators, wherein the first fluid connection with the first valve assembly and the second fluid connection with the second valve assembly are each constructed and arranged to deliver the vapor from a corresponding one of the first accumulator and the second accumulator to the tank during alternating intervals. A related method and system are also provided.

A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.

The present invention provides a leak-proof fluid dispensing system with a pressure sensor and an adjustable dispensing regulator, comprising: a gas cylinder and a pressure dispensing control valve. The dispensing control valve is formed outside the bottle body opening and has an internal channel that communicates with an inlet port, an outlet port, a bottle port, and the joint portion. The internal of the dispensing body includes an inlet valve, an outlet valve, a pressure dispensing regulator, a filter, and a pressure sensor. The pressure at the outlet end of pressure dispensing regulator is lower than or equal to a preset opening pressure value, the fluid is allowed to flow out. With the implementation of the present invention, it may prevent accidental leakage of fluid in the gas cylinder and dynamically monitor the flow gas capacity in the gas cylinder.